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SEMI E123-0703 © SEMI 2003 9 8.4 Variable Item Table Table 5 Variable Item Table Variable Name Category Desc ription Format Comments Physical Handler Group ProcessBuffers CSV ID of all implemente d input and output buffe…

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SEMI E123-0703 © SEMI 2003 8
Collection Event Name Description Typical Variable Data Reference / Comments
MediaCntInterval MediaCountInterval EXECUTING event.
SkipCntInterval SkipCountInterval CSE. EXECUTING event.
MediaChange MediaID, MediaType EXECUTING event.
SortComplete Sorting of unit(s) from last BIN-
UNITS command to sort categories has
completed.
CategoryCount EXECUTING event.
InputsEmpty No materials available on direct
inputs. There may still be unit(s) in
process buffers or under processing.
UnitCount, CategoryCount EXECUTING event.
LastUnitCompleted Handler completed unloading last unit,
i.e. no materials available in all inputs
or buffers.
UnitCount, CategoryCount EXECUTING event.
UnitsReady At load complete, this event notifies
Host that unit(s) is ready to be
processed and indicates loaded status
of process site(s).
See Units Ready Report EXECUTING event.
PreloadComplete Handler completes preloading of units
to its process buffers, e.g. unit(s) is
ready to be transferred to process
site(s) from buffers.
BufferID, BufferType CSE. PROCESSING event.
BufferEmpty One of process buffer emptied. ID of
buffer identifies which buffer.
BufferID, BufferType CSE. EXECUTING event.
8 Variable Items
8.1 The purpose of this section is to define the list of
variable items required by the HSEM. Values of these
variables are available to the host through collection
event reports and host status queries.
8.2 Requirements
8.2.1 All generic variable items defined in SEMI E30
are required by all HSEM equipment.
8.2.2 Variable items required by HSEM are
categorized as follows:
• Common Variables (CVs) — Variables common to
all handlers.
• Configuration-Specific Variables (CSVs) —
Variables associated with a specific configuration
of the above equipment class.
8.3 Data Types
8.3.1 Equipment constants have various uses in HSEM,
including the following:
• Equipment offsets that match the performance of
several pieces of equipment that would otherwise
perform differently due to inherent manufacturing
differences. Examples are home values and motion
axis scaling factors.
• Setting the configuration of the equipment to allow
for different material specifications, equipment
options, material flows, frequency of automatic
functions, etc. Examples are media and yield
check frequency.
• Managing optional machine features. Examples
are constants that indicate whether optional
features, such as automated media stackers, are
present and control the configuration and function
of these optional subsystems when they are
present.
8.3.2 Status Variables are valid at all times. A status
variable may not be changed by the host but may be
changed by the equipment or operator. The value of
status variables may be queried by the host at anytime.
8.3.3 Variables that are valid upon the occurrence of
specific collection event can be queried by the host. An
attempt to read a data variable at the wrong time shall
not generate an error, but the data reported may not
have relevant meaning.
8.3.4 Data Item Requirements for Multi-Head, Multi-
Site Equipment — The identification for multi-head and
multi-site data (data variable, status variables, events,
etc.) is addressed in this specification through the use of
status variables with list structures. In the table below,
the subheading “Process-Site Group” contains variables
that must be available for all process-sites on the
handler equipment. When multiple process-sites exist,
either a list structure or table structure may be used to
show multiple occurrences of a specific variable.
SEMI E123-0703 © SEMI 2003 9
8.4 Variable Item Table
Table 5 Variable Item Table
Variable Name Category Description Format Comments
Physical Handler Group
ProcessBuffers CSV ID of all implemented input and
output buffers and their type.
Structure
(List of)
BufferID
BufferType
This is a configuration
specific variable item
(CSV). List by number of
buffers.
BufferID CSV Input or Output Buffer ID, valid in
reports only.
Text
BufferType CSV Input or Output Type, valid in
reports only.
Integer
CategoryID CV List of sort category IDs currently
configured in handler.
(List of)
sort category ID
Valid in all states. List by
category.
