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SEMI E36.1-0704 © SEMI 2004 6 5.12.2.3.5 EquipmentTe mplate — A pre-designed, pr e-cut guide to ai d in determining space requirements (footpri nt) for the s p ecified se miconductor manufacturi ng equipm ent. 5.12.2.3.6…

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5.9 Element Name — Component
5.9.1 Element Description — The Component element represents a physical or logical part of semiconductor
manufacturing equipment. The content of a Component element is not interpreted.
5.9.2 Metadata — In addition to the metadata available from the E36Item tag, the Component element supports the
following additional metadata, all in the e36base namespace:
5.9.2.1 SupplierPartNumber — Contains a supplier-defined part number for an identified system or component on
specific semiconductor manufacturing equipment.
5.9.2.2 OEMPartNumber — Original Equipment Manufacturer Part number system or component on a
semiconductor manufacturing equipment set.
5.9.2.3 PartName — Contains the Supplier designated part name for a system or component on specific
semiconductor manufacturing equipment set.
5.9.2.4 OEMName — Original Equipment Manufacturer Company Name for an identified system or component on
a specific semiconductor manufacturing equipment set.
5.10 Element Name — Narrative
5.10.1 Element Description — The Narrative element represents arbitrary content related to the specific
semiconductor manufacturing equipment. The content of a Narrative element is interpreted as text and graphics.
5.10.2 Metadata — None.
5.11 Element Name — ErrorCode
5.11.1 Element Description — The ErrorCode element represents an equipment-generated error code on a specific
equipment set. The content of an ErrorCode is interpreted as text describing the error code. This text should be
applicable to the context of the end-user.
5.11.2 Metadata — In addition to the metadata available from the E36Item tag, the ErrorCode element supports the
following additional metadata, all in the e36base namespace:
5.11.2.1 ErrorNumber — An alphanumeric string defined by the supplier to identify the error on a specific
semiconductor manufacturing equipment set.
5.12 Element Name — Media
5.12.1 Element Description — The Media element represents a generic linked media resource. The content of a
Media element is not interpreted.
5.12.2 Metadata — In addition to the metadata available from the E36Item tag, the Media element supports the
following additional metadata, all in the e36base namespace:
5.12.2.1 MediaURL — A well-formed URL describing the location of the file containing the media element data.
5.12.2.2 Caption — A short description of the information contained in the media element, suitable for presentation
to the end user.
5.12.2.3 MediaCategory — Captures the basic purpose of the media element.
5.12.2.3.1 ElectricalSchematic — A schematic diagram representing electrical application, theory, and/or process
for the specified semiconductor manufacturing equipment.
5.12.2.3.2 MechanicalDrawing — A drawing or diagram showing the mechanical structure of a part, number of
associated parts, assembly of parts and/or associated parts for the specified semiconductor manufacturing equipment
or represent of this equipment in part or in its entirety.
5.12.2.3.3 PlumbingSchematic — A schematic diagram representing Gas/Pneumatic/Vacuum/Hydraulic
application, theory, and/or process for the specified semiconductor manufacturing equipment.
5.12.2.3.4 FacilityLayout — A diagram noting specific installation requirements (space, electrical, plumbing,
environmental) for the specified semiconductor manufacturing equipment.
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5.12.2.3.5 EquipmentTemplate — A pre-designed, pre-cut guide to aid in determining space requirements
(footprint) for the specified semiconductor manufacturing equipment.
5.12.2.3.6 PartLocator — Actual assembly or component part location and number for the specified semiconductor
manufacturing equipment.
5.12.2.3.7 FlowChart — Instructional steps included in operations and maintenance or troubleshooting on a specific
semiconductor manufacturing equipment set.
5.12.2.3.8 ProcessChart — Characterization data for the process on a specific semiconductor manufacturing
equipment set.
5.12.2.3.9 Diagram — To include block and engineering diagrams for the specified semiconductor manufacturing
equipment.
