semi合集-English.pdf - 第2827页

SEMI E102-0600 © SEMI 2000 35 R1-2.3 Scenario T hree — Base Scenario for Batch Delivery from Stocker to Production Equipment 16: Transfe r Command to stk7 (ca rrier aaa, src s helf, de st stk7/Bay_Ou t) (Stocker SE M) 2:…

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SEMI E102-0600 © SEMI 2000 34
27: Transfer Command to Stk.4 (carrier bbb, src Stk.4/Bay_In, dest. Stk.4/Bay_outf) (StockerSEM)
28: Transfer Command Updates from Stk. 4 (StockerSEM)
29: Transfer Command Complete (StockerSEM)
30: Transfer Command to Ohs2 (carrier bbb, src. Stk. 4/Bay_Out, dest. Stk. 7/Bay_In)(IBSEM)
31: Transfer Command Updates from Ohs2 (IBSEM)
34: Transfer Command Complete (IBSEM)
37: Transfer Command to Stk. 7 (carrier bbb, src. Stk. 7/Bay_in, dest. shelf) (StockerSEM)
38: Transfer Command Updates from Stk. 7 (StockerSEM)
39: Transfer Command Complete(IBSEM)
32: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
35: setMaterialTrackingLocation(MaterialTrackingLocation Stk.7)
43: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
33: DurableLocationChangedEvent
36: DurableLocationChangedEvent
41: MaterialContainerStateChangedEvent
40: makeStored()
42: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
44: removeFinishedJob(TrJob1)
45: JobStateChangedEvent(..previousState JobCompleted, NewState JobUndefined)
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
Figure R1-5
Scenario Case 2 (continued)
SEMI E102-0600 © SEMI 200035
R1-2.3 Scenario Three — Base Scenario for Batch Delivery from Stocker to Production Equipment
16: Transfer Command to stk7 (carrier aaa, src shelf, dest stk7/Bay_Out) (Stocker SEM)
2: requestBatchTransportJob(JobType Transport, Priority 1, Deadline time1, Container aaa, DestinationMachine eq3, DestinationPort Eq3/port1,
JobType Transport, Priority 1, Deadline time1, Container bbb, DestinationMachine eq3, DestinationPort Eq3/port2,
aJobRequestor factory)
3: Return Job Handles TrJob1, TrJob2
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
12: informJobStateChange(Job TrJob2, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
13: makeInTransit()
8: MaterialContainerStateChangedEvent
14: MaterialContainerStateChangedEvent
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route (Internal Service)
17: Transfer Command Updates (Stocker SEM)
18: Transfer Command Complete (Stocker SEM)
19: Transfer Command to Ohs2 (carrier aaa, src stk7/Bay_Out, dest stk8/Bay_In) (IBSEM)
20: Transfer Command Updates (IBSEM)
21: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
23: Transfer Command Complete (IBSEM)
24: setMaterialTrackingLocation(MaterialTrackingLocation stk8)
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route (Internal Service)
26: Transfer Command to stk7 (carrier bbb, src shelf, dest stk7/Bay_Out) (Stocker SEM)
27: Transfer Command Updates (Stocker SEM)
28: Transfer Command Complete (Stocker SEM)
29: Transfer Command to Ohs2 (carrier bbb, src stk7/bay_Out, dest stk8/Bay_In) (IBSEM)
30: Transfer Command Updates (IBSEM)
`
31: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
22: DurableLocationChangedEvent
25: DurableLocationChangedEvent
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
1: setUnit(unitvalue)
11: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
15: getUnit()
10: JobStateChangedEvent(..previousState JobUndefined, newState JobExecuting)
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-6
Scenario Case 3
SEMI E102-0600 © SEMI 2000 36
33: Transfer Command Complete (IBSEM)
34: setMaterialTrackingLocation(MaterialTrackingLocation stk8)
32: DurableLocationChangedEvent
35: DurableLocationChangedEvent
36: Transfer Command to stk8 (carrier aaa, src stk8/Bay_In, dest shelf) (Stocker SEM)
37: Transfer Command Updates (Stocker SEM)
38: Transfer Command Complete (Stocker SEM)
39: Transfer Command to stk8 (carrier bbb, src stk8/Bay_In, dest shelf) (Stocker SEM)
40: Transfer Command Updates (Stocker SEM)
41: Transfer Command Complete (Stocker SEM)
42: Transfer Command to stk8 (carrier aaa, src shelf, dest stk8/agt-port) (Stocker SEM)
43: Transfer Command Updates (Stocker SEM)
44: Transfer Command Complete (Stocker SEM)
45: Transfer Command to stk8 (carrier bbb, src shelf, dest stk8/agt-port) (Stocker SEM)
46: Transfer Command Updates (Stocker SEM)
47: Transfer Command Complete (Stocker SEM)
48: Transfer Command to agt2(carrier aaa, src stk8/agt-port, dest eq3/port1, carrier bbb, src stk8/agt-port, dest eq3/port2) (IBSEM)
49: Transfer Command Updates (IBSEM)
50: setMaterialTrackingLocation(MaterialTrackingLocation agt2)
51: DurableLocationChangedEvent
52: setMaterialTrackingLocation(aMaterialTrackingLocation agt2)
53: DurableLocationChangedEvent
54: Transfer Command Complete (IBSEM)
55: setMaterialTrackingLocation(MaterialTrackingLocation eq3)
56: DurableLocationChangedEvent
57: setMaterialTrackingLocation(MaterialTrackingLocation eq3)
58: DurableLocationChangedEvent
59: makeProcessing()
60: MaterialContainerStateChangedEvent
61: makeProcessing()
62: MaterialContainerStateChangedEvent
63: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
64: informJobStateChange(aJob TrJob1, previousState JobExecuting, newState JobCompleted)
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-7
Scenario Case 3 (continued)