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SEMI E54.9-0303 © SEMI 2000, 2003 14 Table 38 A ssembly-ISPM#7 Object In stance Attributes and Services Assembly-ISPM#7 Class ID = 147, Instance ID = 01 through r Attributes ID Attribute Name SDM Tag -- No additional att…
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Table 32 Assembly-ISPM#1 Object Instance
Attributes and Services
Assembly-ISPM#1
Class ID = 141, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.8 Assembly-ISPM#2 –– The presentation of the
Assembly #2 In-Situ Particle Monitor (Assembly-
ISPM#2) object attributes and services are as indicated
in Table 33.
Table 33 Assembly-ISPM#2 Object Instance
Attributes and Services
Assembly-ISPM#2
Class ID = 142, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.9 Assembly-ISPM#3 –– The presentation of the
Assembly #3 In-Situ Particle Monitor (Assembly-
ISPM#3) object attributes and services are as indicated
in Table 34.
Table 34 Assembly-ISPM#3 Object Instance
Attributes and Services
Assembly-ISPM#3
Class ID = 143, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.10 Assembly-ISPM#4 –– The presentation of the
Assembly #4 In-Situ Particle Monitor (Assembly-
ISPM#4) object attributes and services are as indicated
in Table 35.
Table 35 Assembly-ISPM#4 Object Instance
Attributes and Services
Assembly-ISPM#4
Class ID = 144, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.11 Assembly-ISPM#5 –– The presentation of the
Assembly #5 In-Situ Particle Monitor (Assembly-
ISPM#5) object attributes and services are as indicated
in Table 36.
Table 36 Assembly-ISPM#5 Object Instance
Attributes and Services
Assembly-ISPM#5
Class ID = 145, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.12 Assembly-ISPM#6 –– The presentation of the
Assembly #6 In-Situ Particle Monitor (Assembly-
ISPM#6) object attributes and services are as indicated
in Table 37.
Table 37 Assembly-ISPM#6 Object Instance
Attributes and Services
Assembly-ISPM#6
Class ID = 146, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.13 Assembly-ISPM#7 –– The presentation of the
Assembly #7 In-Situ Particle Monitor (Assembly-
ISPM#4) object attributes and services are as indicated
in Table 38.
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Table 38 Assembly-ISPM#7 Object Instance
Attributes and Services
Assembly-ISPM#7
Class ID = 147, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.14 Assembly-ISPM#8 –– The presentation of the
Assembly #8 In-Situ Particle Monitor (Assembly-
ISPM#8) object attributes and services are as indicated
in Table 39.
Table 39 Assembly-ISPM#8 Object Instance
Attributes and Services
Assembly-ISPM#8
Class ID = 148, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.15 Assembly-ISPM#9 –– The presentation of the
Assembly #9 In-Situ Particle Monitor (Assembly-
ISPM#9) object attributes and services are as indicated
in Table 40.
Table 40 Assembly-ISPM#9 Object Instance
Attributes and Services
Assembly-ISPM#9
Class ID = 149, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4 Specific Device Model for Endpoint Device
These sections detail the network mapping required to
support the Specific Device Model for Endpoint
Devices. Table 41 summarizes the Endpoint Device
object types. Subsequent Tables 42 to 48 detail the
attributes and services associated with each Endpoint
Device object type.
Table 41 Endpoint Device Object Types
SDM Object
Identifier
Object Name Modbus
Class ID
EPD1 (DM) Device Manager 1
EPD2 (SAC) Sensor Actuator
Controller
2
EPD3 Sensor-BI-TH-EP 150
EPD4 Assembly-EPD#1 151
EPD5 Assembly-EPD#2 152
EPD6 Assembly-EPD#3 153
EPD7 Assembly-EPD#4 154
9.4.1 Device Manager The presentation of the
Device Manager object attributes and services that are
specified in the CDM is specified in Section 7. The
presentation of the extended Device Manager object
attributes and services that are specified in the SDM for
Endpoint Devices is specified in Table 42.
Table 42 DM Object Instance Attributes and
Services
Device Manger (DM)
Class ID = 0001, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.2 Sensor Actuator Controller The presentation
of the Sensor Actuator Controller object attributes and
services that are specified in the CDM is specified in
Section 7. The presentation of the extended Sensor
Actuator Controller object attributes and services that
are specified in the SDM for Endpoint Devices is
specified in Table 43.
Table 43 SAC Object Instance Attributes and
Services
Sensor Actuator Controller (SAC)
Class ID = 0002, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
65 Number of Endpoint Objects SacA65
Services
ID Service Name SDM Tag
33 Reset Endpoint S33
34 Download Recipe S34
35 Upload Recipe S35
36 Calibrate S36
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9.4.3 Sensor-BI-TH-EP The presentation of the
Sensor, Binary Input, Threshold type, Endpoint object
attributes and services is specified in Table 44.
Table 44 Sensor-BI-TH-EP Object Instance
Attributes and Services
Sensor-BI-TH-EP
Class ID = 0150, Instance ID = 0001 - 1024
Attributes
ID Attribute Name SDM Tag
129 Value SbithepA16
130 Reading Valid SbithA64
131 State SbithA65
132 Status SbithA66
133 Minimum Time EpA1
134 Maximum Time EpA2
135 Target Time EpA3
136 Elapsed Time EpA4
137 Time Stamp EpA5
138 Recipe Identifier EpA6
139 Step Identifier EpA7
Services
ID Service Name SDM Tag
129 Endpoint On S1
130 Endpoint Off S2
131 Endpoint Start S3
132 Endpoint Suspend S4
133 Endpoint Resume S5
9.4.4 Assembly-EPD#1 The presentation of the
Assembly #1 Endpoint Device object attributes and
services is specified in Table 45.
Table 45 Assembly-EPD#1 Object Instance
Attributes and Services
Assembly-EPD#1
Class ID = 0151, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.5 Assembly-EPD#2 The presentation of the
Assembly #2 Endpoint Device object attributes and
services is specified in Table 46.
Table 46 Assembly-EPD#2 Object Instance
Attributes and Services
Assembly-EPD#2
Class ID = 0152, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.6 Assembly-EPD#3 The presentation of the
Assembly #3 Endpoint Device object attributes and
services is specified in Table 47.
Table 47 Assembly-EPD#3 Object Instance
Attributes and Services
Assembly-EPD#3
Class ID = 0153, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.4.7 Assembly-EPD#4 The presentation of the
Assembly #4 Endpoint Device object attributes and
services is specified in Table 48.
Table 48 Assembly-EPD#4 Object Instance
Attributes and Services
Assembly-EPD#4
Class ID = 0154, Instance ID = 0001
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --