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SEMI E51-0200 © SEMI 1995 , 2000 10 NOTICE: SEMI makes no warr antie s or representations as to the suitabili ty of the guides set forth herein for any particular application. The determination of the suitability of the …

SEMI E51-0200 © SEMI 1995, 20009

Exhaust Temp. Supply Filtration

(absolute)

Specification POC Material POC Fitting Notes

Heat/General

Solvent

Vacuum Pump

Acid

Electrical Services

Applicable Code

Supply Voltage, Nominal

Supply Voltage Range

EMI Noise

ESD Ambient

Ground Currents

Computer Interfaces

Electrical Interface

UPS

Site-Specific Notes:

Freight Elevator:

Height/Width/Depth

Load Rating

Bldg./Fab Restrictions:

Cleanroom Parameters

Noise Level

Ceiling Heights

Max. Clearances in Support Areas

Other:

8 Related Documents

8.1 SEMI Standards

SEMI E4 — SEMI Equipment Communications

Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

SEMI E37 — High-Speed SECS Message Services

(HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services

Single-Session Mode (HSMS-SS)

SEMI E37.2 — High-Speed SECS Message Services

General Session (HSMS-GS)

SEMI E76 — Guide for 300 mm Process Equipment

Points of Connection to Facility Services

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S6 — Safety Guideline for Ventilation

SEMI E51-0200 © SEMI 1995, 2000 10

NOTICE: SEMI makes no warranties or

representations as to the suitability of the guides set

forth herein for any particular application. The

determination of the suitability of the guide is solely the

responsibility of the user. Users are cautioned to refer to

manufacturer’s instructions, product labels, product

data sheets, and other relevant literature respecting any

materials mentioned herein. These guides are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this guide may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this guide, SEMI takes

no position respecting the validity of any patent rights

or copyrights asserted in connection with any item

mentioned in this guide. Users of this guide are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E52-0703 © SEMI 1995, 2003 1

SEMI E52-0703

PRACTICE FOR REFERENCING GASES AND GAS MIXTURES USED

IN DIGITAL MASS FLOW CONTROLLERS

This practice was technically approved by the Global Gases Committee and is the direct responsibility of the

North American Gases Committee. Current edition approved by the North American Regional Standard

Committee on April 11, 2003. Initially available at www.semi.org May 2003; to be published July 2003.

Originally published in 1995; previously published March 2002.

NOTICE: This document was completely rewritten in

2003.

1 Purpose

1.1 To provide a numerical index of gases and gas

mixtures used in the semiconductor industry that will

give an ordered reference for the gases and gas

mixtures when used in mass flow devices. This index or

list will facilitate the production and use of digital mass

flow devices.

2 Scope

2.1 The list includes gases, gas mixtures, and

vaporizable materials that can be used in mass flow

devices. The list will supplement, not replace, existing

DOT/OSHA or other identification systems. For ease of

use, the list is presented sorted by gas code, gas name,

and symbol for gases and vaporizable materials and by

code and mixture percentage for gas mixtures.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability of regulatory or other limitations prior to

use.

3 Limitations

3.1 This list does not provide information related to the

safe use and intended application of listed materials.

4 Referenced Standards

4.1 NIST Standard

NIST AD732-043 — JANAF Thermochemical Tables,

2nd Edition

4.2 Miscellaneous Publications

Dangerous Properties of Industrial Materials, 5th

1 National Institute of Standards and Technology, 100 Bureau Drive,

Stop 3460, Gaithersburg, MD 20899-3460, USA. Telephone:

301.975.6478, Website: www.nist.gov

2 CRC Press LLC, (Headquarters) 2000 Corporate Blvd., NW, Boca

Raton, FL 33431, 561.994.0555

The Merck Manual Index, 6th Edition

4.3 Data Sheets

American Cyanamid Data Sheet

DuPont Data Sheet

Schumacher Material Safety Data Sheet, No. R&D 49.3

JN, Revision Date 1/95

Schumacher Product Data Sheet, No. 23, Revision 3

4.4 Handbooks

Chemical Engineers’ Handbook, 5th Edition

CRC Handbook of Chemistry and Physics, 75th

4.5 Other Standard

Nomenclature of Organic Chemistry, authored by

International Union of Pure and Applied Chemistry

3 Litton Publishing

4 Matheson Gas Products, Inc., 959 Route 46 East, P.O. Box 624,

Parsippany, NJ 07054, 973.257.1100

5 This publication is available from Franklin Electronic Publishers, 1

Franklin Plaza, Burlington, NJ 08060, 1.800.266.5626

6 Air Products & Chemicals Inc.-PA, Rural Route 1, Tamaqua, PA

18252, 717.467.2981

7 American Cyanamid Company, CALI Corporation Center, 50 Tice

Blvd., Woodcliff Lake, NJ 07675, 201.930.0455

8 Callery Chemical Company, P.O. Box 429, Pittsburgh, PA 15230,

412.967.4100

9 E.I. du Pont de Nemours and Company, 1007 Market St.,

Wilmington, DE 19898, 302.774.1000

10 Schumacher, 1969 Palomar Oaks Way, Carlsbad, CA 92009-1307,

619.931.9555

11 McGraw-Hill Inc., Princeton Rd., Hightstown, NJ 08520,

609.426.5934

12 CRC Press LLC Headquarters,2000 NW Corporate Blvd, Boca

Raton,FL 33431, USA, Phone: 1(800)272-7737 or (561)994-0555

Fax: 1(800)374-3401 or (561)989-9732

13 This publication is available from Franklin Book Company, 7804

Montgomery Ave., Elkon’s Park, PA 19027, 215.635.5252