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SEMI S17-0701 © SEMI 2001 7 13.1.2 Malfunction Alar m — In the ev e n t of a malfunction, the UTV should both light a lamp(s) and generate an alarm soun d to alert personn el. NOTE 10: M alfunctio n alarms typically requ…

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SEMI S17-0701 © SEMI 2001 6
11 Material Protection
11.1 Material Protection for both Floor Traveling and
Space-Traveling Vehicles — UTVs should provide for
protection of the load when the UTV is traveling and
during load/unload operations until safe transfer has
been confirmed. UTV’s should have an appropriate
communication interface (For example SEMI standards
such as SEMI E23 or SEMI E84). The UTV system
supplier should document the exact method of
confirmation.
11.1.1 UTVs should be designed so a single point of
failure of the UTV system does not allow a load to fall.
11.1.2 Vehicles should be designed to prevent any
load/unload movement when in traveling mode.
11.1.3 UTV load holding mechanisms should have
load-shift prevention mechanism (such as stoppers), so
that if the vehicle stops suddenly, the load is securely
held in place.
11.2 Material Protection for Floor-Traveling Vehicles
— In addition to the load protection provisions in
Section 11.1, the following should also be provided on
floor-traveling vehicles.
11.2.1 The floor-traveling vehicle should be designed
to prevent loads from being placed on the vehicle so
that the load overhangs any edge (length or width) of
the vehicle.
11.3 Material Protection for Space-Traveling Vehicles
— In addition to the load protection provisions in
Section 11.1, the following should also be provided on
space-traveling vehicles:
11.3.1 If secondary protection is required to meet
Section 11.1.2 or to prevent loads from falling, covers
or shields should be provided along rails to protect
personnel from injury from falling loads.
11.3.2 Inadvertent lowering or uncontrolled drops of
the vehicles’ hoist mechanisms or loads should also be
prevented.
12 Load/Unload Operation
12.1 Protection from Load/Unload Motion of both
Floor-Traveling and Space-Traveling Vehicles —
UTVs should have protection functions during
load/unload operation to insure safety of the vehicle,
the load and the equipment, until load/unload is
completed.
12.1.1 Safety of personnel entering the load/unload
area should be provided by a method agreed upon by
the UTV supplier and the user.
12.1.2 UTVs should have an appropriate
communication interface in order to provide the
following functions. Examples for such interfaces are
SEMI E84 or E23
.
• confirm safe transfer of a load
• prevent transfer of loads prior to load port
readiness
• notify affected factory personnel of abnormal
load/unload conditions
• prevent transfer of loads when equipment is in
manual delivery mode (PGV mode)
• prevent transfer of loads when equipment is at risk.
12.1.3 The UTV system supplier should provide to the
end user customer documentation to ensure the UTV
system interfaces properly with manufacturing
equipment shields (if required), communications
protocols, or other method necessary to prevent transfer
of loads when equipment is at risk.
12.2 Protection from Load/Unload Motion of Floor-
Traveling Vehicles — In addition to the load/unload
provisions in Section 12.1, the following should also be
provided on floor-traveling vehicles:
12.2.1 Load/unload mechanisms (transfer robots) on
floor-based vehicles should be isolated or shielded as
necessary to restrict contact with factory personnel.
Measures should also be taken to prevent inadvertent
motion of load/unload mechanisms.
12.2.2 If robotic manipulators are used on floor-
traveling vehicles for load/unload operations, the
robotic manipulator should meet requirements of the
appropriate international or national standard (e.g.,
ISO 10218, EN775, or ANSI/RIA 15.06). If there are
deviations from these general industry standards
because of unique semiconductor applications, these
deviations should be documented by the evaluator and
assigned a risk factor according to a risk assessment.
13 Hazard Indicators
NOTE 9: The integrated design of any hazard indicator
system or other safety system requires a coordinated effort
among the UTV system supplier, the process equipment
supplier, and the end user customer. The following are the
minimum hazard indicators to be designed into UTV system
equipment.
