semi合集-English.pdf - 第191页

SEMI E23-1104 © SEMI 1991, 2004 9 RELATED INFORMATION 2 APPLICATION EXAMPLES OF INTERFACING NOTICE: This application example of interfacing is not an official part of this docum ent and is not intended to modify or super…

SEMI E23-1104 © SEMI 1991, 2004 8

RELATED INFORMATION 1

EXAMPLE OF A CASSETTE TRANSFER TRANSACTION USING THE

PARALLEL I/O INTERFACE

NOTICE: This example of a cassette transfer transaction using the parallel I/O interface is not an official part of this document

and is not intended to modify or supercede the official standard. Determination of the suitability of the material is solely the

responsibility of the user.

Figure R1-1

Example of a Cassette Transfer Transaction Using the Parallel I/O Interface

R1-1 NOTES

R1-1.1 LD = load, ULD = unload.

R1-1.2 The load/unload request (Smm, Fnn) may be eliminated if the material transfer request (Smm, Fnn) issued

after the materials have been prepared on the specified port for unloading or specified port has been readied for

R1-1.3 Multiple PIO handshakings may be required if material transfer request message (Smm, Fnn) has multiple

MID’s and PIN’s for multiple material transfers. MID: Material ID, PIN: Port number.

R1-1.4 The dotted line means optional message.

R1-1.5 In the future, the appropriate specific SECS-II message may be assigned for above Smm, Fnn message,

respectively.

SEMI E23-1104 © SEMI 1991, 2004 9

RELATED INFORMATION 2

APPLICATION EXAMPLES OF INTERFACING

NOTICE: This application example of interfacing is not an official part of this document and is not intended to modify or

supercede the official standard. Determination of the suitability of the material is solely the responsibility of the user.

R2-1

R2-1.1 Figure R2-1 shows some application examples for the wire-connected parallel I/O interface. One set of

connectors is provided for the CS’s that commonly input the BUSY and COMPT signals.

Figure R2-1

Application Example of the Wire-Connected Parallel I/O Interface

R2-2

R2-2.1 Figure R2-2 shows some application examples for the photo-coupled parallel I/O interface. One connector is

provided for the CS’s to or from which the robot vehicle transfers a cassette at the same stopping position.

Figure R2-2

Application Example of the Photo-Coupled I/O Interface