semi合集-English.pdf - 第1934页
SEMI E54.1-1000 © SEMI 1996, 2000 40 A P PENDIX 1 DATA UNIT ENUMERAT ION NOT E: This a ppendix w as approve d as a n off icial part of SEMI E54.1 by full lette r ballot proce dure. The Data Units data type term is define…
SEMI E54.1-1000 © SEMI 1996, 200039
7.4.9.1 Actuator-Enumerated Output Class Attributes — No AEO class common attributes are defined. Note that
the AEO class inherits all AE and A class attributes.
7.4.9.2 Actuator-Enumerated Output Class Services — No AEO class common services are defined. Note that the
AEO class inherits all AE and A class services.
7.4.9.3 Actuator-Enumerated Output Class Behavior — No AEO class common behavior is defined. Note that the
AEO class inherits all AE and A class-defined behavior.
7.4.10 Sensor-Binary Input-Threshold (SBITH) Class — The SBITH class at the fourth level of the active element
generalization hierarchy contains structure and behavior common to all binary input threshold sensor element
instances in a device.
7.4.10.1 Sensor-Binary Input Threshold Class Attributes — All required and “common optional” SBITH class
attributes are listed in Table 43 and described below. For an explanation of the table format see Section 7.3.1. Note
that the SBITH class also inherits all AE, S, an SBI class attributes.
Table 43 SBITH Class Attributes*
Attribute Name Attribute
Identifier
Access
(Network)
Rqmt Form
Reading Valid SbithA64 R N Enumerated, Byte
State SbithA65 R N Enumerated, Byte
Status SbithA66 R N Enumerated, Byte
* A “Definition” column is not included. For attribute definitions, see text.
** ID’s Sbith67 through Sbith127 are reserved for future Sbith class attribute definition.
7.4.10.1.1 Reading Valid — This attribute is used to specify the validity of the “Value” attribute of the SBITH
object. The method of utilization of this attribute is application specific.
7.4.10.1.2 State — This attribute is used to record the current state of the SBITH object. The method of utilization
of this attribute is application specific.
7.4.10.1.3 Status — This attribute is used to record the current active reporting status of the SBITH object. The
method of utilization of this attribute is application specific.
7.4.10.2 Sensor-Binary Input-Threshold Class Services — No SBITH class common services are defined. Note that
the SBITH class inherits all AE, S, and SBI class services.
7.4.10.3 Sensor-Binary Input-Threshold Class Behavior — No SBITH class common behavior is defined. Note
that the SBITH class inherits all AE, S, and SBI class behavior.
SEMI E54.1-1000 © SEMI 1996, 2000 40
APPENDIX 1
DATA UNIT ENUMERATION
NOTE: This appendix was approved as an official part of SEMI E54.1 by full letter ballot procedure.
The Data Units data type term is defined in Section 5.2.
The following is a partial enumeration of that data type;
further enumeration may be provided in an application-
specific context.
Table A1-1 General
Data Units Description
0 Counts
1 Counts per Second
2 Counts per Millisecond
3 Counts per Microsecond
4 Counts per Minute
5 Counts per Hour
6 Counts per Day
7 Percent
8–191 Reserved
192–255 Open
Group 1 — Time and Frequency (256–511)
Table A1-2 Time and Frequency
Data Units Description
256 Seconds
257 Milliseconds
258 Microseconds
259 Minutes
260 Hours
261 Days
262 Hertz
263 KiloHertz
264 MegaHertz
265 GigaHertz
266–447 Reserved
448–511 Open
Group 2 — Temperature (512–767)
Table A1-3 Temperature
Data Units Description
512 Centigrade/Celsius
513 Fahrenheit
514 Kelvin
515–703 Reserved
704–767 Open
Group 3 — Pressure (768–1023)
Table A1-4 Pressure
Data Units Description
768 PSI
769 Torr
770 MilliTorr
771 mm Hg (0°C)
772 inches Hg (0°C)
773 cm H
2
O (25°C)
774 inches H
2
O (25°C)
775 Bar
776 MilliBar
777 Pascal
778 KiloPascal
779 Atmosphere
780–959 Reserved
960–1023 Open
Group 4 — Flow (1024–1279)
Table A1-5 Flow
Data Units Description
1024 SCCM
1025 SLM
1026 CFM
1027 Pa-m
3
/s
1028–1215 Reserved
1216–1279 Open
Group 5 — Electrical (1280–1535)
Table A1-6 Electrical
Data Units Description
1280 Volts
1281 MilliVolts
1282 MicroVolts
1283 NanoVolts
1284 PicoVolts
1285 FemtoVolts
1286 KiloVolts
1287 MegaVolts
1288 GigaVolts
1290 Amps
1291 MilliAmps
SEMI E54.1-1000 © SEMI 1996, 200041
1292 MicroAmps
1293 NanoAmps
1294 PicoAmps
1295 FemtoAmps
1296 KiloAmps
1297 MegaAmps
1298 GigaAmps
1300 Ohms
1301 MilliOhms
1302 MicroOhms
1303 NanoOhms
1304 PicoOhms
1305 FemtoOhms
1306 KiloOhms
1307 MegaOhms
1308 GigaOhms
1310 Farads
1311 MilliFarads
1312 MicroFarads
1313 NanoFarads
1314 PicoFarads
1315 FemtoFarads
1320 Henries
1321 MilliHenries
1322 MicroHenries
1323 NanoHenries
1324 PicoHenries
1325 FemtoHenries
1326–1471 Reserved
1472–1535 Open