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SEMI D17-0200 © SEMI 1998, 2000 6 Symbol Used Shown I n Datum Meas ured From Boundary or Fea ture Measur ed To Algebraic Relation or Value y9 Figure 2 facial datum plane outside edge of ca ssette top and bottom plate d o…

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SEMI D17-0200 © SEMI 1998, 20005
Table 3 Cassette Side Domains
Symbol
Used
Shown In Datum Measured From Boundary or Feature Measured To Algebraic
Relation or Value
r1 Figure 3 center of coupling exclusion zone outside edge of coupling exclusion zone < 15 mm
x1 Figure 2 bilateral datum plane encroachment of cassette side domains
on substrate extraction volume
2
57.0*W
≥
x2 Figure 2 bilateral datum plane outside edge of cassette side domains ≤ W + 37
x3 Figure 2 bilateral datum plane inside edge of rear cassette domains ≥ x1 – 40
x4 Figure 2 bilateral datum plane outside edge of rear cassette domains
2
57.0*W
≥
x5 Figure 2 nominal substrate center line outside edge of substrate pick-up zone ≥ W + 2
x6 Figures 2
and 4
nominal substrate center line encroachment of cassette side domains
on substrate extraction volume
≥ x5
x7 Figure 2 nominal substrate center line outside edge of cassette top and bottom
domain
≤ W + 37
x8 Figure 3 bilateral datum plane inside edge of cassette sensing pad areas
= W * 0.71 ±
5.0 mm
x9 Figure 3 bilateral datum plane outside edge of cassette sensing pad
areas
= W * 0.78 ±
5.0 mm
x10 Figure 4 bilateral datum plane encroachment of cassette top domain on
robotic handling flange space
≤ W * 1.02
x11 Figure 4 bilateral datum plane far side of robotic handling flanges ≤ W * 1.05
x12 Figure 3 bilateral datum plane inside edge of conveyor rail exclusion
zones
≥ W * 0.752
x13 Figure 3 bilateral datum plane outside edge of conveyor rail exclusion
zones
≤ W * 0.877
x14 Figure 3 bilateral datum plane center of coupling exclusion zones
= W * 0.9455 ±
0.1 mm
x15 Figures 3
and 6
bilateral datum plane centerline of v-rail roller
= W * 0.815 ±
0.2 mm
x16 Figure 6 bilateral datum plane centerline of float roller
= x19 ± 2.0 mm
x17 Figure 3 bilateral datum plane inside edge of facial datum plane v-
groove
= W * 0.0245 ±
0.2 mm
x18 Figure 3 bilateral datum plane outside edge of facial datum plane v-
groove
= W * 0.020 ±
0.2 mm
x19 Figure 6 bilateral datum plane left edge of v-groove exclusion zone ≥ W * 0.069
x20 Figure 6 bilateral datum plane right edge of v-groove exclusion zone ≥ W * 0.109
x21 Figure 6 bilateral datum plane inside edge of float roller exclusion zone ≤ W * 0.742
x22 Figure 6 bilateral datum plane outside edge of float roller exclusion
zone
≥ W * 0.884
y1 Figure 2 facial datum plane encroachment of cassette side domain ≥ L * 0.031
y2 Figure 2 facial datum plane encroachment of cassette side domain ≤ L * 0.454
y3 Figure 2 facial datum plane encroachment of cassette side domain ≥ L * 0.515
y4 Figure 2 facial datum plane encroachment of cassette side domain ≤ L * 0.938
y5 Figure 2 facial datum plane outside edge of substrate pick-up volume ≤ L + 1
y6 Figure 2 facial datum plane encroachment of cassette side domains
on substrate set-down volume
≥ L + 1
y7 Figure 2 facial datum plane encroachment of cassette side domains
on substrate extraction volume
≥ L + 3
y8 Figure 2 facial datum plane boundary of rear cassette domain ≤ L * 1.12
SEMI D17-0200 © SEMI 1998, 2000 6
Symbol
Used
Shown In Datum Measured From Boundary or Feature Measured To Algebraic
Relation or Value
y9 Figure 2 facial datum plane outside edge of cassette top and bottom
plate domain
≤ L * 1.21
y10 Figure 3 facial datum plane inside edge of cassette top and bottom
plate indent
≤ L * 0.985
y11 Figure 3 facial datum plane inside edge of cassette sensing pad areas ≥ L * 0.708
y12 Figure 3 facial datum plane outside edge of cassette sensing pad
areas
≤ L * 0.954
y13 Figure 3 facial datum plane center of coupling exclusion zones
= L * 0.923 ±
0.1 mm
z1 Figure 4 horizontal datum plane bottom of cassette bottom domain
≥ 2 mm
z2 Figure 4 horizontal datum plane bottom of cassette sensing pads
= 3 ± 0.5 mm
z3 Figure 6 horizontal datum plane bottom surface of conveying surface
= 2 ± 0.5 mm
z4 Figure 4 horizontal datum plane top of cassette bottom domain
≤ 40 mm
z5 Figure 4 horizontal datum plane bottom nominal substrate seating plane = 60 mm
z6 Figure 4 each nominal substrate seating plane bottom of substrate
= ± 0.5 mm
z7 Figure 4 each nominal substrate seating plane encroachment of cassette side domains
on clearance above the substrate
See Table 4.
z8 Figure 4 each nominal substrate seating plane adjacent nominal substrate seating planes See Table 4.
z9 Figure 4 top nominal substrate seating plane bottom of cassette top domain
≥ z7 + 1 mm
z10 Figure 4 top nominal substrate seating plane bottom of clearance under robotic
handling flange
≤ 30 mm
z11 Figure 4 top nominal substrate seating plane top of clearance under robotic handling
flange
= 40 ± 1 mm
z12 Figure 4 top nominal substrate seating plane top of top cassette domain
≤ 50 mm
z14 Figure 6 horizontal datum plane top of v-rail, v-groove, and float roller
exclusion zones
= 24.86 ±
0.12 mm
SEMI D17-0200 © SEMI 1998, 20007
Figure 1
Isometric Views