5.12.2.3.10 ScreenCapture — Includes the duplication of a displayed computer screen saved to a file.
5.12.2.3.11 Photograph — Includes any image bearing the likeness of an object obtained by photographic capture
of that object.
5.13 Element Name — SafetyItem
5.13.1 Element Description — The SafetyItem element represents an item of safety related information per SEMI
S13-0298, SEMI S2, ANSI Z400.1, ANSI/RIA R15.06, CDRH-21, CE Mark Machinery Directive, EN/IEC 60204,
or NFPA 79-1997. The content of the SafetyItem element is the expression of the information.
5.13.2 Metadata — None.
5.14 Element Name — Company
5.14.1 Element Description — The Company element defines a company, as a legal entity, within the context of the
SEMI E36 specification. The content of a Company element will be interpreted as a description of the referenced
company that manufactures the specific semiconductor manufacturing equipment.
5.14.2 Metadata — In addition to the metadata available from the E36Item tag, the Company element supports the
following additional metadata, all in the e36base namespace:
5.14.2.1 CompanyName — String name of referenced company. (mandatory)
5.14.2.2 CompanyURL — URL to homepage of referenced company. (mandatory)
5.15 Element Name — Publisher
5.15.1 Description — The Publisher element specifies the business unit within a company that represents ownership
of the content for specific semiconductor manufacturing equipment set. The content of a Publisher element can be
interpreted as a description of the referenced business unit.
5.15.2 Metadata — In addition to the metadata available from the E36Item tag, the Publisher element supports the
following additional metadata, all in the e36base namespace:
5.15.2.1 BusinessUnit — Supplier-defined string name of referenced business unit plus referenced company.
5.15.2.2 BusinessUnitURL — URL to homepage of appropriate business unit within referenced company.
6 Requirements
6.1 The standard was segmented into two levels for the following reasons. First, organizing the work into these
segments makes each segment more coherent. Next, layering the segments provides a flexible means for adopting
the standard incrementally.
6.1.1 The metadata depends on the identity layer. The internal structure layer implies the identity layer.
6.2 Identifiers The use of identifiers is critical in the design. Each of the levels requires them to function. The
reason is that being able to unambiguously identify an item independently of the item itself enables elegant solutions
to many problems:
• Item Versioning
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• Item Security
• Item Lookup
• Distributed Metadata
• Efficient Distribution
6.3 Externalizing Information Many XML initiatives focus on rigorously defining rich structure for Elements.
The current approach has been the opposite, to externalize as much structure as possible.
6.3.1 This approach is to promote flexibility and simplicity. The objective was to provide a small set of powerful
modeling primitives from which richer models may be built. Providing a mechanism for distributing related
information among different locations allows systems to capitalize on this property for economic efficiency. The
metadata model allows content to be stored in some sort of native XML format, while associated metadata is
maintained in a relational database system. This creates more options for users.
6.4 Utilizing RDF as the Basis for Metadata Level 2 type and metadata is based on the existing XML standard
for metadata called the Resource Description Framework (RDF). RDF provides a very simple, but very powerful
model of information that is easy to understand and process. RDF allows flexible extension of the metadata standard
without having to modify existing schema definitions. This will allow users to incorporate future key learnings into
the standard.
6.5 Tag and Attribute Selection A large number of tags and attributes were considered for possible inclusion in
the standard. In making decisions about which of the many possibilities to choose as the basis of this work, several
factors were considered. First representative users of the information were interviewed to identify concepts and
relationships that they considered to be important and valuable. Tags resulting from this work were given high
priority relative to tags that derived from other sources. Next, semantic or conceptual tags were favored over tags
derived from structural or physical properties of the service documents. Finally, tags determined to have broad
utility were chosen in favor of tags considered useful in only a limited context.
6.5.1 Once a reasonable set of tags were selected for inclusion, a set of attributes was produced for those tags. The
basic approach was to determine an attribute set that was necessary and sufficient for making the information
captured by the tags economical to produce and beneficial to end users.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.