semi合集-English.pdf - 第7103页
SEMI S21-1103 © SEMI 2003 3 may be a manufact urer, an equipm ent distributor, or an equipment representative. [SEMI S2] 5.2.15 user party who ac quires equipment for the purpose of using it t o manufact u re semicon d…
SEMI S21-1103 © SEMI 2003 2
4.3 European Directives
2
89/686/EEC — Personal Protective Equipment
Directive
4.4 European Standards
3
EN207 — Personal Eye-Protection - Filters and Eye-
Protection Against Laser Radiation
EN208 — Personal Eye-Protection - Eye-Protectors for
Adjustment Work on Lasers and Laser Systems (Laser
Adjustment Eye-Protectors)
4.5 JIS Standards
4
JIS C 6802 — Safety of Laser Products
4.6 OSHA Standards
5
29 CFR 1910.147 — The Control of Hazardous Energy
(lockout/tagout)
29 CFR 1910.1200 Hazard Communication
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CPR — cardiopulmonary resuscitation
5.1.2 EEW — energized electrical work – Also known
as Working On Energized Electrical Circuitry.
5.1.3 EMO — Emergency Off
5.1.4 ERT — Emergency Response Team
5.1.5 MSDS — Material Safety Data Sheet
5.1.6 PPE — Personal Protective Equipment
5.2 Definitions
5.2.1 confined space a space that:
(1) is large enough and so configured that an employee
can bodily enter and perform assigned work; and (2)
has limited or restricted means for entry or exit (e.g.,
chambers, space in enclosures are spaces that may have
limited means of entry.); and (3) is not designed for
continuous employee occupancy.
2 European Commission, Available through the European Union
On-Line at http://europa.eu.int/index_en.htm.
3 European Committee for Standardization, Available through the
ON-CEN Sales Point, P.B. 130, A-1021 Vienna. Fax
43.1.213.00.818; Website: www.on-norm.at/cen/index_e.htm
4 Japanese Industrial Standards, Available through the Japanese
Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo
107-8440, Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014
Website: www.jsa.or.jp
5Occupational Safety and Health Administration, U.S. Government
Printing Office, Washington, DC 20402, USA
5.2.2 e-diagnostic electronic access to equipment
for the purpose of diagnosing problems from a distance
(e.g., via dial-up, network connection, or wireless
communication means).
5.2.3 electrical PPE — personal protective equipment
specially designed to provide protection from electrical
arc, shock or other effect that could cause injury to a
person touching an electrical circuit or causing an
electrical fault.
5.2.4 emergency a sudden, serious event or
situation, such as earthquake, explosion, fire, or release
of hazardous energy or chemicals.
5.2.5 emergency response team a team who is
responsible for responding to emergencies.
5.2.6 employer entity that directly supervises
employees.
5.2.7 energized electrical work — work performed on
energized equipment or systems containing hazardous
voltages.
5.2.8 facility operator entity that controls activities
at the site.
5.2.9 facility owner the actual owner of the property
that may not be the actual operator of the facility.
5.2.10 hazardous energy any energy that can
potentially result in serious injury, illness, or death.
NOTE 1: Hazardous energies include electrical (e.g.,
capacitors, batteries), chemical, thermal/cryogenic, stored
pressure (e.g., pressurized containers), suspended weight,
stored mechanical (e.g., springs), generated pressure (e.g.,
hydraulics and pneumatics), and other sources that may lead
to the risk of injury.
5.2.11 operator a person who interacts with the
equipment only to the degree necessary for the
equipment to perform its intended function. [SEMI S2]
5.2.12 hazardous voltage voltages greater than 30
volts rms, 42.4 volts peak, 60 volts DC [SEMI S2].
NOTE 2: To avoid confusion between hazardous voltage and
non-hazardous electrical energy, see definition for non-
hazardous electrical energy.
5.2.13 non-hazardous electrical energy — electrical
energy of which voltage considered to need no further
protection to be safe for human contact. Includes
voltages less than the value specified as “hazardous
voltage” and power less than 240 volt-amps (VA) (as
used in EMO circuits and interlock circuits that must
remain active during maintenance).
5.2.14 supplier party who provides equipment to
and communicates directly with the user. A supplier
SEMI S21-1103 © SEMI 2003 3
may be a manufacturer, an equipment distributor, or an
equipment representative. [SEMI S2]
5.2.15 user party who acquires equipment for the
purpose of using it to manufacture semiconductors.
5.2.16 work any activity performed on
semiconductor manufacturing equipment, utilities
connected to the equipment, or facilities associated with
the equipment within the work area.
5.2.17 work area room or defined space where
semiconductor manufacturing equipment is located and
where workers are present. This can include service
chases and sub-fab areas.
5.2.18 workers personnel who install, operate,
maintain, service, decontaminate, or disassemble
equipment.
6 General Worker Safety
6.1 The hierarchy for selecting worker protection
measures should be as follows:
• Hazard elimination by design
• Engineering controls
• Administrative methods
• Personal Protective Equipment
6.2 The equipment supplier should provide information
in the equipment operation, maintenance, or service
manual or other appropriate documents on
recommended controls to reduce the risks. These
documents should conform to SEMI S13.
6.3 Equipment Engineering System (EES) Related
Safety Issues
6.3.1 Suppliers should identify all forms of e-
diagnostic communications (either standard or optional)
that exist or are planned and should include the
preferred method (i.e., local area network (LAN),
telephone line, wireless port) that is required.
