semi合集-English.pdf - 第5611页

SEMI P10-0705 © SEMI 1990, 2005 106 < x s : a t t r i b u t e n a m e = " p 1 0 M u l t i V a l u e " t y p e = " x s : i n t e g e r " u s e = " r e q u i r e d " f i x e d = " 2 &q…

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SEMI P10-0705 © SEMI 1990, 2005 105
< xs: elem ent nam e= "CdXyDe via t ion" t ype= "xs:double"
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< xs: elem ent nam e= "CdXyRefe re nce On ly" t ype= " x s:boolean"
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type
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use
= " requir e d" / >
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fixed
= "St a rt CdXyRe sult s" / >
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fixed
= "EndCdXyResu lt s" / >
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xs: sequence>
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< xs: elem ent nam e= "CdHor izont a lI d" type= "x s:st ring" / >
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SEMI P10-0705 © SEMI 1990, 2005 106
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
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type
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< xs: elem ent nam e= "CdVer t ica lTone Clear" t ype= "x s:boole an"
m inOccurs
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< xs: elem ent nam e= "Mea sur edVer t ica lCd"
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/ >
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use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt CdXySit e " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdXySit e" / >
< / xs: com plexType>
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< xs: elem ent nam e= "CdDe nse Group" t ype= "x s:st ring"
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< xs: elem ent nam e= "CdI soDenseTole r ance"
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< xs: elem ent nam e= " M easu redCdI soRange"
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< xs: elem ent nam e= "Mea sur edCdDe nse Ra nge"
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= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdI soDe nseTole ran ce"
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< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= " p1 0 St a r t " t ype= "x s:st r ing" use= " re quire d"
fixed
= "St a rt CdI soD enseResult s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdI soDe nse Result s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "D e fect M easur em en t sType ">
SEMI P10-0705 © SEMI 1990, 2005 107
- < xs: sequence>
< xs: elem ent nam e= "De fect Qu alit yI d" type= "x s:st ring"
m inOccurs
= " 0 " / >
- < xs: elem ent nam e= "I nspect ionAre a" m inOccurs= "0 "
m axOccurs
= "u nbounde d">
- < xs: com plexType>
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- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
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xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "I nspect ionAr eaExclude" m inOccurs= "0 "
m axOccurs
= "u nbounde d">
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- < xs: ext ension base= "W indow Type ">
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type
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fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "
Visua lI nspCr it er ia " t ype= "x s:st ring"
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< xs: elem ent nam e= "Die ToDieI nspect ion" t ype= "x s:boole a n"
/ >
< xs: elem ent nam e= "DieToDieM e a su r em ent s"
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= " xs:boolean" / >
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< xs: elem ent nam e= "De fect EquipRe qd" type= " x s:st ring"
/ >
< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
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= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent
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< xs: elem ent nam e= "Defe ct I nspPixelSizeReqd"
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< xs: elem ent nam e= "De fect Type" type= "xs:st r in g"
/ >
< xs: elem ent nam e= "De fect I nspSen sit ivit yRe qd"
type
= " x s:st r ing" / >
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m axOccurs
= "u nbounde d">