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SEMI E6-0303 © SEMI 1982, 2003 19 Data Sheet 700 – Drains (See SEMI E6 Section 15) 700 Drains A B C D E F G 1 Equipment Component Drains Connection Number Connection Label on Equipment Utility Type Line Source Process Na…

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SEMI E6-0303 © SEMI 1982, 2003 18
to act as a specification for the discharged fluid. For
example:
• chemical waste—caustic
• chemical waste—acidic
• chemical waste—fluoride
• chemical waste—solvent
• chemical waste—slurry
• chemical waste—acid rinse
• UPW reclaim
15.2.5 Line Source (700E) — Identify the source of the
drain line for this connection. If the line comes from a
provided component covered in the data sheets enter the
connection number(s) at the other end of the line. If the
line comes from a facilities source enter facilities
system. For example: 703 or facilities system.
15.2.6 Process Name (700F) — Enter the name of the
process the discharged fluids come from in this drain
connected. For example: Photoresist Strip.
15.2.7 Drain Conveyed Process Wastes (700G) —
Enter the specific chemical with typical concentration
of total combined stream and any potential byproducts
that may come through the referenced drain connection.
In particular, identify any discharge that might be
regulated by the semiconductor manufacturers’
discharge permit. For example: sulfuric acid (75%)
combined with H
2
O
2
(15%).
15.2.8 Maximum Discharge Pressure (700H) — Enter
the highest discharge pressure for the equipment
processing cycle. For gravity drains the pressure would
be 0.
15.2.9 Maximum Flow (700I) — Enter the maximum
flow rate (for the equipment processing cycle or idle
condition whichever is greater). Note in the comments
cell if the flow is batch or intermittent, as applicable.
Also note in the comments cell any abnormal situation
requiring an unusual, high flow rate. For example:
Emergency dump rate will be 20 lpm.
15.2.10 Idle Average Flow (700J) — Enter the average
flow rate when equipment is in idle condition.
15.2.11 Process Average Flow (700K) — Enter the
average flow rate over the processing cycle.
15.2.12 Maximum Temperature (700L) — Enter the
maximum expected temperature of the referenced fluid
discharged at the outlet of the equipment.
15.2.13 Equipment Component Fitting Size (700M) —
Enter the line or fitting size of the connection provided
on the equipment component. For example: 6 or 0.25.
In row 2 enter or select the units of measure for the
specified fitting size. For example: mm.
15.2.14 Equipment Component Fitting Material (700N)
— Enter a general description of the fitting material of
the connection provided on the equipment component.
For example: Teflon
®
.
15.2.15 Equipment Component Fitting Type (700O) —
Enter the generic style of the fitting of the connection
provided on the equipment component. Be sure to
include type and gender of fitting.. For example: KF or
Female Pipe Thread (FPT).
15.2.16 Drawing References (700P) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYYY. Submit referenced material to
equipment purchaser with this data sheet.
15.2.17 Drains Comments (700Q) — Enter any
comments necessary to clarify data provided for this
connection. For example: Drain should be adequately
vented external to the equipment so that the flow during
a batch dump will not create any measurable
backpressure.
SEMI E6-0303 © SEMI 1982, 2003 19
Data Sheet 700 – Drains (See SEMI E6 Section 15)
700 Drains
A B C D E F G
1
Equipment
Component
Drains
Connection
Number
Connection
Label on
Equipment
Utility Type Line Source Process
Name
Drain Conveyed
Process Wastes
2
text text text text text text text
3
4
5
6
700 Drains
H I J K L M
1
Maximum
Discharge
Pressure
Maximum Flow Idle Average
Flow
Process
Average Flow
Maximum
Temperature
Equipment
Component
Fitting Size
2
kPa lpm lpm lpm degrees C. mm or inches
3
4
5
6
700 Drains
N O P Q
1
Equipment
Component Fitting
Material
Equipment
Component Fitting
Type
Drawing References Drains Comments
2
text text text text
3
4
5
16 Gases Data Sheet
16.1 Include in the Gases Data Sheet the requested
information for equipment connections to facilities
systems including bulk gas supply and process specialty
gas supply. Bulk gases generally run in manifolds
throughout the fab, versus specialty gases that have a
single, direct connection to a cylinder gas cabinet or
panel. Bulk gas supply typically includes house gas
supply systems for Natural Gas, Argon, Hydrogen,
Helium, Nitrogen, Oxygen, Control Dry Air (CDA) or
Oil Free Air (OFA). Do NOT include gas detection
systems connection in this data sheet.
