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SEMI E63-1104 © SEMI 1997, 2004 5 Table 1 Dimensions for Box Open er/Loader to Tool Standard (BOLTS) Interface Symbol Value Specified Datum Meas ured from Feature Measured to  0 ± 0.1  facial and horizontal datum plane…

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SEMI E63-1104 © SEMI 1997, 2004 4
permanent
reserved
space and
reserved
space when
door is
opening or
closing
reserved
space when
door is
closed
facial datum
plane:
when
carrier is
docked
when
carrier is
undocked
y
70 = 173±3
(install tolerance)
y
75 = ±0.5
(repeatability)
y
76 = 70+2/-0
(docking stroke
length required
by year 2000 if
the carrier is not
rotated)
y
71 = ±1
(flatness)
=0±0.1°
(perpendicularity to
facial and horizontal
datum planes)
y
72
57
y
74
100
y
73
40
x
73 =215±0.1
x
71 =208±1
(at seal zone)
x
70
207
(inside of tool)
x
72
236
x
74
237.5
bilateral datum plane
ISO M8-6H thread for bolt (6x)
BOLTS plane
Top View
Side View
reserved
space when
door is
closed
reserved
space when
door is
opening or
closing
permanent
reserved
space
facial datum
plane
BOLTS
plane
floor
z
77
423
z
76
=395±1
z
81
394
z
79
486
z
70
20
(900 mm, see
SEMI E15.1)
x
73=215±0.1
z
72
822
z
73
=832
±0.1
Front View
horizontal
datum
plane
bilateral
datum
plane
seal
zone
hole
ISO M8-6H
thread for
bolt (6x)
x
71=208±1
(at seal
zone)
x
70
207
(inside of
tool)
x
72
236
x
74
237.5
y
71 =±1
(flatness)
=0±0.1°
(perpen-
dicularity
to datum
planes)
y
72
57
y
74
100
z
71
=794±1
(at seal
zone)
z
80
793
(inside
of tool)
z
78
=455.5
±0.1
z
75
=150.25
±0.1
y
70
=173±3
(install
tolerance)
y
75=±0.5
(repeat-
ability)
y
73
40
Figure 1
Top, Front, and Side Views of Box Opener/Loader to Tool Standard (BOLTS) Interface
SEMI E63-1104 © SEMI 1997, 2004 5
Table 1 Dimensions for Box Opener/Loader to Tool Standard (BOLTS) Interface
Symbol Value Specified Datum Measured from Feature Measured to
0 ± 0.1
facial and horizontal
datum planes
perpendicularity of seal zone
r75 1 mm (0.04 in.) maximum not applicable all concave features (radius)
r76 2 mm (0.08 in.) maximum not applicable all required convex features (radius)
x70 207 mm (8.15 in.)
minimum
bilateral datum plane encroachment of tool on the sides of the reserved spaces inside
the tool
x71 208 ± 1 mm
(8.19 ± 0.04 in.)
bilateral datum plane edge of hole opening and inside edge of seal zone
x72 236 mm (9.29 in.)
minimum
bilateral datum plane outside edge of seal zone
x73 215 ± 0.1 mm
(8.465 ± 0.004 in.)
bilateral datum plane center of threaded holes
x74 237.5 mm (9.35 in.)
minimum
bilateral datum plane encroachment of tool on the sides of the box opener/loader
outside of the BOLTS plane
y70 173 ± 3 mm
(6.8 ± 0.1 in.)
facial datum plane
(when carrier is docked)
BOLTS plane (including seal zone and boundaries of
equipment exclusion zones) installation tolerance
y71 ± 1 mm (± 0.04 in.)
flatness over seal zone
BOLTS plane surface of seal zone
y72 57 mm (2.24 in.)
minimum
BOLTS plane encroachment of tool on the reserved space inside the tool when
the door is closed
y73 40 mm (1.57 in.)
minimum
BOLTS plane depth of threaded holes
y74 100 mm (3.94 in.)
minimum
BOLTS plane encroachment of tool on the permanent reserved space and on
the reserved space when the door is opening or closing
y75 ± 0.5 mm
(± 0.02 in.)
not applicable the docked facial datum plane of the box opener/loader
y76 70 +2 –0 mm
(2.76 +0.07 –0 in.)
facial datum plane when
the carrier is undocked
facial datum plane when the carrier is docked
z70 20 mm (0.79 in.)
maximum
horizontal datum plane encroachment of tool on the top of the permanent reserved
space inside the tool
z71 794 ± 1 mm
(31.26 ± 0.04 in.)
horizontal datum plane bottom edge of hole opening and inside edge of seal zone
z72 822 mm (32.36 in.)
minimum
horizontal datum plane outside edge of seal zone on bottom
z73 832 ± 0.1 mm
(32.756 ± 0.004 in.)
horizontal datum plane center of bottom threaded holes
z75 150.25 ± 0.1 mm
(5.915 ± 0.004 in.)
horizontal datum plane center of middle threaded holes
z76 395 ± 1 mm
(15.55 ± 0.04 in.)
horizontal datum plane top edge of hole opening and inside edge of seal zone
z77 423 mm (16.65 in.)
minimum
horizontal datum plane outside edge of seal zone on top
z78 455.5 ± 0.1 mm
(17.933 ± 0.004 in.)
horizontal datum plane center of top threaded holes
z79 486 mm (19.13 in.)
minimum
horizontal datum plane encroachment of tool on the top of the box opener/loader
between the BOLTS plane and the load face plane
z80 793 mm (31.22 in.)
minimum
horizontal datum plane encroachment of tool on the bottom of the permanent reserved
space inside the tool
z81 394 mm (15.51 in.)
minimum
horizontal datum plane encroachment of tool on the top of the reserved space inside the
tool when the door is closed or is opening or closing
SEMI E63-1104 © SEMI 1997, 2004 6
RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI E63 but was approved for publication by full
letter ballot procedures.
R1-1 Unless otherwise stated, perpendicularity and parallelism are implicitly defined in the geometric tolerances.
NOTICE: SEMI makes no warranties or representations as to the suitability of the specification set forth herein for
any particular application. The determination of the suitability of the specification is solely the responsibility of the
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relevant literature respecting any materials mentioned herein. These specifications are subject to change without
notice.
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