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SEMI F70-0302 © SEMI 2002 1 SEMI F70-0302 TEST ME THOD FOR DETERMI NA TION OF PARTICLE CONTRIBUTION OF GA S DELIVERY SYSTEM This tes t method wa s technically approved by the Global Fac ilities Comm ittee and is the dire…

SEMI F69-0302 © SEMI 2002 5

7.13 The post-test report should include, at minimum,

the following:

1) Pre-test examination results.

2) Pre-test leak rate.

3) Summary and chronology of test events, test

interruptions, and test failures.

4) All shock measurement data, including that of any

accelerometers mounted to the gas delivery system.

5) Post-test examination results for all three axes.

6) Post-test leak rate for all three shock tests.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

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content of SEMI.

SEMI F70-0302 © SEMI 2002

SEMI F70-0302

TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION

OF GAS DELIVERY SYSTEM

This test method was technically approved by the Global Facilities Committee and is the direct responsibility

of the Japanese Facilities Committee. Current edition approved by the Japanese Regional Standards

Committee on January 11, 2002. Initially available at www.semi.org January 2002; to be published March

2002.

1 Purpose

1.1 The purpose of this document is to provide a

standardized methodology and procedure for measuring

the particle contribution performance of a gas delivery

system in terms of number of particles added to gas

flowing through the system. This standardized

procedure is intended to be used commonly by the

component suppliers, gas suppliers, equipment

suppliers, and users.

2 Scope

2.1 This test method applies to all types of surface

mount and conventional gas delivery systems used in

semiconductor manufacturing facilities and comparable

research and development areas.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 All components must meet quality requirements as

established and controlled by manufacturers prior to

testing (e.g., dimensional, functional, etc.).

3.2 Care should be exercised in handling of

components to maintain manufacturer’s specifications.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be

the latest publications of adopted standards.

4.1 ISO Standards

ISO 14644-1 — Cleanrooms and Associated Controlled

Environments – Part 1: Classification of air cleanliness

1 ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-

1211 Genève 20, Switzerland, website: www.iso.ch

4.2 JIS Standards

JIS B 9921 — Light Scattering Automatic Particle

Counter

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CNC — condensation nucleus counter

5.1.2 LPC — laser particle counter

5.1.3 MFC — mass flow controller

5.1.4 MFM — mass flow meter

5.1.5 slm — standard liters per minute, the gas

volumetric flow rate measured in liters per minute at

0°C and 1 atm.

5.2 Definitions

5.2.1 background counts — particle counts contributed

by the test apparatus (including false counts) with the

spool piece in the place of the test object as function of

particle size.

5.2.2 counting efficiency — the ratio of the particle

concentration calculated from the particle counts to the

actual particle concentration in the sampled gas for

particles equal to or larger than a given particle size.

5.2.3 design flow rate — flow rate normally applied to

the gas delivery system.

5.2.4 false counts — particle counts contributed by

electrical noise or by other events and not particles in

the sampled gas.

5.2.5 gas delivery system — a system installed in

semiconductor manufacturing equipment to supply

process and carrier gases to reactors, which typically

consists of tubing, fittings, valves, filters, mass flow

controllers and regulators; can be surface mount or

conventional system.

5.2.6 minimum counting particle diameter — a

predefined minimum diameter of particles to be

counted in this test method.

2 Japanese Standards Association, 1-24, Akasaka, 4-Chome, Minato-

ku, Tokyo 107 Japan

5.2.7 particle counts — a counted value from a laser particle counter (LPC) or condensation nucleus counter (CNC)

shown for particles or larger than or equal to the minimum counting particle diameter.

5.2.8 sample flow rate — the volumetric flow rate through the particle counter.

5.2.9 spool piece — a null component consisting of a straight piece of electropolished tubing or like object and

appropriate fittings used in place of the test system to establish the background.

5.2.10 test flow rate — the volumetric flow rate through the test systemRequired Apparatus

6 Required Apparatus

6.1 Filter — Filters with the following performance specified by the manufacturer.

Characteristic Performance Condition

Filtration Efficiency

9 log particle size: 0.02 µ m

Flow Rate

300 slm inlet pressure: 0.34 MPa

6.2 Tubing Material — 1/4 inch or 3/8 inch SUS 316L electropolished tubing or better.

6.3 Particle Counter — The particle counter may be either LPC or CNC of which the minimum counting particle

diameter is 0.1 µ m or smaller, and has the following performance as specified by JIS B 9921.

6.3.1 Counting Efficiency

Diameter of Polystyrene Latex Standard Particle Counting Efficiency

Minimum countable particle diameter of the counter (See NOTE 1.)

50 ± 20 %

1.5 to 2.0

Minimum countable particle diameter of the counter

100 ± 10 %

NOTE 1: For a CNC, the minimum countable diameter shall be defined as a diameter having counting efficiency of 50 ± 20%.

6.3.2 False Count — Equal to or less than 1 in 5 minutes.

6.3.3 Acceptable Error of Flow Rate — ± 5%

6.4 Sampler — A system used to perform partial sampling of the gas stream exiting the test system, that consists of

a diffuser equipped with a pressure reducing device in which gradual expansion to atmospheric pressure occurs and

a sample probe. It is desirable that the sampler is designed to obtain isokinetic sampling. The average velocity of

gas flowing through the sample probe should approximate the average velocity in the external tubing in which the

sample probe is inserted. The sample probe overlap with the external tube must be of appropriate length, and it must

be confirmed before use that the surrounding atmospheric gas is not drawn in the sample.

7 Test Condition

7.1 Test Gas — Liquid Nitrogen (LN

) or cleaner Nitrogen (N

) or Argon (Ar).

7.2 Temperature — Room temperature (between 18 and 26° C)

7.3 Environment — ISO/FDIS 14644-1 class 5 or better.