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SEMI E130-1104 © SEMI 2003, 2004 41 R1-1.5 Scenario V – Processing Material using Control Ma ps — Control maps can be used for identifying the sites to be probed per substrate. The speci fication for the download of m ap…

SEMI E130-1104 © SEMI 2003, 2004 40

R1-1.3.1.10.3 Load PJ02 Substrate 3. See Section R1-1.1.2.8

R1-1.3.1.10.4 Process Material. See Section R1-1.1.2.3

R1-1.3.1.10.5 Unload PJ02 Substrate 3. See Section R1-1.1.2.9

R1-1.4 Scenario IV – Alarm Condition Causes a Process State Model Transition to the PROCESSING BLOCKED

State — The purpose of this scenario is to demonstrate the behavior of prober when an alarm condition occurs that

causes the processing resource to become unavailable. The Process State model transitions to the PROCESSING

BLOCKED state. The condition does not cause a corresponding transition to the PAUSING state within an

executing Process Job or a transition to the PAUSED state within the active Control Job.

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

Host Prober

Alarm Notification

PS: MOVINGXYZ to PROCESSING BLOCKED()

MOVE-ABS()

PS: AWAITING COMMAND to MOVING XYZ()

Internal Error Occurs()

User

Notify User()

Bring Up Prober User Interface()

Guide User Through Recover Process

User Determines Maintenance Required

Abort Job(s)

CJAbort

{OR}

{If User issues Abort request through the host, the host sends the CJAbort to the equipment}

Abort PJ

PJ01: PROCESSING to ABORTING()

PS: PROCESSING BLOCKED to HANDLING MATERIAL()

Remove Substrates

PJ01: ABORTING to Terminal

CJ1: EXECUTING to COMPLETED()

PS: HANDLING MATERIAL to IDLE WITH ALARMS()

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

PROCESS

EXECUTING

PROCESSING

BLOCKED

SUBSTRATE

LOADED

IDLE

SETTING UP

AWAITING COMMAND

HANDLING MATERIAL

SERVICE TASK

MOVING XYZ

AWAITING LOAD

IDLE WITH ALARMS

PROCESSING ACTIVE

Figure R1-16

Prober Alarm Scenario

SEMI E130-1104 © SEMI 2003, 2004 41

R1-1.5 Scenario V – Processing Material using Control Maps — Control maps can be used for identifying the sites

to be probed per substrate. The specification for the download of maps is outside the scope of this specification.

The format of the maps is user defined.

R1-1.5.1 Example Settings — For the sake of demonstration, the control map pertaining to the substrate in this

example is communicated using the SEMI G85 map format. The recipe parameter “USE CONTROL MAP” is set to

true.

Site Selection List

Die Number Row Col

1 16 3

2 16 4

3 16 5

4 16 6

123456789101112131415161718

Legend:

Location specified in Control Map

Location Probed - Passed

Location Probed - Failed

?xml version="1.0"?>

Map xmlns:semi="http://www.semi.org"

WaferId="39211USEC4"

FormatRevision="G85-1101">

<Device

ProductId="Example300"

ProductCode="xx"

LotId="1234567890"

Orientation="0"

WaferSize="300"

DeviceSizeX="15968.77"

DeviceSizeY="15968.77"

StepSizeX="15968.77"

StepSizeY="15968.77"

Rows="18"

Columns="18"

SupplierName="xx"

OriginLocation="3"

CreateDate="2002100815124800"

Status="70"

BinType="Decimal"

NullBin="2">

</Data>

</Device>

/Map>

Figure R1-17

Control Map Usage Example Settings

Host Prober

Load Substrate

PS: AWAITING LOAD to HANDLING MATERIAL

Load substrate on Chuck

Move next substrate to Pre-align

Align and Profile

Move substrate to Pre-align

PS: HANDLING MATERIAL to AWAITING COMMAND(X:3, Y:16)

INDEX

PS: AWAITING COMMAND to MOVING XYZ

PS: MOVING XYZ to AWAITING COMMAND(X:4, Y:16)

INDEX

PS: MOVING XYZ to AWAITING COMMAND(X:5, Y:16)

PS: AWAITING COMMAND to MOVING XYZ

Tester

Start

Device Test Complete(Passed)

MOVE-ABS(X:4, Y:16)

PS: MOVING XYZ to AWAITING COMMAND(X:4, Y:16)

PS: AWAITING COMMAND to MOVING XYZ

Start

Device Test Complete(Failed)

Start

Device Test Complete(Failed)

CLEAN-PROBES

PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)

PS: SERVICE TASK to AWAITING COMMAND(X:4, Y:16, Passed)

Start

Device Test Complete(Passed)

MOVE-ABS(X:5, Y:16)

PS: AWAITING COMMAND to MOVING XYZ

PS: MOVING XYZ to AWAITING COMMAND(X:5, Y:16)

Start

Device Test Complete(Passed)

INDEX

PS: AWAITING COMMAND to MOVING XYZ

PS: MOVING XYZ to AWAITING COMMAND(X:6, Y:16)

Start

Device Test Complete(Passed)

ControlMapCompleted

The INDEX command drives the chuck

to the next unprobed site contained

in the control map

Device Test Complete(Passed)

Host issues the MOVE XYZ command

to reprobe the sites previously probed

when the INDEX command was used.

INDEX

Figure R1-18

Control Map Usage Scenario