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SEMI E87-0705 © SEMI 1999, 2005 5 7.2 Stat e Model Methodology 7.2.1 A state model has three ele ments: definitions of each st ate and sub-state, a diagram of the states and the transitions between states, and a state tr…
SEMI E87-0705 © SEMI 1999, 2005 4
Status Data Collection
Equipment Constants
Alarm Management
Equipment Control
6.3 Object-Based Standards
Object Services Standard (SEMI E39)
Event Reporting (SEMI E53)
Exception Management (SEMI E41)
7 Conventions
7.1 Objects
7.1.1 Whenever the equipment is required to know about specific kinds of entities, and required to manage
information concerning these entities, it is useful to treat these entities as objects that comply with the basic
requirements of SEMI E39 Object Services Standard (OSS). This is especially true whenever there are a large
number of objects of a given type or when the entities are transient rather than permanent. In both cases, it is
difficult to describe a general way for the host and equipment to specify which particular entity is referenced and to
get information related only to a specific one out of many.
7.1.2 By defining these entities as objects that comply with OSS, it is only necessary for the host to specify the type
of object and its specific identifier in order to inquire about one or more properties of the specific entity of interest.
7.1.3 Object Properties
7.1.3.1 A property (attribute) is information about an individual object that is presented as a name/value pair. The
name is a formally reserved text string that represents the property, and the value is the current setting for that
property.
7.1.3.2 Properties shall be accessible to the host via the service GetAttr for the Carrier object. Using SEMI E39
Object Services Standard, for example, it is possible to:
get the list of IDs for the current carriers at the equipment, and
get the specified properties for one or more individual carriers.
7.1.4 Rules for Object Properties
Attributes with RO access can not be changed using SetAttr service as defined in OSS.
Attributes with RW access can be changed using SetAttr service as defined in OSS.
Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting
with “UD” (User Defined). Care should be taken to ensure the name of the attribute is unique.
7.1.5 Object Attribute Table
7.1.5.1
The object attribute table is used to list all the attributes related to the defined object as shown below the
access is defined as Read only (RO) or Read/Write (RW). The REQD column is used to specify whether the
attribute is required for implementation. Finally, the Form column is used to specify the format of that particular
attribute.
Table 1 Object Attribute Table
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text = “Carrier”
SEMI E87-0705 © SEMI 1999, 2005 5
7.2 State Model Methodology
7.2.1 A state model has three elements: definitions of each state and sub-state, a diagram of the states and the
transitions between states, and a state transition table. The diagram of the state model uses the Harel State Chart
notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is
presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex Systems”, by D.
Harel, 1987
1
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7.2.2 State Model Requirements
7.2.2.1 The state models included in this standard are a requirement for CMS compliance. A state model consists of
a state model diagram, state definitions, and a state transition table. All state transitions in this standard, unless
otherwise specified, shall correspond to collection events. More explicitly, there must be a unique collection event
for each state transition.
7.2.2.2 Equipment must maintain state models for each of the required state models as defined in this document.
Equipment shall maintain individual and unique state models for each logical entity instantiated or physical entity in
the equipment that has state models associated with it. The event identifier reported during a particular state
transition change for each of these state models shall be shared for all associated state models but unique for each
transition. For example, if the equipment has two load ports and the load port state model defines 10 transitions,
there must be exactly 10 event identifiers for each load port transfer state model but not 10 for each physical load
port. The information identifying the physical entity or logical entity undergoing the transition will be contained
within the associated event report.
7.2.2.3 A state model represents the host's view of the equipment, and does not necessarily describe the internal
equipment operation. All CMS state model transitions shall be mapped sequentially into the appropriate internal
equipment collection events that satisfy the requirements of those transitions. In certain implementations, the equip-
ment may enter a state and have already satisfied all of the conditions required by the CMS state model for transition
to another state. In this case, the equipment makes the required transition without any additional actions in this
situation.
7.2.2.4 Some equipment may need to include additional sub-states other than those in this standard. Additional sub-
states may be added, but shall not change the CMS defined state transitions. All expected transitions between CMS
states shall occur.
7.2.2.5 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,
Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The
“actions” (column 5) includes a combination of:
Actions taken upon exit of the previous state,
Actions taken upon entry of the new state, and
Actions taken which are most closely associated with the transition.
7.2.2.6 When a state model is defined with multiple AND sub-states, the equipment may report all state entry
events with only one collection event. When conditional paths are defined in the state model, it is not necessary to
report any state transition(s) until a terminal state is reached at which time each transition used to reach that state is
reported.
Table 2 State Transition Table
Num Previous State Trigger New State Actions Comments
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SEMI E87-0705 © SEMI 1999, 2005 6
7.3 Services
7.3.1 Services are functions or methods that may be provided by either the equipment or the host. A service
message may be either a request message, which always requires a response, or a notification message that does not
require a response.
7.3.2 Service Message Description
7.3.2.1 A service message description table defines the parameters used in a service, as shown in the following
table:
Table 3 Service Message Description Table
Service Name Type Description
#1
Type can be either “N” = Notification or “R” = Request & Response.
7.3.2.2 Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does
not expect to get a response from the service user. Request messages are initiated by a service user (e.g., the host).
Request messages ask for data or an activity from the provider. Request messages expect a specific response
message (no presumption on the message content).
7.3.3 Service Message Parameter Definition
7.3.3.1 A service parameter dictionary table defines the description, range, and type for parameters used by
services, as shown in the following table:
Table 4 Service Message Parameter Definition Table
Parameter Name Form Description
#1
A row is provided in the table for each parameter used on a service.
7.3.4 Service Message Definition
7.3.4.1 A service message description table defines the parameters used in a service message. It also describes each
message and its cause/effect to the equipment. The columns labeled Req/Ind and Rsp/Conf link the parameters to the
direction of the message.
Service Parameter Req/Ind Resp/Conf Description
7.3.4.2 The columns labeled Req/Ind and Rsp/Conf link the parameters to the direction of the message. The
message sent by the initiator is called the “Request”. The receiver terms this message the “Indication”. The receiver
may then send a “Response”, which the original sender terms the “Confirmation”.
7.3.4.3 The following codes appear in the Req/Ind and Rsp/Conf columns and are used in the definition of the
parameters (e.g., how each parameter is used in each direction):
“M” Mandatory Parameter – must be given a valid value.
“C” Conditional Parameter – may be defined in some circumstances and undefined in others. Whether a value is given may
be completely optional or may depend on the values of other parameters.
“U” User-Defined Parameter.
“-” The parameter is not used.
“=” (for response only) Indicates that the value of this parameter in the response must match that in the primary (if defined).