semi合集-English.pdf - 第2039页
SEMI E54.8-0305 © SEMI 1999, 2005 21 9.6.5 Services 9.6.5.1 The mapping of Service Ta gs and Identifiers is defined in § 7 for SAC. The same method appl ies here for the SDM. 9.6.5.2 The additional Services of SAC are ma…
SEMI E54.8-0305 © SEMI 1999, 2005 20
9.6.3.3 Table 35 shows the mapping of the SDM.
9.6.3.4 Objects specified in SEMI E54.11 are listed under the heading NCS Module reference. Every instance is
allocated to a slot number. The configuration can be modeled in the GSD by using the Module reference as key for
the module description.
9.6.3.5 The Sensor-BI-TH-EP can occur more than once. This shall be modeled in GSD in that way, that this
Module ID can be placed in several slots.
Table 35 Endpoint Device Object Identifiers
SDM Object
Name
SDM Object ID NCS Module
reference
Sensor-BI-TH-EP EPD3 203
Assembly-EPD#1 EPD4 204
Assembly- EPD#2 EPD5 205
Assembly- EPD#3 EPD6 206
Assembly- EPD#4 EPD7 207
9.6.4 Attributes
9.6.4.1 The mapping of Attribute Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.6.4.2 Tables 36 and 37 show the mapping of the specific SDM attributes.
Table 36 DM Object additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
SacA65 129 Number of Endpoint Objects
Table 37 Sensor-BI-TH-EP Object additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
EpA1 160 Minimum Time
EpA2 161 Maximum Time
EpA3 162 Target Time
EpA4 163 Elapsed Time
EpA5 164 Time Stamp
EpA6 165 Recipe Identifier
EpA7 166 Step Identifier
SEMI E54.8-0305 © SEMI 1999, 2005 21
9.6.5 Services
9.6.5.1 The mapping of Service Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.6.5.2 The additional Services of SAC are mapped as described in Table 38.
Table 38 SAC additional Service mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
SacS33 Reset Endpoint 33
SacS34 Download Recipe 34
SacS35 Upload Recipe 35
SacS36 Calibrate 36
9.6.5.3 The additional Services of Sensor BI-EP are mapped as described in Table 39.
Table 39 Sensor BI-EP additional Service mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
EpS1 Endpoint On 11
EpS2 Endpoint Off 12
EpS3 Endpoint Start 13
EpS4 Endpoint Suspend 14
EpS5 Endpoint Resume 15
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SEMI E54.9-0303 © SEMI 2000, 2003 1
SEMI E54.9-0303
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK
COMMUNICATION FOR MODBUS/TCP OVER TCP/IP
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved by
the North American Regional Standards Committee on October 25, 2002. Initially available at
www.semi.org December 2002; to be published March 2003. Originally published February 2000; previously
published October 2000.
1 Purpose
1.1 This standard defines a communication
specification based on the Modbus/TCP protocol over a
Transmission Control Protocol/Internet Protocol
(TCP/IP) network to enable communications between
intelligent devices on a sensor/actuator network (SAN)
that operate according to SEMI specified device models
(common and device specific) in a semiconductor
manufacturing tool.
1.2 Background and Motivation
1.2.1 Modbus/TCP over TCP/IP is a component level
network which provides a simple, inexpensive, and fast
means of exchanging data among control level
industrial devices (e.g., sensors and actuators) and
higher level devices such as controllers. Modbus/TCP
over TCP/IP provides:
• A solution to low-level device networking,
• Access to intelligence present in low-level devices,
• Networking between higher level controllers, and
• Master/Slave and Peer-to-Peer communication
capabilities.
1.2.2 Modbus/TCP specifies a communication model
and protocol. The Physical, Data Link, and Network
Layer definitions are defined by the network in which
the Modbus/TCP protocol is embedded such as TCP/IP
Ethernet.
1.2.3 This document enables communications between
intelligent devices on a SEMI compliant SAN by
providing a presentation mapping of common and
specific device network visible structure and behavior
to Modbus/TCP over a TCP/IP network.
2 Scope
2.1 This document specifies the protocol and services
that compliant intelligent devices must support to
exchange information over this semiconductor
equipment sensor/actuator network.
2.2 This document specifies the utilization of the
Modbus/TCP protocol to present externally visible
device structure and behavior, specified in the Common
Device Model (CDM) and appropriate Specific Device
Models (SDMs), for the Modbus/TCP protocol over a
TCP/IP network.
2.3 This document is used in conjunction with a SEMI
standard SAN Common Device Model specification,
one or more SEMI standard Specific Device Model
(SDM) specifications (e.g., for a mass flow device), the
Modicon Modbus Protocol Reference Guide and the
Open Modbus/TCP Specification. Together, they
describe the Modbus/TCP protocol, the externally
visible data structures and behaviors of devices utilizing
the Modbus/TCP networking capability in a SEMI
compliant SAN system.
3 Limitations
3.1 This document specifies a semiconductor
equipment SAN based solely on Modbus/TCP over a
TCP/IP network and is a companion document to the
Open Modbus/TCP Specification; thus a complete
specification of this standard necessarily includes the
Modbus/TCP and Modbus protocol specifications.
There are other semiconductor equipment SAN
communications options. The specifications for these
options are not included here.
3.2 This standard specifies enhancements that provide
additional capabilities over and above those currently
required by Modbus/TCP. In order to avoid document
consistency problems, information in the Modbus/TCP
standard specifications that relate to this standard is not
repeated in this document. This document is limited to
describing enhancements or limitations to the
Modbus/TCP standard specifications that are imposed
by this standard.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.