16.2 Data Sheet 800, Gases contains the following
items.
16.2.1 Equipment Component (800A) — Enter the
name of the equipment component where the
connection is located. The name should the same name
used in Data Sheet 200 and 300. For example:
Mainframe or Pump.
16.2.2 Gas Connection Number (800B) — Enter a
unique connection number for every utility connection.
For example: 801, 802, 803, and so on.
16.2.3 Connection Label on Equipment (800C) —
Enter the name found on the label that identifies this
physical connection on the equipment. For example N
2
Purge.
16.2.4 Utility Type (800D) — Enter the name of gas to
be provided through the connection. SEMI E52 should
be used for naming gases.
16.2.5 Line Source (800E) — Identify the source of the
supply line for this connection. If the line comes from a
provided component covered in the data sheets enter the
connection number(s) at the other end of the line. If the
SEMI E6-0303 © SEMI 1982, 2003 20
line comes from a facilities source enter facilities
system. For example: 803 or facilities system.
16.2.6 Gas State (800F) — Enter information
regarding the gases properties such as liquefied gas,
pure gas, or gas mixture.
16.2.7 Purity Requirements (800G) — List minimum
purity requirements and basis of purity. For example:
ppm, vol.%, wt.%. If applicable indicate SEMI Gas
Standards.
16.2.8 Contaminants (800H) — Enter the type and
value of significant impurities. For example: CH4 < 2
ppm.
16.2.9 Filtration (800I) — If a filter is required prior to
the equipment point of connection enter the filter
specification (% removal at maximum particle size).
For example: 100% at 0.02 micron. If not enter n/a.
16.2.10 Minimum Pressure (800J) — Enter the
minimum supply pressure necessary for the equipment
to operate correctly.
16.2.11 Maximum Pressure (800K) — Enter the
highest supply pressure that can be used to operate the
equipment correctly.
16.2.12 External Regulator (800L) — If a regulator is
required prior to the equipment point of connection
enter the regulator specification. If not enter n/a.
16.2.13 Idle Average Flow (800M) — Enter the
average flow rate when equipment is in idle condition.
16.2.14 Process Average Rate (800N) — Enter the
average flow rate for the processing cycle.
16.2.15 Maximum Flow (800O) — Enter the maximum
flow rate (for equipment processing cycle or idle
condition, whichever is greater).
16.2.16 Equipment Component Fitting Size (800P) —
Enter the line or fitting size of the connection provided
on the equipment component. For double containment
this would be the inner fitting. Use the units indicated
by the fitting manufacturer. For example: 6 or 0.25. In
row 2 enter or select the units of measure for the
specified fitting size. For example: mm or inches.
16.2.17 Equipment Component Fitting Material
(800Q) — Enter a general description of the fitting
material of the connection provided on the equipment
component. For example: 316 Stainless Steel or Brass.
16.2.18 Equipment Component Fitting Type (800R) —
Enter the generic style of fitting of the connection
provided on the equipment component. Be sure to
include type and gender of the fitting. For example:
Face Seal or Female Pipe Thread (FPT).
16.2.19 Double Containment (800S) — Enter yes if
double containment is necessary for utility type
supplied through the connection, enter no if not
necessary.
16.2.20 Equipment Component Double Containment
Fitting Size (800T) — Enter the line or fitting size of the
double containment connection on the equipment. This
would be the outer fitting. Use the units indicated by
the fitting manufacturer. For example: 12 or 0.50. In
row 2 enter or select the units of measure for the
specified fitting size. For example: mm.
16.2.21 Equipment Component Double Containment
Fitting Material (800U) — Enter a general description
of the fitting material of the double containment
connection the equipment. For example: 316 Stainless
Steel or Monel.
16.2.22 Equipment Component Fitting Type (800V) —
Enter the generic style of fitting of the double
containment connection on the equipment. Be sure to
include the type and gender of fitting provided on
equipment. For example: Flare or Female Pipe Thread
(FPT).
16.2.23 Drawing References (800W) — Enter
references, such as drawing numbers, for any drawings,
schematics, instructions, jigs or fixtures showing this
connection. For example: connection template XXXXX
and P&ID YYYYYY. Submit referenced material to
equipment purchaser with this data sheet.
16.2.24 Gases Comments (800X) — Enter any
comments necessary to clarify data provided for this
connection. For example: Enter any important
information about the character of the gas, gas line, or
connection that is not indicated in any of the other cells
related to this connection.