semi合集-English.pdf - 第2331页

SEMI E82-0705 © SEMI 1999, 2005 27 Vehicle States and Carrier States ar e in depende nt from the IBSEM remote comm an ds). “N A” (Not Ap plicable) means that Stat es and Remot e Commands have no di rect relationship. Tab…

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SEMI E82-0705 © SEMI 1999, 2005 26
Parameter Value
Cpname
Description Range Format
NOBLOCKINGTIME The amount of time, in seconds, following a STAGE
command that movement past the SOURCEPORT should
not be blocked by a transport unit. This time should not
exceed the ExpectedDuration.
0–999 U2
PRIORITY Remote command priority. 0 is not valid.
1 is the LOWEST
priority, 99 is the
highest priority.
U2
REPLACE Flag to denote a TRANSFER replace carrier. Replace a
carrier already on the port with the one on the vehicle.
Refers to the subsequent TRANSFER command when
used in a STAGE command.
0 is OFF
> 0 is ON
U2
SOURCEPORT Source port unique identifier. A[1–64]
STAGEID The unique STAGE command identifier created by the
host.
A[1–64]
STAGEIDLIST L,n
1. <STAGEID
1
>
2. <STAGEID
2
>
.
.
.
n. <STAGEID
n
>
L,n
The format shall
follow format ‘A’ as
defined for the S2F49
message in SEMI E5.
(The CPNAME
“STAGEID” is NOT
included, only values).
For Example:
L,2
1. “STAGEID
LIST”
2. L,n
1, “Stage 1
2. “Stage2”
n, “StageN”
STAGEINFO L,6
STAGEID
PRIORITY
REPLACE
EXPECTEDDURATION
NOBLOCKINGTIME
WAITTIMEOUT
L,6
TRANSFERINFO L,3
CARRIERID
SOURCEPORT
DESTPORT
L,3
WAITTIMEOUT The amount of time, in seconds, after the SOURCEPORT
is reached by a transport unit and the ExpectedDuration
has elapsed that the STAGE command should be
considered valid by the TSC. Following the WaitTimeout,
the Controller should disregard the STAGE command.
0–999 U2
11.3.4 Remote Commands versus TSC and TRANSFER Command States
11.3.4.1 The following table indicates TSC and TRANSFER Command States where the remote commands are
allowed. This is indicated with a “X” mark. Remote commands act independently of other state models (e.g.,
SEMI E82-0705 © SEMI 1999, 2005 27
Vehicle States and Carrier States are independent from the IBSEM remote commands). “NA” (Not Applicable)
means that States and Remote Commands have no direct relationship.
Table 13 Remote Commands versus TSC and TRANSFER Command States
COMMAND
TRANSFER
RESUME
PAUSE
CANCEL
ABORT
INFOUPDATE
STAGE
STAGEDELETE
TSC STATE
AUTO X X X X X X X
ALARMS X X X X X X X X
NO ALARMS X X X X X X X X
INIT
PAUSED X X X X X X X
PAUSING X X X X X X X
TRANSFER COMMAND STATE
QUEUED N/A N/A N/A X N/A N/A N/A
WAITING N/A N/A N/A X N/A N/A N/A
ACTIVE (PAUSED or TRANS.) N/A N/A N/A X N/A N/A N/A
ABORTING N/A N/A N/A N/A N/A N/A
CANCELING N/A N/A N/A N/A N/A N/A
12 Scenarios
12.1 The following scenarios represent Application Notes. In the scenarios, all unique Remote Command IDs must
initially be created and sent by the Host. Subsequent event reports sent from the equipment referring to the status of
a particular remote command must return the applicable CommandID. All collection events identified in Table 6 are
assumed to be enabled (per the SEMI E30 definition/scenario) throughout the following scenarios. Variable data
specified in the Host commands has been chosen arbitrarily for the purpose of demonstrating message
structure/content. The Collection Event Report definitions contained in the scenarios are examples that could be
defined by the Host.
12.2 Normal Transport
12.2.1 Single Carrier Transfer — Transfer Unit Size is Equal to 1 Carrier
12.2.1.1 A carrier is transported from a source port to a destination port.
STEP COMMENTS HOST TSC COMMENTS
1. Carrier 123456 is sitting
at PORTXX prepared for a
TRANSFER command.
2. Enhanced Remote Command
(ERC)
TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 0
. TRANSFERINFO
1
- L,3
1. CARRIERID = “123456”
2. SOURCEPORT = “PORTXX”
3. DESTPORT = “PORTYY”
S2,F49->
SEMI E82-0705 © SEMI 1999, 2005 28
STEP COMMENTS HOST TSC COMMENTS
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “CARXX”
/* Actual VehicleID used
for the transfer may be
different due to TSC
scheduling optimizations
*/
CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “CARXX”
. TransferPortList -
L,1
1. TransferPort =
“PORTXX”
9. Event Report Acknowledge
(ERA)
S6,F12->
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “CARXX”
. TransferPort =
“PORTXX”
. CarrierID = “123456”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “CARXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “CARXX”
. TransferPort =
“PORTXX”
. CarrierID = “123456”
17. Event Report Acknowledge
(ERA)
S6,F12->