semi合集-English.pdf - 第667页

SEMI E85-0705 © SEMI 1999, 2005 21 Option A Option C Over the Rail T ype Option C Suspe nded Type Stocker Transp ort vehicl e C 5 HDP is inclined T 3 HDP is incli ned Stocker H 2 C 3 A A  BDP is incli ned Stocker Transp…

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SEMI E85-0705 © SEMI 1999, 2005 20
NOTE: Dimension D10 will be 150 mm or 230 mm as specified by the user.
Figure 12
Detailed Views of Center Exclusion Volume
(where D6 = minimum to allow for the carrier to seat on all 3 kinematic pins)
SEMI E85-0705 © SEMI 1999, 2005 21
Option A
Option C
Over the Rail Type
Option C
Suspended Type
Stocker
Transport
vehicle
C
5
HDP is
inclined
T
3
HDP is inclined
Stocker
H
2
C
3
A
A
BDP is inclined
Stocker
Transport
vehicle
H
4
HDP is
inclined
C
5
D
10
H
2
T
3
BDP is inclined
BDP is inclined
A
A
A
A
NOTE: The cross section views (A-A) of the exclusion volumes are the same as the views shown in the FOUP
Figures 19.
Figure 13
Views Illustrating Open Cassette Options
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A4 200 mm A10 130 mm
A5 312 mm A11 112 mm
A7 60 mm
Figure 14
AMHS Interbay Loadport Option C’