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SEMI P10-0705 © SEMI 1990, 2005 52 <xs:attribute name="groupName" type="xs:string" use="required"/> <xs:attribute name="p10Start" type="xs:string" use="requ…

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SEMI P10-0705 © SEMI 1990, 2005 51
<xs:element name="MaskRegistrMark"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CellRegistrMark"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MeasureFileName"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RegistrMarkFeature"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RegistrMarkLocationDrawing"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RegistrMarkDrawing"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RegistrMarkSeparation"
type="XYType"/>
<xs:element name="RegistrMarkCount"
type="XYType"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartRegistration"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndRegistration"/>
</xs:complexType>
<xs:complexType name="CdGroupType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDefinition"
type="CdDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="NumberOfCds" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="CdSiteId" type="xs:string"/>
</xs:sequence>
<xs:element name="CdLocation" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdMatrixFileName"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 52
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdGroup"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdGroup"/>
</xs:complexType>
<xs:complexType name="CdDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdQualityId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdData" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDigitized" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdToneClear" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdMorphography" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdPercentClear" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdPercentClearWindow"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdTarget" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdOrientation" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdPitch" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdFeature" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdLocationDrawing"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDrawing" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdTolerance" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 53
<xs:element name="CdRange" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdThreeSigma" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromTarget"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromMean"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdStd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdCorrelationId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdEquipReqd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartCdDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndCdDefinition"/>
</xs:complexType>
<xs:complexType name="CdSetType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdGroupName" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdQualityId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdTolerance" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdRange" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdThreeSigma" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDeviationFromTarget"
type="xs:double"/>
</xs:sequence>