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SEMI S13-0305 © SEMI 1998, 2005 14 RELATED INFORMATION 4 DOCUMENT CRITERIA INCLUDED IN SEMI S16 NOTICE : This rel ated inform ation is not an official part of SEMI S13 and was derived fr om SEMI S16. This related informa…

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SEMI S13-0305 © SEMI 1998, 2005 13
RELATED INFORMATION 3
DOCUMENT CRITERIA INCLUDED IN SEMI S8
NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S8. This
related information was approved for publication by a letter ballot on November 24, 2004.
R3-1 Purpose of this Related Information
R3-1.1 This related information contains criteria for documents that are presented in SEMI S8.
R3-1.2 The criteria in this related information are included in SEMI S8 as of the time this related information was
written, and are included herein for the convenience of users of this document.
NOTE 1: The information in this related information may not be current with the source document. The source document
contains the actual documentation criteria.
R3-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S8.
NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate
future revisions of SEMI S8 related to criteria for documents.
R3-2 Documentation
R3-2.1 SEMI S8-0701, ¶7.2 — Supplier provided documentation should include administrative controls intended
by the supplier to mitigate ergonomic risks.
R3-2.2 SEMI S8-0701, ¶7.3 — Supplier provided documentation should illustrate any installation requirement
necessary to meet SEMI S8 guidelines (e.g., Diagram should show clearance area required for opening hinged
panels, operator working area, allowable range of vertical foot adjustment to keep ergonomic measurements within
SESC acceptable limits, etc.).
SEMI S13-0305 © SEMI 1998, 2005 14
RELATED INFORMATION 4
DOCUMENT CRITERIA INCLUDED IN SEMI S16
NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S16. This
related information was approved for publication by a letter ballot on November 24, 2004.
R4-1 Purpose of this Related Information
R4-1.1 This related information contains criteria for documents that are presented in SEMI S16.
R4-1.2 The criteria in this related information are included in SEMI S16 as of the time this related information was
written, and are included herein for the convenience of users of this document.
NOTE 1: The information in this related information may not be current with the source document. The source document
contains the actual documentation criteria.
R4-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S16.
NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate
future revisions of SEMI S16 related to criteria for documents.
R4-2 Information Provided by the Supplier
R4-2.1 SEMI S16-0600, §7 ¶7.1 — The supplier should provide the equipment owner with operation and/or
maintenance manuals or similar documents drafted according to SEMI S13, which include the following information
on the materials used in equipment, subassemblies and components upon the delivery of the equipment.
NOTE 3: The supplier may gather appropriate information at the time of design in conjunction with a disposal party.
R4-2.1.2 ¶7.1.1 — Primary materials of appropriate disassembleable unit in consideration with reuse, refurbishing,
recycling and disposal of each component such as chemicals (e.g., mercury), metals (e.g., stainless steel, steel, or
copper), plastics (e.g., ABS - i.e. Acrylonitrile Butadiene Styrene plastics - or non-combustible ABS), glass, or
ceramics.
R4-2.1.3 ¶7.1.2 — Describe opportunities for reuse, refurbishing or material recycling of every component or
recyclable subassembly. If there are no opportunities, a waste disposal method should be recommended based on
assumption of usage with baseline process by the supplier. (e.g. ABS can be recycled after decontamination as
class X plastic and mercury requires reclaim or hazardous waste disposal.)
R4-2.1.4 ¶7.1.3 — Disassembly procedure
R4-2.1.4.1 ¶7.1.3.1 — A disassembly procedure should be recommended by the supplier to the level required to
facilitate complete decontamination and material separation for waste disposal.
R4-2.1.4.2 ¶7.1.3.2 — The disassembly procedure should include procedures to remove all hazardous energies.
R4-2.1.4.3 ¶7.1.3.3 — The disassembly procedure should prevent the mixture of incompatible chemicals. If it is
not feasible, administrative control procedures should be included.
R4-2.1.4.4 ¶7.1.3.4 — If the chemicals/materials described in ¶¶7.1.3.4.1 to 7.1.3.4.4 are hazardous, the
disassembly procedure should prevent the release of them to the environment. The chemicals include:
NOTE 4: Byproducts are changeable according to several kinds of conditions such as exhaust diameter/length/volume, chamber
volume/pressure/configuration, maintenance method/cycle, and evacuation frequency.
R4-2.1.4.5 ¶7.1.3.4.5 — The disassembly procedure should address any hazards of ionizing radiation sources, if
they are present, and address safe removal and storage procedures.
R4-2.1.5 ¶7.1.4 — Disposal procedure should be described by a safer way based on the result of risk assessment
such as SEMI S10 or EN 1050 and job hazard analysis.
SEMI S13-0305 © SEMI 1998, 2005 15
RELATED INFORMATION 5
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S2
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This Related Information was approved for publication by a letter ballot on November 24, 2004.
R5-1 Purpose of this Related Information
R5-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S2.
R5-1.2 The criteria in this related information are not included in SEMI S2 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R5-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S2.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S2 and that this related information be removed from SEMI S13 by revising SEMI S13
with the same effective date as the effective date of the addition of these criteria to SEMI S2.
R5-2 Safety Interlock
R5-2.1 The equipment supplier should describe the safety interlocks provided as part of the equipment and their
function in a list in the documents provided to the equipment user. The interlock list should include the hazards
against which they protect, type of sensors/actuators used, the type of interlock circuit (e.g. hardware or software,
etc.), and equipment conditions after the interlocks are activated.
R5-2.2 The equipment supplier should describe how to restore each interlock and put equipment or parts of the
equipment back to operation after an interlock is activated.
R5-2.3 The locations of sensors and actuators used for safety interlocks protecting personnel should be described.
R5-2.4 Calibration and testing procedures and frequencies should be provided for all sensors and detectors which
require calibration and testing to be conducted by the user. Where applicable, gases used for calibration and test
apparatus should be identified.
R5-3 Emergency Shutdown
R5-3.1 The documents provided to the equipment user should describe the function and operation of the EMO
circuit that is provided as part of the equipment.
R5-3.2 The locations of EMO buttons should be described.
R5-4 Environmental Information
R5-4.1 Maintenance Procedures with Potential Environmental Impacts — The supplier’s recommended
maintenance procedures should:
identify procedural steps during which releases might occur, and the nature of the releases; and
identify waste characteristics and methods to minimize the volume of effluents, wastes, or emissions generated
during maintenance procedures.
R5-5 Fire Protection Information
R5-5.1 Information of fire protection should be written in the documents provided to the equipment user.
R5-5.2 The following ¶¶R5-5.2.1 to R5.5.2.3 apply only if the equipment includes the features to which the
information relates.
R5-5.3 Operation, maintenance and test procedures for fire detection and alarm system should be described.