semi合集-English.pdf - 第3243页
SEMI E127-0705 © SEMI 2003, 2005 44 Parameter Definition Form ClientConnectStatus Identifies th e succe ss or errors. Structure consisting of ConnectConnectAck List of 0+ pairs of ErrorCode ErrorText ClientConnectAck Ind…

SEMI E127-0705 © SEMI 2003, 2005 43
Table 26 List of Services
Operation Description Type Reqd Control
#1
ChangeService The Control Client requests to change the Service state of the
IMM.
R Y Y
ClientConnect Request to be a client for either control or data services. R Y —
ClientDisconnect Request to discontinue client relationship. R Y —
Delete Request by Control Client to delete a Substrate Object
(SEMI E39). (See ¶12.6.7 for detail.)
R Y
Y
RequestRetentionConditions Request for the current retention rules and retention time for the
requesting client.
R Y —
SetRetentionConditions Request to set or clear the client’s current retention conditions. R Y —
SetAutoTableSend Set or clear automatic sending of completed tables for this
client.
R Y —
TableRequest Request for a table or table subset (SEMI E58). R Y —
TableSend Request to send a table or table subset (SEMI E58). R Y —
TransferPathCalibration R Y Y
UpdateSubstrateObject Request by Control Client to create a Substrate Object and
p
opulate its attributes with the attributes provided. Also sent by
the STPO for unloading the substrate.
R Y Y
XfrCmdListRequest Request to send an ordered list of micro commands to be
returned individually to the IMM STPO to affect a substrate
hand-off.
R Y Y
XfrCommand Message sent by the Control Client to an STPO to request a
certain action (micro command) be performed. A response is
sent when the action has been completed.
R Y Y
XfrVerify Message sent by the Control Client to a STPO when all
necessary actions have been completed to effect a transfer of a
substrate and asking for confirmation.
R Y Y
XfrHalt Message sent by either partner to stop all activities. This
message ends the transfer procedure and requires manual
intervention to clear.
R Y Y
#1
Identifies services that may only be sent from the Control Client.
18.2 Service Parameters
18.2.1 Table of Parameters and Parameter Elements — Table 27 defines the parameters of the services defined in
this document.
Table 27 Definitions for Parameters and Parameter Elements
Parameter Definition Form
AutoSendRawData Enables (T) or disables (F) automatic sending for Raw
Data Tables.
Boolean.
AutoSendConvertedData Enables or disables automatic sending for Converted
Data Tables.
Boolean.
AutoSendCalibrationData Enables or disables automatic sending for Calibration
Data Tables.
Boolean.
ClientID An identifier used by the IMM to manage individual
reports.
Text.
ClientInterfaceVersion Identifies the version of the communication interface
required by the client.
Text.

SEMI E127-0705 © SEMI 2003, 2005 44
Parameter Definition Form
ClientConnectStatus Identifies the success or errors. Structure consisting of
ConnectConnectAck
List of 0+ pairs of
ErrorCode
ErrorText
ClientConnectAck Indicates the success (T) or failure (F) of a connection
or disconnection request.
Boolean.
ClientType Identifies the type of client. Enumerated: Control or Data.
Deltas An ordered list of discrepancies for the differences in
(x,y,z) between the expected position of the center of
the incoming substrate and the actual position
(expected value minus actual value).
Ordered list of 3 floating point values for
(x,y,z) discrepancies.
ErrorCode Contains the code for the specific error found. Enumerated. Service-dependent.
ErrorText Text in support of the error code. Text.
OrientationIn Specifies orientation of substrate to be loaded. Floating point.
OrientationOut Specifies orientation of substrate to be unloaded. Floating point.
Properties A list of attribute name/value pairs. List of 0+ structures consisting of
Attr.
RetentionRules 0–2 level list of retention rules. List or nested list of name/value pairs of
retention rules.
ServiceAck Indicates the success or failure of a service request. Enumerated:
Service performed with no errors
Can not perform now
At least one parameter is invalid.
Status Identifies the success or errors for a service request. Structure consisting of
ServiceAck
List of 0+ pairs of
ErrorCode
ErrorText
XfrAck Indicates success or failure. Boolean.
XfrCmdList An ordered list of XfrCmdName to be used for either a
load or an unload operation.
List of 1+ text.
XfrCmdName Indicates specific action requested. Text.
XfrHaltAccept True if halt accepted. May be denied only if the
specified transfer procedure does not exist.
Boolean.
XfrLink Transfer identifier. Unsigned integer.
XfrStatus Information about the success or failure of a Calibrate
Transfer Path service request.
Structure of:
XfrAck
List of 0+ pairs of
ErrorCode
ErrorText
18.2.2 RetentionRules Parameter Elements — The elements within a list of RetentionRules are defined in Table 28.
Table 28 Definitions for RetentionRule Parameter Elements
Name Definition Form
AfterTransfer The table may be deleted after transfer to the client. Non-negative integer. A value of zero
disables this rule, and any positive value
enables it.

SEMI E127-0705 © SEMI 2003, 2005 45
Name Definition Form
ClientDelete The minimum number of tables the client wants to be
able to be able to store prior to being notified by the
event TableStorageCapacityWarning.
Non-negative integer. A value of zero
disables this rule.
MaximumTablesStored Maximum number of tables the client wants stored;
beyond that they are to be deleted on a first-in, first out
basis.
Non-negative nteger. A value of zero
disables this rule.
RetentionTime The minimum time that a table shall be retained in
storage. The table may not be deleted before this
period of time has passed unless Automatic Rollover is
forced to delete it to make room for a new table.
Long integer for number of hours to retain
tables. A value of zero disables this rule.
18.2.3 Valid ErrorCode enumerations are shown in Table 29. The actual format for ErrorCode is communication
protocol-dependent.
Table 29 Valid ErrorCode Enumerations
Service Valid Logical Values
ClientConnect Client Already Connected
Duplicate ClientID
Invalid ClientType
IncompatibleVersions
ClientDisconnect Unrecognized ClientID (Client not currently connected)
XfrCommand Rejected/Unrecognized Command
Rejected/Parameter Error
XfrCommand
XfrVerify
Failed (Completed Unsuccessfully)
Failed (Unsafe) – External intervention required
XfrVerify Sensor-Detected Obstacle
Material Not Sent
Material Not Received
Material Lost
Hardware Failure
Transfer Cancelled
All other services Action performed – no errors
Action will be performed at earliest opportunity
Action can not be performed now
Action failed due to errors
Unrecognized command
At least one parameter has an error
18.3 Message Detail
18.3.1 ClientConnect Service — This service is used by a prospective client to request a connection as a Control
Client or Data Client. If the request is as a Control Client, and there is already a Control Client connected, the IMM
shall reject the request. The IMM shall also reject the request if a client with the same ID is already connected or if
the required interface version can not be supported. Table 30 defines the parameters for ClientConnect.
Table 30 ClientConnect Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ClientID M M(=) Identifier for the requestor.
ClientInterfaceVersion M — Identifies the version of the communication interface required by the client.
ClientType M — Indicates type of connection (control or data).
ClientConnectStatus — M Indicates the success or the specific errors.