semi合集-English.pdf - 第1646页
SEMI E38-1296 © SEMI 1995 , 1996 35 The process module requests that all sections ( headers and the body ) of the recipe be dow nloaded. CC PM1 <<-------------------------------------<< RCRequest.Req(RecID=&q…
SEMI E38-1296 © SEMI 1995, 1996 34
2. WAFER MAPPING
The wafers in each of the cassette wafer slots are
assigned a unique wafer ID. In this case, the wafer is
identified as “Wafer1.” If there were more than one
wafer, this process would be repeated until all the
wafers had been given their appropriate identification
that is used later when specific wafers are requested for
transfer and processing.
CC CM
>>------------------------------------->>
Set.Req("WAFERSLOT",SlotID=1,MID=
"Wafer1")
CC CM
<<------------------------------------<<
Set.Rsp("WAFERSLOT",SlotID=1,Status=OK)
3. CC TO TM TRANSFER JOB SETUP
The CC informs the TM that a wafer transfer is required
from the CM to PM1.
CC TM
>>------------------------------------>>
TRJobCreate.Req(MID="Wafer1",TRSourceAmID
="CM",TRDestinationAmID="PM1")
The transport module assigns an identifier for this
particular transfer job. This is important in an actual
cluster implementation since multiple transfer jobs may
be queued and active at any given time. The transfer job
is then started by the transport module.
CC TM
<------------------------------------<<
TRJobCreate.Rsp(JobID=TMJob1,Status=OK)
CC TM
<<-------------------------------------<<
TRJobStarted.Req(JobID=TMJob1,TimeStamp)
4. CC TO CM SEND WAFER
The CC informs the CM that a wafer is to be transferred
to the TM.
CC CM
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",PortID=
"Port1",Dir=Send)
CC CM
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob2,Status=OK)
When the cassette module is ready, it directly
communicates with the cluster controller and the
transport module to indicate its readiness for wafer
handoff.
CC CM
<<-------------------------------------<<
TRJobStarted.Req(JobID=IOJob2, TimeStamp)
TM CM
<<-------------------------------------<<
HOReady.Req(PortID="Port1",AmID="CM",
HODir=GET,MID="Wafer1")
5. CC TO PM1 PROCESSING JOB SETUP
The CC informs PM1 that a wafer will be delivered
(which requires a TRJob to be created) and is to be
processed (this requires that a process job be
established). This involves creating the jobs and
transferring the appropriate recipes to the process
module as required. At some point in this process, the
PM will inform the transport module that it is ready to
receive the wafer with the issuing of the HOReady
Request.
The CC informs PM1 that a wafer is to be transfered
from the TM.
CC PM1
>>------------------------------------>>
TRJobCreate.Req(MID="Wafer1",Port="Port1"
, Dir=Receive)
CC PM1
<<------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob3,Status=OK)
When the process module is ready, it directly
communicates with the cluster controller to indicate its
readiness for wafer handoff.
CC PM1
<<-------------------------------------<<
TRJobStarted.Req(JobID=IOJob3, TimeStamp)
The process job is created on the process module.
CC PM1
>>------------------------------------->>
PRJobCreate.Req(RecID="PP1",MID="Wafer1")
CC PM1
<<-------------------------------------<<
PRJobCreate.Rsp(JobID=PM1Job1,Status=OK)
CC PM1
<<-------------------------------------<<
PRJobSetup.Req(JobID=PM1Job1)
SEMI E38-1296 © SEMI 1995, 199635
The process module requests that all sections (headers
and the body) of the recipe be downloaded.
CC PM1
<<-------------------------------------<<
RCRequest.Req(RecID="PP1",RCTransfer=all)
CC PM1
>>------------------------------------->>
RCRequest.Rsp(RecID="PP1",Status=OK)
CC PM1
>>------------------------------------->>
RCSend.Req(RecID="PP1",<Headers & Body>)
CC PM1
<<-------------------------------------<<
RCSend.Rsp(RecID="PP1",Status=OK)
The process module informs the transport module that it
is ready to receive the material.
