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SEMI E54.6-0997 © SEMI 1997, 2004 1 SEMI E54.6-0997 (Withdrawn 0704) STANDARD FOR SENSOR /ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS NOTE: This document was previously designated SEMI E61. Because this do cument is par…
SEMI E54.5-0997 © SEMI 1997, 2004 10
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SEMI E54.6-0997 © SEMI 1997, 2004 1
SEMI E54.6-0997 (Withdrawn 0704)
STANDARD FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR LONWORKS
NOTE: This document was previously designated SEMI E61. Because this document is part of a suite of documents, its
designation has been reassigned for ease of reference. Please note that the technical content of this document is unchanged from
the 0697 version.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Purpose
This standard defines a communication specification
based on the LonWorks technology specification to
enable communications between intelligent devices on
a sensor/actuator network (SAN) that operate according
to SEMI-specified device models (common and device
specific) in a semiconductor manufacturing tool.
This document specifies a mapping of the SEMI
common device model (CDM) onto LonWorks
technology using the LonMark Interoperability
Guidelines established for LonWorks devices. The
LonMark Interoperability Association may incorporate
into the Interoperability Guidelines any enhancements
presented in this document.
1.1 Background and Motivation — The LonWorks
communications system provides interconnection of
smart control devices such as sensors, actuators, and
controllers in a fast-response time, low-cost network for
industrial use. LonWorks enables multiple devices to
share a single network, thereby significantly reducing
the point-to-point wiring between controllers, sensors,
and actuators. The LonWorks network communications
standard (NCS) is based on the seven-layer LonTalk
Protocol, implemented by the Neuron Chip, a physical
layer transceiver, and an optional host processor. The
LonTalk Protocol was developed by Echelon and may
be freely licensed for implementation on any hardware
platform. The SEMI NCS for LonWorks is based on the
LonMark interoperability guidelines, which provide a
framework for interoperable use of the LonTalk
Protocol at layers 1-6, as well as at the application
layer. Where the LonMark interoperability guidelines
do not provide the functionality required by the SEMI
CDM, the guidelines are extended with SEMI-specific
requirements.
2 Scope
This document specifies a SAN communications
standard, based on the LonWorks specification, that
enables communication with SAN devices configured
according to the SEMI SAN Common Device Model
and appropriate Specific Device Model (SDM)
specifications.
2.1 This document specifies the use of LonWorks
technology for services that compliant intelligent
devices must support in order to exchange information
over this semiconductor equipment sensor/actuator
network.
2.2 This document specifies the utilization of
LonWorks technology to present externally visible
device structure and behavior, specified in the CDM
and appropriate SDMs, on a LonWorks network.
2.3 This document is used in conjunction with a SEMI
standard SAN Common Device Model specification
and one or more SEMI standard Specific Device Model
specifications (e.g., for a mass flow controller).
Together, the model documents describe the externally
visible data structures and behavior of devices using
LonWorks technology in a SEMI-compliant SAN
system.
2.4 This standard, together with a sensor/actuator
network interoperability guideline, the sensor/actuator
network common device model, one or more sensor/
actuator network specific device model documents, the
LonTalk protocol specification, and the LonMark
interoperability guidelines, specifies requirements for
SEMI SAN implementations based on LonWorks
technology. The general sensor/actuator network
document architecture is shown in the Sensor/Actuator
Network Common Device Model document in Figure 1.
SEMI E54.6-0997 © SEMI 1997, 2004 2
Figure 1
Sensor/Actuator Network Related Documents
2.5 Document Structure — The LonWorks network
communications standard complies with the SEMI SAN
NCS template document structure; this structure is
shown in Figure 2. The standard document is composed
of two main parts. The first part (Sections 1 through 8)
specifies the SAN-enabling protocol as well as the
presentation (i.e., mapping) of CDM object structure
and behavior onto the network (referred to as the
“CDM mapping”). The second part (Section 9)
specifies the presentation (i.e., mapping) of SDM object
structure and behavior onto the network for each SEMI-
specified SDM (referred to as the “SDM mapping”).
Device-type-specific items, such as connector devia-
tions (see Section 6.1), may also be noted in Section 9.
This
Document
SDS NCS
Device Net NCS
Common
Device Model
Mapping
Specific Device Model
Mappings
Mass Flow Controller
Particle Counter
Residual Gas Analyzer
LonWorks NCS
Other NCS
Standards
Figure 2
LonWorks Network Communications Standard
Document Structure
3 Limitations
3.1 This document specifies a semiconductor
equipment SAN based solely on LonWorks and is a
companion document to the LonWorks protocol
specification; thus, a complete specification of this
standard necessarily includes the LonWorks
specifications. There are other semiconductor
equipment SAN communications options. The
specifications for these options are not included here.
3.2 This standard specifies enhancements that provide
additional capabilities over and above those currently
required by the LonMark Interoperability Guidelines.
In order to avoid document consistency problems,
information in the LonWorks technology standard that
relates to this standard is not repeated in this document.
This document is limited to describing enhancements or
limitations of LonWorks technology and the LonMark
interoperability guidelines that are imposed by this
standard.
3.3 A complete specification of the conformance
testing procedure shall include the applicable LonMark
interoperability conformance testing specification.
Conformance testing shall include enhancements to the
LonMark guidelines required by this standard.