semi合集-English.pdf - 第3347页

SEMI E130.1-1104 © SEMI 2004 6 Table 4 Varia ble Item Mapping Ta ble Variable Name Descrip tion Class SECS-II Type ContactCount The number of time s the probe card has come in contact with a substrate. SV U2 DieXCoordina…

SEMI E130.1-1104 © SEMI 2004 5

Service SECS-II Field Values Req. Description

RCMD “SET-CONTROL-

MAP”

CPNAME “CONTROLMAP” Y ControlMap parameter.

CPVAL A [n] Control Map identifier.

CPNAME “X” N X parameter.

CPVAL U4 X coordinate value.

CPNAME “Y” N Y parameter.

SET-CONTROL-MAP

CPVAL U4 Y coordinate value.

UNLOAD-SUBSTRATE RCMD “UNLOAD-

SUBSTRATE”

RCMD “UNLOAD-TEST-

SUBST”

CPNAME “SUBSTLOCID” Y SubstLocID parameter.

UNLOAD-TEST-SUBST

CPVAL A [n] Target substrate location.

RCMD “UNLOAD-

ALLSUBSTRATES”

CPNAME “SUSPEND” N SUSPEND parameter.

UNLOAD-

ALLSUBSTRATES

CPVAL BOOLEAN If TRUE, causes substrate occupying chuck

to be suspended.

ONLINE-LOCAL RCMD “ONLINE-LOCAL” Y

6 Variable Data Item Mapping

6.1 The purpose of this section is to define the list of variable items required by SEMI E130. Values of these

variables will be available to the host through collection event reports and host status queries.

6.2 Requirements

6.2.1 Any supplier-defined variables shall be documented in the same format used by this document. The following

minimum information is required:

<variable name> Class: <ECV, SV, or DVVAL> Format: <SML>

Description: <If class = DVVAL, description must contain statement of when data is valid.>

6.3 Data Types

6.3.1 Equipment Constants (ECVs) can be changed by the host using S2,F15 (New Equipment Constant Send). The

operator may be able to change some values, but the equipment does not change the values on its own. The value of

an equipment constant may be queried by the host at any time, using the S2,F13/14 transaction. They reside in non-

volatile memory of the equipment. Equipment constants remain in effect until they are overwritten either by manual

entry or by a S2,F15.

6.3.2 Status Variables (SVs) are valid at all times. An SV may not be changed by the host but may be changed by

the equipment or operator. The value of status variables may be queried by the host at anytime using the S1,F3/4 or

S6,F19/20 transactions.

6.3.3 DVVALs are variables that are valid only upon the occurrence of specific collection events. An attempt to

read a variable item at the wrong time does not generate an error, but the data reported may not have relevant

meaning.

6.4 For multiple sites scenarios, if a variable is described as List by number of sites, then a list is expected, one

value for each site.

SEMI E130.1-1104 © SEMI 2004 6

Table 4 Variable Item Mapping Table

Variable Name Description Class SECS-II Type

ContactCount The number of times the probe card has come in

contact with a substrate.

SV U2

DieXCoordinate The coordinate of the die in the x direction (column). SV I2

DieYCoordinate The coordinate of the die in the y direction (row). SV I2

DieZPosition The position of the Chuck Z-axis in microns. A

user/supplier defined unit of measure other than

microns is permissible and must be documented.

SV F4

DieZCoordinate The coordinate of the die in the z direction. SV I2

InspectionResult Result of the last inspection. SV BOOLEAN

MinXStep The minimum step size in microns in the X direction. SV F4

MinYStep The minimum step size in microns in the Y direction. SV F4

MinZStep The minimum step size in microns in the Z direction

(Alternative user-defined unit of measure may be

specified for the Z motion).

SV F4

ProbeCardId The ID of the Probe Card. SV A [25]

TaskID The ID of the service task being performed. SV A [50]

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E132-0305 © SEMI 2004, 2005 1

SEMI E132-0305

SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND

AUTHORIZATION

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on July 11, 2004 and August 16, 2004. Initially available at

www.semi.org September 2004; to be published November 2004. Originally published March 2004;

previously published July 2004.

NOTICE: The designation of SEMI E132 was updated during the 0305 publishing cycle to reflect the creation of

SEMI E132.1.

1 Purpose

1.1 This specification describes a method for restricting access to communication with equipment by requiring

clients to authenticate to the equipment before proceeding with subsequent communication, and provides a flexible

authorization scheme to control client application access. Authorization allows parties who want to exchange

information with or control the equipment to do so on a need-to-know and/or need-to-use basis.

1.2 The authorization scheme specified in this standard allows equipment vendor the flexibility to provide access

control at any level of granularity, ranging from no access control restrictions, predefined role-based access control,

to very fine-grained control.

2 Scope

2.1 This is a standard that applies to all semiconductor manufacturing equipment that requires authentication and

authorization for its services. It does not apply to communication that is governed by the SEMI E30 communication

and control state models.

2.2 This standard does not require data transmitted over an established session to be encrypted, encryption is only

required as specified by the authentication protocol. It is assumed that the interface specified by this standard will

be operating in an environment where there are no malicious attacks such as inside a closed factory network.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 An adjunct standard will need to be defined that maps specific technologies and protocols to the defined

concepts in this document.

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

4.2 Other Standards

Uniform Resource Identifiers (URI): Generic Syntax, IETF RFC 2396, August 1998

(http://www.ietf.org/rfc/rfc2396.txt

)

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Referenced Documents

5.1 Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,

http://www.omg.org/technology/documents/

modeling_spec_catalog.htm