semi合集-English.pdf - 第5976页
SEMI P42-0304 © SEMI 2004 9 <xsd:sequence> <xsd:elem ent name="AlignmentM arkInformation" type="rfd:Alig nmentMarkInformati onType" minOccurs="0" m axOccurs="unbounded"/&g…
SEMI P42-0304 © SEMI 2004 8
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="WaferSizeType">
<xsd:sequence>
<xsd:element name="Size" type="xsd:unsignedInt"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="EdgeClearanceType">
<xsd:sequence>
<xsd:element name="Clearance" type="xsd:double"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="WaferThicknessType">
<xsd:sequence>
<xsd:element name="Thickness" type="xsd:unsignedInt"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="CRUnitType">
<xsd:sequence>
<xsd:element name="C" type="xsd:unsignedInt"/>
<xsd:element name="R" type="xsd:unsignedInt"/>
</xsd:sequence>
</xsd:complexType>
<!-- ========================= ReticleDesign =============================== -->
<xsd:complexType name="ReticleDesignType">
<xsd:sequence>
<xsd:element name="ReticleInformation" type="rfd:ReticleInformationType"
maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="ReticleInformationType">
<xsd:sequence>
<xsd:element name="ReticleID" type="xsd:ID"/>
<xsd:element name="ReticleName" type="xsd:string"/>
<xsd:element name="BarCode" type="xsd:string"/>
<xsd:element name="ReticleSize" type="rfd:ReticleSizeType"/>
<xsd:element name="ReticleType" type="xsd:string"/>
<xsd:element name="ReticleMarkID" type="xsd:string"/>
<xsd:element name="ReticleMarkType" type="xsd:string"/>
<xsd:element name="ProjectionMagnification" type="xsd:unsignedInt"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="ReticleSizeType">
<xsd:sequence>
<xsd:element name="Size" type="xsd:unsignedInt"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ======================= AlignmentMarkDesign ============================ -->
<xsd:complexType name="AlignmentMarkDesignType">
SEMI P42-0304 © SEMI 2004 9
<xsd:sequence>
<xsd:element name="AlignmentMarkInformation"
type="rfd:AlignmentMarkInformationType" minOccurs="0" maxOccurs="unbounded"/>
<xsd:element name="MarkUseRule" type="rfd:MarkUseRuleType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="AlignmentMarkInformationType">
<xsd:sequence>
<xsd:element name="AlignmentMarkID" type="xsd:ID"/>
<xsd:element name="Group" type="xsd:string"/>
<xsd:element name="WaferMarkType" type="xsd:string"/>
<xsd:element name="WaferMarkPosition" type="rfd:WaferMarkPositionType"/>
<xsd:element name="Comment" type="xsd:string"/>
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name="MarkUseRuleType">
<xsd:sequence>
<xsd:element name="FileName" type="xsd:string"/>
</xsd:sequence>
</xsd:complexType>
<!-- ====================================================================== -->
<xsd:complexType name="WaferMarkPositionType">
<xsd:sequence>
<xsd:element name="X-Mark" type="rfd:XYUnitType"/>
<xsd:element name="Y-Mark" type="rfd:XYUnitType"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<!-- ======================= AlignmentUSEMark ============================ -->
<xsd:complexType name="AlignmentUSEMarkType">
<xsd:sequence>
<xsd:element name="AlignmentMarkInformation"
type="rfd:AlignmentMarkInformationType" minOccurs="0" maxOccurs="unbounded"/>
</xsd:sequence>
</xsd:complexType>
<!-- ============================ Common ================================== -->
<!-- ============================XYUnitType================================ -->
<xsd:complexType name="XYUnitType">
<xsd:sequence>
<xsd:element name="X" type="xsd:double"/>
<xsd:element name="Y" type="xsd:double"/>
</xsd:sequence>
</xsd:complexType>
<!-- ============================XYCodeType================================ -->
<xsd:complexType name="XYCodeType">
<xsd:sequence>
<xsd:element name="X" type="xsd:double"/>
<xsd:element name="Y" type="xsd:double"/>
<xsd:element name="UnitType" type="rfd:UnitTypeType"/>
</xsd:sequence>
</xsd:complexType>
<!-- =====================UnitTypeType======================================= -->
<xsd:simpleType name="UnitTypeType">
<xsd:restriction base="xsd:string">
<xsd:enumeration value="mm"/>
SEMI P42-0304 © SEMI 2004 10
<xsd:enumeration value="um"/>
<xsd:enumeration value="inch"/>
</xsd:restriction>
</xsd:simpleType>
</xsd:schema>
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