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SEMI P10-0705 © SEMI 1990, 2005 214 complexType XYRType diagram complexType XYType diagram

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SEMI P10-0705 © SEMI 1990, 2005 213
complexType TitleDataType
diagram
complexType WaferExposureDataType
diagram
complexType WindowType
diagram
SEMI P10-0705 © SEMI 1990, 2005 214
complexType XYRType
diagram
complexType XYType
diagram
SEMI P10-0705 © SEMI 1990, 2005 215
RELATED INFORMATION 10
SEMI PHOTOMASK MASK RESULTS STRUCTURE TREE DIAGRAM
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the <mask_results> portion of the standard in XML format.
Note: All portions of the tree were scaled to fit within single pages. In cases where a portion of the tree is very long, this causes
the text to be very small. Such portions of the tree will be more easily read by viewing them with a text editor or text viewer and
using an increased magnification.
complexType AerialImageData
diagram
complexType BillingInformationType
diagram