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SEMI E42-0704 © SEMI 1995, 2004 120 BAKE;2.3 BakeTime undefined for unlinked recipe R1-6 Applications of Object Serv ices Object Service s are defined in SEMI E39 (Object Servic es Standard ( OSS): Conce p ts, Behavi or,…

SEMI E42-0704 © SEMI 1995, 2004 119

minimum = 100 seconds

maximum = 300 seconds;

TIME BakeTime • (200,100,300,”s”) /* default,min,max,units */

that define the process parameter “BakeTime”, its initial value and restrictions. The BAKE;2.3 recipe may use the

BakeTime parameter in further internal statements to determine the length of time a wafer is processed, such as:

wait for TIME BakeTime;

This parameter may then be set by a parent recipe as in Example (1) below or from the EqpSpec_PARAM attribute

(see 5.3.1.4) or with a “Select Recipe” command from the host or operator.

For example, a recipe “BAKE;2.3” may define a variable “BakeTime”, while a recipe “RAMP;1,0” may define a

variable “RampSetPoint”. A parent recipe “XYZ” might contain external references in the text of the source form

such as:

(1) RUN RAMP;1 // use default for RampSetPoint

RUN BAKE;2.3 with BakeTime=10 // bake for 10 seconds

(2) set RampSetPoint to 500; /* ramp up to 500 degC */

do RAMP(RampSetPoint);

set Baketime to 120; /* 120 sec (2 min.) bake */

do BAKE;2.3(BakeTime);

(3) RAMP(RampSetPoint:=500)

BAKE;2.3(BakeTime:=Time_A) /* 1st bake time may vary */

RAMP(RampSetPoint:=650)

BAKE;2.3(BakeTime:=Time_B) /* 2nd bake time may vary*/

RAMP(RampSetPoint:=800)

BAKE;2.3(BakeTime:=Time_B+50) /* 2nd bake plus 50 sec */

where “Time_A” and “Time_B” were both formally defined within XYZ.

In example (1), no initial value is specified for RampSetPoint. In this case, when the main recipe is selected, the

initial value specified either in EqpSpec_LinkParam

or in Gen_LinkParam (that is the same as the definition in

RAMP;2.3) is used. However, in this example, the parameter BakeTime is assigned a value by the parent recipe,

and this supersedes any value from a recipe attribute or a “Select Recipe” command from the host or operator. In

the example given, BakeTime is assigned a value outside of the declared domain. This should create an error when

the recipe is verified.

Examples (2) and (3) illustrate how subrecipes RAMP and BAKE may be referenced multiple times by a parent

recipe, and the parent may provide different values with each reference (Example 2) or may define new parameters

to use with different references (Example 3).

In the above examples, PARAMETERS (set when each individual recipe is verified) and Gen_LinkParam (set when

XYZ is linked) will contain parameter definitions as follows:

Recipe

PARAMETERS n_LinkParam

XYZ;0.8 Time_A Time_A

Time_B Time_B

RampSetPoint

BakeTime

RAMP;1.0 RampSetPoint undefined for unlinked recipe

SEMI E42-0704 © SEMI 1995, 2004 120

BAKE;2.3 BakeTime undefined for unlinked recipe

R1-6 Applications of Object Services

Object Services are defined in SEMI E39 (Object Services Standard (OSS): Concepts, Behavior, and Services). This

section provides a description of how these services may be applied for RMS.

R1-6.1 Scope — Scope may be used to specify the namespace of interest. It may also be used to specify a

namespace or recipe execution resource belonging to a component agent of the service provider. For example, scope

allows a factory host to ask a cluster tool for the attributes of a cluster module.

Scope may be used to point to one of several namespaces supported by an agent.

R1-6.2 Filter — A filter may be used when asking a namespace for a list of recipe identifiers to limit the number of

identifiers returned. For example, the service user may ask a namespace for a list of recipe identifiers that were

edited by “Tom” (Attribute name = “EditedBy”, Attribute value = “Tom”, Attribute Relation = “is equal to”) and

that are linked (Attribute name = “Linked”, Attribute value = “TRUE”, Attribute Relation = “is equal to”).

R1-6.3 Complex Attributes — Object Services do not provide a way to change individual elements in an attribute

with a structure or list form. To add, delete, or modify items in a list or structure, it is necessary to first get the

current attribute value for the object of interest using the GetAttr service, to make the desired changes externally to

the value, and then to write the new value using the SetAttr service.

R1-7 Examples of RMS Application

Figure R1-2 illustrates possible interactions between a namespace and namespace manager implemented on a

factory system, a diskless equipment with a recipe executor, and an operator.

Figure R1-2

Example of RMS Applications

Other examples would be similar. Interactions are primarily with external service users of namespace and recipe

execution capabilities, and between namespace managers and recipe executors.

Namespaces do not interact with one another. To copy a recipe from one namespace to another, an intermediary is

required. This is not covered by RMS.

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

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applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

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