semi合集-English.pdf - 第1426页

SEMI 30.1-0200 © SEMI 1998, 2000 1 SEMI E30.1-0200 INSPECTION A ND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) This standard w as technic ally a pproved by the G lobal Information a nd Control Com mittee a nd is the direct re…

100%1 / 7923
SEMI E30-1103 © SEMI 1992, 2003
99
shall .................................................................................................................................................................................
.3, 4, 5, 6, 8, 9, 10, 11, 12, 13, 14, 18, 21, 22, 24, 28, 31, 34, 36, 37, 40, 45, 48, 50, 52, 53, 54, 55, 56, 58, 59, 62,
67, 68, 73
shutdown .............................................................................................................................................................56, 77
Shutdown.............................................................................................................................................................71, 77
SMPLN......................................................................................................................................................................62
SMS...............................................................................................................................................................3, 5, 6, 10
SOFTREV ...........................................................................................................................................................30, 31
Spooling.....................................................................................................1, 12, 18, 52, 55, 56, 57, 58, 63, 65, 68, 69
START ..........................................................................................................................................................16, 17, 36
State Model..............................................................................................................1, 6, 7, 8, 9, 10, 12, 13, 18, 27, 52
Status Data Collection .............................................................................................................................17, 30, 67, 69
Status Variable Namelist Reply.................................................................................................................................64
Status Variable Namelist Request .............................................................................................................................64
STOP .......................................................................................................................................................14, 17, 36, 63
supplier ................................................................................................................14, 21, 22, 35, 36, 40, 50, 62, 68, 69
SV....................................................................................................................................22, 23, 24, 25, 26, 30, 55, 62
SVID............................................................................................................................................22, 24, 30, 62, 71, 74
switch...........................................................................................................7, 9, 11, 12, 15, 52, 58, 59, 60, 72, 75, 76
Switch........................................................................................................................................................................76
synchronization..................................................................................................................................18, 20, 23, 50, 71
Synchronization.....................................................................................................................................................2, 71
System Errors ........................................................................................................................................................1, 66
T
terminal services........................................................................................................................................................71
Terminal Services........................................................................................................1, 13, 18, 45, 63, 66, 67, 69, 72
TEXT...................................................................................................................................................................45, 62
TIME ...................................................................................................................................................................50, 51
toggle.........................................................................................................................................................................72
TOTSMP .................................................................................................................................................24, 25, 62, 74
Trace Data Acknowledge ..........................................................................................................................................65
trace data collection...................................................................................................................................................24
Trace data collection..................................................................................................................................................24
Trace Data Collection..........................................................................................................2, 5, 17, 24, 25, 67, 69, 74
Trace Data Send ........................................................................................................................................................65
trace report.................................................................................................................................................................24
Trace Report..............................................................................................................................................................25
Transition Type .........................................................................................................................................................63
TRID..............................................................................................................................................................24, 62, 74
U
units .....................................................................................................................................................6, 22, 23, 26, 30
Units ..........................................................................................................................................................................25
V
Variable Item Dictionary.......................................................................................................................................4, 62
Variable Item List......................................................................................................................................1, 22, 30, 62
SEMI 30.1-0200 © SEMI 1998, 20001
SEMI E30.1-0200
INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
This standard was technically approved by the Global Information and Control Committee and is the direct
responsibility of the North American Information and Control Committee. Current edition approved by the
North American Regional Standards Committee on September 3, 1999. Initially available at www.semi.org
November 1999; to be published February 2000. Originally published June 1998.
CONTENTS
1 Purpose
2 Scope
3 Limitations
4 Referenced Documents
4.1 SEMI Standards
4.2 Other References
5 Terminology
5.1 Abbreviations and Acronyms
5.2 Definitions
6 Communication Requirements
7 State Models
7.1 Processing State Model Requirements
7.2 Processing State Model Diagram
7.2.1 Working State for Inspection Equipment Model
7.2.2 Working State for Review Equipment
7.2.3 Working State for Inspection/Review Equipment
7.3 Processing State Definitions
7.4 Processing State Transition Table
8 Collection Event List
8.1 Requirements
9 Variable Items
9.1 Requirements
9.2 Variable Items and Reporting Levels
9.3 Variable Item Types
9.4 Variable Item Dictionary
10 Alarm List
10.1 Alarm List Table
10.2 Alarm ID, Alarm Set/Cleared Event Table
11 ISEM Tables
11.1 ISEM Table Data
11.2 TABLE-DEFs
11.3 Required ISEM Tables
11.3.1 “TABLE-AREA-DEF”
11.3.2 “TABLE-ALIGN-DEF”
11.3.3 “TABLE-ANOMALY-DEF”
11.3.4 “TABLE-M21-ANOMALY-DEF”
11.3.5 “TABLE-STANDARD-DEFECT-DATA-SET-
DEF”
11.4 TABLE-DEF Column Header Descriptions and
Formats
12 Process Program Management
12.1 Definition and Rules for ISEM Process Programs
12.2 Requirements
12.3 Process Program Structure
12.4 Process Program Variable Parameters
12.4.1 Overriding Process Program Variable
Parameters Default Values
12.4.2 Requirements and Rules
12.4.3 Modifying Process Program Variable
Parameters
12.5 Use of Process Programs, Remote Commands,
and “PROCESS-BLD-GROUP”
13 Remote Commands
13.1 Requirements
13.2 Remote Commands Description
13.2.1 Remote Commands and Associated Host
Command Parameters
13.2.2 Host Command Parameters Name and Values
13.2.3 Remote Commands vs. Processing States
SEMI 30.1-0200 © SEMI 1998, 2000 2
14 Scenarios
14.1 Run Level Reporting Scenario
14.2 PP-UPDATE Remote Command Scenario
14.3 PP-SELECT Remote Command Scenario
14.4 Event Report and ISEM Table Transfer Command
Scenario
15 GEM Capabilities
15.1 Requirements
Related Information 1
R1-1 Defect Classification Code Management
R1-1.1 Classification Codes and Defect Classification
R1-1.2 Requirements
R1-2 Reporting Coordinates and Coordinate Systems
R1-2.1 Site Location Accuracy
R1-2.2 Expected or Designed Locations vs. Actual
Locations
R1-2.3 Substrate Coordinate Systems (Unpatterned)
R1-2.4 Substrate Pattern Coordinate System
R1-2.5 Pattern Element Coordinate System
R1-2.6 Parallel Coordinate Systems
R1-2.7 Requirements
R1-3 Coordinate System for a Substrate
R1-3.1 SEMI M20 Coordinate System
R1-3.2 M20P Coordinate System
R1-3.3 Establishing an M20P Coordinate System
R1-4 Layout of Rectangular Pattern Elements on a
Substrate using SEMI M20 Coordinate System
R1-4.1 ISEM “M21” Layouts
R1-5 How an M20P Coordinate System is Established
on a Substrate
Related Information 2 — Application Notes
R2-1 Using ISEM Table Attributes to Specify Process
Related Data Item Variable Values