semi合集-English.pdf - 第5587页

SEMI P10-0705 © SEMI 1990, 2005 82 - < x s : s e q u e n c e > < x s : e l e m e n t n a m e = " V e n d o r Co n t a c t " t y p e = " x s : s t r i n g " m i n Oc cu r s = " 0 " /…

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SEMI P10-0705 © SEMI 1990, 2005 81
< xs: elem ent nam e= "Pa t t e r nGr ou pResult s"
type
= " Pa t t e r nGr oupResult sType" m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Pha seShiftMea sur em ent s"
type
= " Pha se Shift M easurem e ntsType" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Regist rMea su re m e nt s"
type
= " Regist r M ea su re m e nt sType" m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Closure M easurem e nts"
type
= " Closu reM e a surem e nt sType " m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "CdGroupM easu re m ent s"
type= "CdGroupM e a su r em e nt sType" m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "CdSet Result s" t ype= " CdSe t Re sult sType"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdXyResult s" t ype= " CdXyResult sType"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdI soDen seRe su lt s"
type
= " CdI soD ense ResultsType " m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "De fect M easur em en t s"
type
= " Defe ct M e a sur e m ent sType " m inOccurs= "0
"
m axOccurs
= "u nbounde d" / >
- < xs: elem ent nam e= "ThroughPellicleD efe ct s" m inOccurs= "0 "
m axOccurs
= "u nbounde d">
- < xs: com plexType>
- < xs: com plexCont ent>
< xs: ext ension
base= "Defe ct M e a sur e m e nt sType " / >
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Su rfa ce I nspM ea su rem ent s"
type
= " Su rface I nspM easure m e n t sType " m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "QualityGrou pI d" type= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Fina lQcAudit or" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Addit iona lResult sI nfo" type= " xs:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt MaskResult sOpt ion s" / >
< xs: at t ribut e
nam e= " p1 0 End" type= " xs:st rin g" use= " required"
fixed
= "En dM a sk Result sOpt ions" / >
< / xs: com plexType>
- < xs: com plexType nam e= "Ven dorI nfoType">
SEMI P10-0705 © SEMI 1990, 2005 82
- < xs: sequence>
< xs: elem ent nam e= "Vendor Con t a ct " t ype= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Vendor Phone" type= "xs:st r in g"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Ve ndorAddre ss" type= "xs:st ring"
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Vendor Fax" type= "xs:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Vendor Em a il" t ype= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Fina lQcAudit or" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Vendor Or der I d" type= "x s:st ring"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt V endor I nfo" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= "
re qu ire d"
fixed
= "En dVe n dorI n fo" / >
< / xs: com plexType>
- < xs: com plexType nam e= "BillingI nfor m at ionType" >
- < xs: sequence>
< xs: elem ent nam e= "Bla nk e t PoN um ber" t y pe= "x s:string"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "PoNum be r" type= "xs:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "SoN um ber" t ype= " x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "ReleaseN um ber " t ype= "x s:st rin g"
m inOccurs
= "
0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt BillingI nfor m a t ion" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndBillingI nfor m a t ion" / >
< / xs: com plexType>
- < xs: com plexType nam e= "M a t er ia lsUsedType" >
- < xs: sequence>
< xs: elem ent nam e= "
TopPe llicleUsed" type= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bott om PellicleUse d" type= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Pa ck a geUsed" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Subst ra t e " type= " Subst ra t e Type "
m inOccurs= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 83
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Mat eria lsUsed" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dM a t e r ia lsUsed" / >
< / xs: com plexType>
- < xs: com plexType nam e= "Subst ra t e Type">
- < xs: sequence>
< xs: elem ent nam e= "Bla nk Le ngt h" t ype
= " xs:double" / >
< xs: elem ent nam e= "Blank W idt h" type= "xs:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Thick ne ss" t y pe= "x s:double " / >
< xs: elem ent nam e= "Bla nk Type" type= "xs:st r ing" / >
< xs: elem ent nam e= "Bla nk Gr a de " t ype= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Flat ne ss" type= "xs:dou ble"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Flat ne ssUse d" t ype= "xs:double
"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Ven dor " t ype= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Birefr ingen ceReqd"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Bla nk Bire fr inge nce Use d"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Coa t ing" t ype= "Coa t ingType"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "Bla nk I ndex OfRe fra ct ion"
type
= " x s:dou ble"
m inOccurs= "0 " / >
< xs: elem ent nam e= "Bla nk Lot " t ype= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Dat eOfMfg" type= " xs:da t eTim e "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "EuvBla nk Type"
type
= " EuvBla nkTypeType " m inOccurs= "0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use
= "r e quir ed"
fixed
= "St a rt Subst ra t e " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dSubst r a t e " / >
< / xs: com plexType>
- < xs: com plexType nam e= "Coa t in gType ">
- < xs: sequence>
- < xs: elem ent nam e= "Coa t ingType" >
- < xs: sim pleType>
- < xs: rest riction base= " x s:string">