TM PM1
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM1",HODir=P
UT,MID="Wafer1")
6. CM TO TM WAFER HANDOFF
The CM transfers the wafer to the TM through the
handoff sequence, and the CM and TM will keep the
cluster controller informed of its transfer progress.
The transport module informs the cassette module that
it is proceeding with the "getting" of the wafer.
CM TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="CM",HODir=GE
T, MID="Wafer1")
The cassette module informs the transport module to
use the PICK sequence to get the wafer.
CM TM
>>------------------------------------->>
HOPick.Req(Port=Port1,AmID="CM")
CM TM
<<-------------------------------------<<
HOPick.Rsp(Port=Port1,AmID="CM",
Status=OK)
When the getting of the wafer has been successful, the
cassette module informs the transport module with a
verify sequence.
CM TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="CM")
CM TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="CM",
Status=OK)
The cassette module then informs the cluster controller
of its current status.
CC CM
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob2,TimeStamp,
Status=OK)
7. TM TO PM1 WAFER HANDOFF
The TM now has possession of the wafer and is ready
to proceed with the putting of the wafer into the process
module. The TM and PM1 will inform the cluster
controller of the progress of the transfer of material.
The TM informs the PM that it is proceeding with the
putting of the wafer.
PM1 TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM1",HODir=P
UT,MID="Wafer1")
The process module informs the TM to use the PLACE
scenario as the put operation.
PM1 TM
>>------------------------------------->>
HOPlace.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOPlace.Rsp(Port=Port1,AmID="PM1",
Status=OK)
SEMI E38-1296 © SEMI 1995, 1996 36
When the putting of the wafer has been successful, the
PM informs the transport module with a verify
sequence.
PM1 TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="PM1",
Status=OK)
CC PM1
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob3,
TimeStamp)
The TM then informs the cluster controller that the
putting phase of the transfer is complete and then that
the requested transfer job is complete.
CC TM
<<-------------------------------------<<
TRJobComplete.Req(JobID=TMJob1,
TimeStamp,Status=OK)
8. PM1 JOB PROCESSING
The process module informs the cluster controller, now
that is has received the material and having previously
entered the setup state, that it is ready to initiate
processing on the wafer. When actual processing is
initiated, the PM informs the cluster controller of its
current status.
CC PM1
<<-------------------------------------<<
PRJobProcessing.Req(JobID=PM1Job1,TimeSta
mp)
A data collection is enabled to allow parameters to be
sent from the PM to the cluster controller while the
wafer processing is taking place. A previously defined
event is enabled and the report structure is established.
CC PM1
>>------------------------------------->>
Set.Req(EREvent,EventID=Event1,
Enabled=TRUE)
CC PM1
<<-------------------------------------<<
Set.Rsp(EREvent,EventID=Event1,Status=OK)
Two variables for time and temperature will be reported
based on Event1 occurring.
CC PM1
<<-------------------------------------<<
ERReport.Req(EventID=Event1,ReportID=Rpt1
, ValueList={time,temp})
When wafer processing is complete on the PM, the
cluster controller is informed of the current status.
CC PM1
<<-------------------------------------<<
PRJobProcessingComplete.Req(JobID=PM1Job1
, TimeStamp,Status=OK)
Data collection is then disabled.
CC PM1
>>------------------------------------->>
Set.Req(EREvent,EventID=Event1,
Enabled=FALSE)
CC PM1
<<-------------------------------------<<
Set.Rsp(EREvent,EventID=Event1,Status=OK)
9. PM1 to PM2 TRANSFER JOB SETUP
The CC informs the TM that a wafer transfer is required
from the PM1 to PM2.
CC TM
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",
TRSourceAmID="PM1",
TRDestinationAmID="PM2")
The transport module assigns an identifier for this
particular transfer job. The transfer job is then started
by the transport module.
CC TM
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=TMJob2,Status= OK)
CC TM
<<-------------------------------------<<
TRJobStarted.Req(JobID=TMJob2, TimeStamp)