6.3.2 Suppliers should describe any communications
isolation feature (e.g., cut-off switches, locations for
disconnecting cables) that is available to protect
equipment from being controlled remotely.
NOTE 3: Isolation of communication usually will not be
acceptable to local jurisdictions as a substitute for isolation of
hazardous energy in a hazardous energy control procedure.
6.4 Prior to work, employers should develop safe work
procedures.
6.4.1 Development of safe work procedures should use
hazard analyses and risk assessments to identify the
hazards and determine which hazards warrant further
mitigation.
6.4.2 Risks identified by job hazard analyses and risk
assessments should be reduced to an acceptable level,
using the protective measure hierarchy described above.
6.5 Employers should ensure that workers are
adequately trained to perform their assigned work
safely.
6.5.1 Suppliers and users should agree on training
involving specific equipment.
NOTE 4: See SEMI S19, which pertains to safety training
and certification for personnel working in semiconductor
fabrication facilities.
6.6 The supplier should provide the user with the
version of equipment installation, maintenance, service,
and operation manuals that matches the specific
equipment configuration as installed, contains the most
current information for that configuration but is
appropriate to the specific equipment for both
configuration and process.
6.6.1 The user should verify that the manuals correctly
reflect the equipment configuration as it was installed.
If there are any discrepancies, the user and the supplier
should agree on corrective actions.
6.7 The facility operator should establish site-specific
safety procedures for the safety of all persons including
temporary workers, visitors, and supplier
representatives in the work area.
6.7.1 Site-specific hazards and appropriate protective
measures including applicable safety procedures should
be communicated by the facility operator to all persons.
6.8 Upon request, the facility operator should identify
appropriate communication measures to ensure there is
communication between workers that may be
physically separated, such as between upper and lower
floors or between operation and maintenance areas.
NOTE 5: Facility operators may restrict wireless
communications because of interference issues. This may
include wireless phones, Personal Digital Assistants (PDAs),
two-way pagers, and other wireless devices.
6.9 The facility operator should ensure conformance to
all applicable regulatory requirements and control of
hazards in the work area. The use of industry practices
should be considered in the absence of regulatory
requirements.
NOTE 6: Multi-employer work site issues may be involved
in some jurisdictions. Check with local site personnel for
information before finalizing practices.
SEMI S21-1103 © SEMI 2003 4
6.10 Hazards should be controlled based on each job
category: installation, operation, maintenance and
service.
6.10.1 Installation
6.10.1.1 Prior to equipment installation, the installation
manual or other available documents should be checked
to ensure that the appropriate information is available,
including:
• Utilities connection diagram
• Electrical cabling information
• Hazardous energy isolation procedures
• Test procedures for safety features and
performance
• Chemical information
• Safety related detector types and locations
6.10.2 Operation
6.10.2.1 EMO and safety interlock features should not
be removed, bypassed or overridden during normal
operating periods.
6.10.2.2 The location and functionality of each safety
interlock feature and EMO feature should be verified
before initial start-up of any system.
6.10.2.3 Periodic testing and validation of EMO and
safety interlock features should be performed in
accordance with the supplier’s recommendations.
6.10.2.4 EMO and safety interlock systems should be
tested and validated following extended shutdown for
maintenance and service.
6.10.3 Maintenance and Service
6.10.3.1 Prior to maintenance or service, the worker
should check for the following. Worker should perform
their tasks in accordance with any identified procedures
or requirements including the following:
• Effects of the tasks on any safety systems
• Presence of active hazardous energy sources
• Hazardous energy source isolation (lockout/tagout)
requirements
• Verification of remaining hazardous energies after
energy isolation
• Procedure for removal or isolation of remaining
hazardous energies
• Necessity and procedures to override safety
interlocks
• Proper restoration of overridden safety interlocks
after completion of the work
• Personal protective measures required for the work
including the use of personal protective equipment
and training requirements
• Requirements to document the work
7 Chemical Hazards
7.1 The hazards of all work-related chemicals should
be identified. Hazard communication should be
provided for all known hazards of those chemicals.
7.2 Hazard Communication (HAZCOM)
7.2.1 The user should provide chemical safety data to a
designated supplier representative and all potentially
exposed persons. The supplier representative should be
the manager responsible for field service personnel.
7.2.2 Work associated with hazardous chemicals
should be performed only by personnel who have been
trained in safe handling techniques and the hazards
associated with exposure.
7.2.3 When performing work at the user’s site, the
supplier should provide the user information in advance
on any chemicals that the supplier brings onto the
user’s site. It is the responsibility of the supplier to
provide information in advance on supplier-specified
hazardous chemicals and the appropriate handling
procedures. It is the responsibility of the user to train
workers on user-specified hazardous chemicals.
7.2.4 Chemicals and gases should be handled with
special care based on specific handling instructions that
are described in MSDSs and equipment manuals.
7.2.5 Material Safety Data Sheets (MSDSs) for the
chemicals in use should be readily accessible while
work associated with the chemicals is being performed.
7.2.6 All chemical containers and pipes should be
labeled with contents and hazards according to
applicable codes or standards.
NOTE 7: Process piping that may carry varying contents
depending upon the timing or recipe may be labeled with the
generic contents of the piping provided the hazards and
protective measures can be easily identified from the label.
NOTE 8: Information about chemical labeling methods is
provided in SEMI F34 and OSHA 29 CFR 1910.1200.
7.2.7 A written program for controlling hazardous
chemicals should be developed by each employer.
7.2.7.1 This program should be periodically reviewed,
for adequacy, by employers.