13.1 Hazard Alarms and Lamps for both Floor-
Traveling and Space-Traveling Vehicles — The
following indicators should be provided on all UTVs,
but should be able to be configured to be compatible
with the overall factory design for safety.
13.1.1 UTV suppliers should provide documentation
of available configurations.
SEMI S17-0701 © SEMI 20017
13.1.2 Malfunction Alarm — In the event of a
malfunction, the UTV should both light a lamp(s) and
generate an alarm sound to alert personnel.
NOTE 10: Malfunction alarms typically require the system to
be reset by a human operation.
13.1.3 Manual Operation Indicator — The UTV
should indicate if it is under manual operation, defined
as any control of a vehicle outside of automated
operation.
13.1.4 Sensor Disabled Lamp — The UTV should
light a lamp(s) to indicate when the non-contact
approach sensing device is disabled (for example,
because the UTV is negotiating a sharp turn).
13.2 Hazard Alarms and Lamps for Floor-Traveling
Vehicles — In addition to the indicators in Section 13.1,
the following indicators should also be provided on
floor-traveling vehicles:
13.2.1 Startup Alarm — When a floor-traveling
vehicle restarts after stopping for 5 seconds or more, the
vehicle should set off an audible alarm sound at least
one second before it begins to move.
13.2.2 Traveling Alarm — When the floor-traveling
vehicle is traveling, the vehicle should generate audible
alarm sounds either continuously or intermittently as
appropriate for the area in which the vehicle is
operating.
13.2.3 Turn Signal Lamps — To indicate a floor-
traveling vehicle is preparing to turn/spin-turn (right or
left) and during the turn cycle, the vehicle should light
turn signal lamp(s). Turn signal lamps should be
clearly visible from the side in the direction of the turn.
13.2.4 Automated Operation Indicator — The floor-
traveling vehicle should light lamp(s) to indicate it is in
automated operation.
13.3 Hazard Alarms and Lights for Space-Traveling
Vehicles — In addition to the indicators in Section 13.1,
the following indicator should also be provided on
space-traveling vehicles.
13.3.1 Hoist Alarm — The space-traveling vehicle
and/or hoist should generate audible alarm sounds
indicating that the hoisting mechanism is moving
(raising or lowering).
NOTE 11: The same audible alarm device can be used to
generate startup, traveling, hoist, or malfunction alarms,
provided that different sounds are used to indicate each
condition.
13.4 Visual Hazard Alerts for both Floor-Traveling
and Space-Traveling Vehicle Areas — To assure
personnel safety in the UTV operation area, information
about the recommended system of safety measures
should be provided by the UTV system supplier
(including items such as alerts, signs, color coding, and
safety poles for the vehicle operating area).
13.4.1 The UTV system supplier should provide
information about style and placement of road signs, for
posting along floor traveling vehicle paths and at
load/unload or maintenance stations.
NOTE 12: End user customers may need to provide additional
visual hazard alerts for posting on building structures (such as
walls, columns, and doors) and/or equipment surrounding the
UTV operation area.
13.5 Visual Hazard Alerts on Floor-Traveling
Vehicles — In addition to the information about
operational area visual hazard alerts (noted in Section
13.4), the floor-traveling vehicle supplier should
provide all visual hazard alerts required for the floor-
traveling vehicle. These visual hazard alerts should be
clearly visible from all sides of the UTV.
13.6 Visual Hazard Alerts for Space-Traveling
Vehicles — In addition to the operational area visual
hazard alerts noted in Section 13.4, the following visual
hazard alerts should also be provided by space-traveling
vehicle suppliers.
13.6.1 The UTV system supplier should provide
marking of maintenance station areas and their hazards,
as well as a method of marking the floor location where
maintenance descent occurs.
NOTE 13: End user customers may need to mark load/unload
stations to identify the existence of the hazard. UTV system
suppliers should suggest a method of marking these areas.
14 Hazardous Materials
14.1 Batteries for Floor-Traveling and Space-
Traveling Vehicles — If the UTV requires the use of
batteries, the following should be included in the
documentation provided by the UTV supplier.