CategoryCount CSV Count of units in each sort category. Structure
(List of)
sort category ID
UnitCount
Valid in PROCESS states.
List by category.
EquipSerialID CV Identification of Equipment. Text Valid in all states.
KitID CSV ID of unique tooling unit. Text Valid in all states.
LightPoleStatus CSV Color/status (i.e., Red/flash) Text Valid in all states.
LinkPortStatus CSV (3 = Input/Output linked,
2 = Input linked,
1 = Output linked,
0 = HANDLER not Linked)
Enumerated Valid in all sub-states.
MediaID CV Media Serial Number Text Valid in Executing state.
MediaType CV Media Type Text Valid in Executing state.
OperationType CSV Current Operation Mode (i.e.,
maintenance, production).
Text Valid in all states.
OperatorID CSV Current Operator ID. Text Valid in all states.
QueueStatus CV PPID Queued to be run. Integer Valid in all states.
ReaderType CSV Type of reader installed on handler. Text Supplier defined.
ReaderErrorType CSV Type of error detected by the
material reader.
Text Supplier defined.
Process-Site Components
AlignmentCount CSV Number of units since last alignment
(i.e., Homing/Adjustment).
Integer Valid in all states.
InsertionForce CSV Insertion-Force energy Float Valid in PROCESSING
state.
InsertionForceSetpoint CSV Insertion-Force set point (setpoint). Float Valid in all states.
MediaChangeTime CV Elapsed time to replace media and
send ready.
Text Valid in all states.
MediaCount CV Number of media since last reset. Integer Valid in all states.
MediaCountInterval CV Event generated when number of
media is completed.
Integer Valid in all states.
PresentPositionActual CSV Present position actual. Integer Valid in all states.
PresentPositionSetpoint CSV Present position set points
(setpoint).
Integer Valid in all states.
ProcessSiteTemp CSV Process-site temperature (setpoint). Float Celsius - Set point.
ProcessSiteID CV ID of process-site in configuration. Integer Valid in all states.
SEMI E123-0703 © SEMI 2003 10
Variable Name Category Description Format Comments
ProcessSiteStatus CV Site
n
Availability(1 = enabled, 0 =
disabled)
Enumerated Valid in all states. List by
sites.
ProcessSiteCount CV Total count of process sites. Integer Valid in all states.
ProcessSiteLoaded CV Site
n
loaded status, normally
associated with UnitsReady event.
Integer Valid in EXECUTING
states. List by sites.
SkipCount CSV Number of units skipped since last
reset (Skip + Process = Total).
Integer Valid in all states.
SkipCountInterval CSV Event generated when number of
units is skipped.
Integer Valid in all states.
StartProcessPortID CSV Start process source (i.e., hand,
keyboard, host)
Integer Valid in all states.
UnitCount CV Number of units since last reset. Integer Valid in all states.
UnitCountInterval CV Event generated when number of
units is completed.
Integer Valid in all states.
UnitPosition CSV X, Y, Z media location of a unit. Integer Valid in all states.
UnitStatus CSV (1 = Processed, 0 = Skipped) Integer Valid in all states.
8.5 HSEM Required Reports — The reports below are required as “canned” or preconfigured reports by HSEM.
HSEM does not require the equipment to guarantee the accuracy of data identified in these reports outside the
PROCESSING ACTIVE state defined in the HSEM process state model.
8.5.1 Setup Report — Table 6 contains variables that are required to be available at the setup complete event.
Table 6 Required Variables at Setup Complete Event
Variable Name Notes
KitID Configuration Kit
MediaID Serial # of Media
PPExecName Current value of the selected PPID
EquipID
InsertionForceSetPoint
8.5.2 Process Report — Table 7 contains variables that must be available when the equipment is in the
PROCESSING state.
Table 7 Required Variables for PROCESSING State
Variable Name Notes
AlignmentCount
ProcessSiteTemp
OperatorID
OperationType
8.5.3 SPC Report — The table below contains variables that must be available and reported at the completion of a
unit.
Table 8 Required Variables at Completion of Unit
Variable Name Notes
UnitCount
SkipCount
SkipCountInt