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SEMI E122-0703 © SEMI 2003 19 13.5 Associated Re mote Command Parameters Table 8 Remote Comma nds Command Name Parameter Name Opt./R eq. Parameter Format Description ABORT None DISABLE-SITE DISABLESITELIST REQ List, s (s…

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SEMI E122-0703 © SEMI 2003 18
1. An alarm does not necessarily require a process
state change to ALARM PAUSED even though it
may ultimately prove to be the root cause of that
transition at a later time.
2. Alarms that force immediate processing stoppage
for the primary function of the tool should trigger a
transition to ALARM PAUSED.
3. Most alarms in categories 1–3 will cause a
transition to ALARM PAUSED.
12.2.2 A machine with currently set alarms may
PAUSE instead of ALARM PAUSED if none of the
currently set alarms were the immediate trigger for the
transition.
13 Remote Commands
13.1 The purpose of this section is to identify remote
commands, command parameters, and valid commands
versus states in the processing state models.
13.2 Requirements
• The equipment must support the GEM-required
remote commands. (Some of the SEMI E30-
required remote commands are restated here to
define TSEM-specific requirements.)
• All the remote commands defined by TSEM are
required.
• The alphanumeric strings defined by TSEM for
remote commands and command parameters are
required.
• If additional remote commands are supported, then
the “Remote Command versus Valid States” matrix
must be generated for these additional commands.
Place an “X” in the table for each state in which a
given command is valid.
13.3 Remote Commands and TSEM Process Model
Mapping
13.3.1 Table 9 illustrates the relationship between
remote commands and states of the TSEM processing
state model. An “X” indicates that a command is valid
for use in this state. If a remote command is attempted
during a non-valid state, the equipment would reject the
remote command.
13.4 Remote Command Descriptions
13.4.1 ABORT — This command terminates the
current processing. ABORT makes no guarantee about
completion of the current test(s).
13.4.2 PAUSE — This command transitions the tester
to the PAUSING process state when the current test(s)
completes processing.
13.4.3 RESUME — This command resumes processing
from the point where the process was PAUSED.
Process program variable parameters can be specified
in this command that modify the default values for
these variable parameters in the process program.
Process program verification (CHECKING state) must
occur when variable parameters accompany this
command.
13.4.4 PP-SELECT — This command instructs the
tester to copy the indicated Process Program from non-
volatile storage to the tester’s process program
execution area. Process program variable parameters
can be specified in this command that modify the
default values for these variable parameters in the
process program. Process program verification must
occur when variable parameters accompany this
command.
13.4.5 DEFINE-DATALOG-PLAN — This command
defines and names a datalog plan. The START
command may subsequently activate the datalog plan
by name.
13.4.6 START — This command is only available to
the host or operator when a process program has been
selected and the tester is in the READY processing
state. The START command instructs the tester to
initiate processing. Parameters can be specified in this
command.
13.4.7 STOP — This command completes the current
test(s), stops in a safe condition, and returns to the
IDLE processing state. STOP has the intent of bringing
about a normal termination after completion of the
current test(s).
13.4.8 START EXEC — This command instructs the
tester to start the tester executive.
13.4.9 STOP EXEC — This command instructs the
tester to stop the tester executive.
13.4.10 ENABLE-SITE — This command instructs the
tester to persistently re-enable a test-site previously
disabled via the DISABLE-SITE remote command.
Parameters can be specified in this command.
13.4.11 DISABLE-SITE — This command instructs the
tester to persistently disable a test-site originally
enabled via the PP-SELECT remote command.
Parameters can be specified in this command.
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13.5 Associated Remote Command Parameters
Table 8 Remote Commands
Command Name Parameter Name Opt./Req. Parameter Format Description
ABORT None
DISABLE-SITE DISABLESITELIST REQ List, s (s = # of test-sites)
1. (test-site 1)
2. (test-site 2)
s. (test-site s)
ID of test-site to be disabled.
ENABLE-SITE ENABLESITELIST REQ List, s (s = # of test-sites)
1. (test-site 1)
2. (test-site 2)
s. (test-site s)
ID of test-site to be enabled.
PAUSE None
DEFINEDSITELIST OPT List, s (s = # of test-sites)
1. (test-site 1)
2. (test-site 2)
s. (test-site s)
Establish the initial default set
of test-sites.
PROCESSPARAMETER OPT User specific
PP-SELECT
PROCESSPROGRAMID REQ Text Identifier of the process
program to be executed.
RESUME PROCESSPARAMETER OPT User specific
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Command Name Parameter Name Opt./Req. Parameter Format Description
SELECTEDSITELIST OPT List, s (s = # of test-sites)
1. (test-site 1)
2. (test-site 2)
s. (test-site s)
Provides single execution
override of test-sites
enabled/disabled by remote
commands ENABLE-SITE and
DISABLE-SITE.
DATALOGDATASETS OPT List, n (n - # of datasets)
1. List, 2
1. Dataset Name
1
2. List, p (Zero-length list
= all test-sites)
1. SiteID
11
…
p. SiteID
1p
n. List, 2
1. Dataset Name
n
2. List, q (Zero-length list
= all test-sites)
1. SiteID
n1
…
q. SiteID
nq
Datalog output can be directed
to separate datasets on a per-
test-site basis.
DATALOGBYTESTTYPE OPT List, b (b = # of (TestType,
TestStatus) pairs being
assigned reports.)
1. List, 3
1. TestType
1
2. TestStatus
1
3. ReportID
1
(If omitted,
the default report is assigned.)
…
b. List, 3
1. TestType
b
2. TestStatus
b
3. ReportID
b
Specifies datalog options by
general TestType.
DATALOGBYTESTID OPT List, c (c = # of (TestId,
TestStatus) pairs being
assigned reports.)
1. List, 3
1. TestID
1
2. TestStatus
1
3. ReportID
1
…
c. List, 3
1. TestID
c
2. TestStatus
c
3. ReportID
c
Specifies datalog options for
specific test ids.
DATALOGOPTION OPT Enumerated
(0:No Log, 1:Log Pass, 2:Log
Failures, 3: Log All)
Selects the condition when
datalog is sent.
START
DATALOGPLANNAME OPT Text Turns on datalogging according
to a predefined plan. This
parameter overrides all other
individual datalog setting
options in a START command.