14.1.1 Specifications provided by the UTV system
supplier for battery recharging, battery maintenance and
battery storage areas should specify the following. This
provision can be waived only if the batteries used are
sealed with no possibility of gas emission.
• Requirements for eye-washing equipment.
• Requirements for ventilation.
• Restrictions on smoking and other sources of
ignition.
• Personnel splash protection requirements during
electrolyte handling.
14.1.2 The UTV system supplier should provide
disposal requirements for batteries that constitute
SEMI S17-0701 © SEMI 2001 8
hazardous waste (such as lead, nickel cadmium or
lithium).
NOTE 14: Disposal requirements should comply with
national or local codes, regulations, and laws.
NOTE 15: Per SEMI S2 environmental guidelines, the UTV
system supplier should provide information on the nature,
volume, and risks of potential hazardous waste (such as lead
or lithium).
NOTE 16: Battery charging stations may have to meet
international, national, or local regulations (such as EU
Directives or U. S. Department of Labor, Occupational,
Safety and Health Act Regulations).
14.2 Spill Prevention for Floor-Traveling and Space-
Traveling Vehicles — If the UTV requires the use of
lubricants, the UTV supplier should meet the following
spill and slip hazard provisions.
14.2.1 Any UTV with an internal oil-reservoir (such as
a gearbox) should be structurally designed to prevent
any oil from dripping out of the vehicle.
14.2.2 Space-traveling vehicle track lubricants should
be restricted to those lubricant types and quantities that
will not drip from the vehicle or create a slip hazard.
14.2.3 Rail guided vehicle or track lubricants should
be restricted to those lubricant types and quantities that
will not drip (e.g., onto sub-Fab floors). Neither should
they create a slip hazard on the walking surfaces beside
the rail or on the top of the rail itself.
15 Related Documents
15.1 SEMI Standards
SEMI E33 — Specification for Semiconductor
Manufacturing Facility Electromagnetic Compatibility
SEMI E64 Provisional Specification for 300-mm
Cart to SEMI E15.1 Docking Interface Port
SEMI S1 — Safety Guideline for Visual Hazard Alerts
15.2 ANSI Standard
3
ANSI/ASME B56.5 — Safety Standard for Guided
Industrial Vehicles and Automated Functions of
Manned Industrial Vehicles
15.3 CEN Standards
4
EN 1525 — Safety of Industrial Trucks – Driverless
Trucks and their Systems
3 American National Standards Institute, 11 West 42nd St., 13th
Floor, New York, NY 10036
4 European Committee For Standardization, 36, rue de Stassart, B-
1050 Brussels, Belgium
15.4 U.S. Government Regulations
5
29 CFR 1910 — U. S. Department of Labor,
Occupational, Safety and Health Act Regulations
15.5 JIS Standards
6
JIS D 6801 — Glossary of Terms Relating to
Automatic Guided Vehicle Systems
JIS D 6802 — General Rules on the Safety of
Automatic Guided Vehicle Systems
JIS D 6803 — General Rules on the Design of
Automatic Guided Vehicles
JIS D 6804 — General Rules on the Design of
Automatic Guided Vehicle Systems
JIS D 6805 — Testing Method of Characteristics and
Functions of Automatic Guided Vehicles
15.6 VDI Standards
7
VDI 2510 — Automated Guided Vehicle Systems
(AGVS)
VDI-3643 — Self-Powered Trolley System – Load
500kg
NOTICE: SEMI makes no warranties or
representations as to the suitability of the guideline set
forth herein for any particular application. The
determination of the suitability of the guideline is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. This
guideline is subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
5 Code of Federal Regulations, Superintendent of Documents, U.S.
Government Printing Office, Washington, D.C. 20402
6 Japanese Industrial Standards available in Japanese language only
through Japanese Standards Association, 1-24, Akasaka 4-chome,
Minato-ku, Tokyo, Japan 107-8440
7 Verein Deutscher Ingenieure (VDI), Postfach 101139, D-40002
Düsseldorf, Germany