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SEMI E73-0301 © SEMI 1998 , 2001 6 Tool DRP DC Volt age DC Volt age DC Volt age (+) (-) (+) (-) (+) (-) a ) Tool DRP Tool DRP b ) c ) Figure 5 Schematic Exa mple of DRP Output Signal s 6.3 Incom ing Pow er Supply 6.3.1 T…

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SEMI E73-0301 © SEMI 1998, 20015
DC Voltage
DC Voltage
ToolDRP
(+)
(-)
(+)
(-)
DRP Tool
b
)
a
)
Figure 4
Schematic Example of DRP Input Signals
SEMI E73-0301 © SEMI 1998, 2001 6
ToolDRP
DC Voltage
DC Voltage
DC Voltage
(+)
(-)
(+)
(-)
(+)
(-)
a
)
ToolDRP
ToolDRP
b
)
c
)
Figure 5
Schematic Example of DRP Output Signals
6.3 Incoming Power Supply
6.3.1 Tables 7 and 8 specify the required DRP incoming AC power supply connector and pin assignments.
Table 7 Incoming AC Power Supply Connector (Pump Side)
No. Items Connector Type Referenced Standard Pin Assignments Remarks
1 Three phase:
200V
AC
− 230V
AC
± 10%
50/60 Hz
Receptacle (male) SEMI S2 See Table 8
SEMI E73-0301 © SEMI 1998, 20017
Table 8 Pin Assignment for Incoming Power Supply Connector
No. Pin No. Item Remarks
11 or A R AC U
2 2 or B S 3 phase V
33 or C T W
4maximum or last
pin number in the
connector
Earth/Ground When using a connector that has a special grounding pin
not included in the standard pin arrangement, the last pin
becomes a blank pin. (See Related Documents for an
example of specification for this connector.)
7 Related Documents
NOTE 2: As listed or revised, all documents cited shall be the latest publications of adopted standards.
7.1 DIN Standard
2
DIN VDE 0627 — Connectors and plug-and socket devices; for rated voltages up to 1000 V a.c., up to 1200 V d.c.
and rated currents up to 500 A for each pole
7.2
Military Standard
3
MIL-PRF-24308 — General Specification for Connectors, Electric, Rectangular, Non-Environmental, Miniature,
Polarized Shell, Rack and Panel
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
2 Deutsches Institut für Normung e.V., Beuth Verlag GmbH Burggrafenstrasse 4-10, D-10787 Berlin, Germany
3 Military Standards, Naval Publication and Form Center, 5801 Tabor Avenue, Philadelphia, PA 19120