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SEMI E42.1-0704 © SEMI 1996, 2004 8 NOTICE: SEMI makes no warranties or representations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of the…

SEMI E42.1-0704 © SEMI 1996, 2004 7

Some equipment maintains more than one type of process program and may distinguish between the different types

either through providing additional Stream 7 messages, through naming conventions such as a “.ext” extension,

through program length, or other devices.

Downloading a process program in Stream 7 is equivalent to both the operation of “sending” a recipe to a different

namespace (at the equipment) and to downloading a recipe to the recipe executor for execution.

R1-2.1 Structuring PPBODY Using SECS-II Message Format — The second method of sending attributes within

PPBODY is to use a SECS-II message structure that is used to send and receive recipes. Figure 1 illustrates using

the structure of a managed recipe form S15,F13 and F16.

Note that cluster tools may provide full recipe namespace capabilities for its modules, including shared namespaces

for modules of a specific type. In this case, a cluster recipe may contain multiple agent-specific datasets (m > 1).

Other equipment may be able to use the structure for the execution recipe.

L,q (q = 1,2,3)

1. L,r (r = 0 or 2)

1. <RCPSECNM>

2. L,g (g = # generic attributes)

1. L,2

1. <RCPATTRID

2. <RCPATTRDATA

a. L,2

1. <RCPATTRID

2. <RCPATTRDATA

2. <RCPBODY>

3. L,m (m = # agent-specific datasets)

1. L,2

1. <RCPSECNM

2. L,b

1. L,2

1. <RCPATTRID

2. <RCPATTRDATA

b. L,2

1. <RCPATTRID

2. <RCPATTRDATA

m. L,2

1. <RCPSECNM

2. L,c

1. L,2

1. <RCPATTRID

2. <RCPATTRDATA

c. L,2

1. <RCPATTRID

2. <RCPATTRDATA

Figure 1

SECS-II Format for PPBODY

SEMI E42.1-0704 © SEMI 1996, 2004 8

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E53-0704 © SEMI 1996, 2004 1

SEMI E53-0704

EVENT REPORTING

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese

Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be

published July 2004. Originally published December 1996.

1 Purpose

1.1 Access to process data in equipment is crucial for

effective process monitoring and control in a

semiconductor manufacturing facility. This standard

addresses the communication needs of semiconductor

equipment and other factory objects, such as cell

controllers or recipe servers, with respect to the timely

collection and reporting of such data.

1.2 The purpose of this standard is to provide a general

purpose set of event reporting services that may be

offered by equipment suppliers. This document may be

referenced, in whole or in part, by other standards

addressing higher level application domains.

1.3 The communications services defined here will

enable standards based inter-operability of independent

systems. They shall allow application software to be

developed which can assume the existence of these

services and allow software products to be developed

which offer them.

2 Scope

2.1 This standard is applicable to any stand-alone

equipment, cluster module, cluster tool, or cell of

automation in a factory. As such it addresses event

reporting at all levels in the factory and equipment

control hierarchy.

2.2 This standard requires significant communication

and computational resources and is therefore not

applicable at or below the level of I/O distribution (e.g.,

sensor bus) within the equipment.

2.3 This standard covers the reporting of data

periodically and/or in response to events. Reports may

also be requested on demand.

2.4 This standard presents a solution from the concepts

and behavior down to the messaging services. It does

not define the messaging protocol.

2.5 A messaging service includes the identification that

a message shall be exchanged and definition of the data

which is contained in that message. It does not include

information on the structure of the message, how the

data is represented within the message, or how the

message is exchanged. This additional information is

contained with the message protocol. The defined

services may be applied to multiple protocols.

Information on the mapping of these services to special

protocols (e.g., SECS II) are added as adjunct

standards.

2.6 The services assume a communications

environment in which a reliable connection has been

established between the user and the provider of the

services. Establishing, maintaining, and releasing a

connection is beyond the scope of this standard.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Documents

3.1 SEMI Standards

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E38 — Cluster Tool Module Communications

(CTMC)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E40 — Standard for Processing Management

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 The following definitions are arranged in

alphabetical order. Some terms are defined using terms

defined elsewhere within this section. Other terms may

be defined within SEMI’s Compilation of Terms.

4.1.1 attribute — a data item associated with an object.

An attribute may be referenced by zero or more data

reports.

4.1.2 behavior — the manner in which something

functions; how an object acts and reacts, in terms of its

state changes and message passing.