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SEMI E98-1102 © SEMI 2000, 2002 3 5.2 Definitions 5.2.1 abstract object type — an object supertype that is not instantiated directly b ut only through one of its subtypes. 5.2.2 act uator — a n analog or d igital output …

SEMI E98-1102 © SEMI 2000, 2002 2

SEMI E40 — Standard for Processing Management

SEMI E41 — Exception Management (EM) Standard

SEMI E42 — Recipe Management Standard:

Concepts, Behavior, and Message Services

SEMI E53 — Event Reporting

SEMI E54 — Sensor/Actuator Network Standard

SEMI E58 — Automated Reliability, Availability, and

Maintainability Standard (ARAMS): Concepts,

Behavior, and Services

SEMI E81 — Provisional Specification for CIM

Framework Domain Architecture

SEMI E87 — Provisional Specification for Carrier

Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Provisional Specification for Control Job

Management

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AGV — Automated Guided Vehicle

5.1.2 AMHS — Automated Material Handling System

5.1.3 APC — Advanced Process Control

5.1.4 ARAMS — Automated Reliability, Availability,

and Maintainability Standard (SEMI E58)

5.1.5 CIM — Computer Integrated Manufacturing

5.1.6 CJM — Control Job Management

5.1.7 CMS — Carrier Management Standard

5.1.8 FDC — Fault Detection Control

5.1.9 FIMS — Front-Opening Interface Mechanical

Standard (reference SEMI E62)

5.1.10 FOUP — Front-Opening Unified Pod

5.1.11 FPD — Flat Panel Display

5.1.12 OBEM — Object-Based Equipment Model

5.1.13 OSS — Object Services Standard (SEMI E39)

5.1.14 PGV — Personal Guided Vehicle

5.1.15 R2R — Run-to-Run Control

5.1.16 RMS — Recipe Management Standard (SEMI

E42)

5.1.17 SMIF — Standard Mechanical Interface (SEMI

E19)

5.1.18 STS — Specification for Substrate Tracking

SEMI E98-1102 © SEMI 2000, 2002 3

5.2 Definitions

5.2.1 abstract object type — an object supertype that is

not instantiated directly but only through one of its

subtypes.

5.2.2 actuator — an analog or digital output device

that is used to affect changes in the physical

environment. Examples of actuators include mass flow

controllers (MFCs) and open/closed valves.

5.2.3 advanced process control (APC) — techniques

covering both feedforward and feedback control and

automated fault detection, applied both by the

equipment (in situ) and by the factory (ex situ).

5.2.4 Automated Material Handling System (AMHS) —

a factory system used to transport and store carriers.

AMHS has two major types of components: an

automated transport system and one or more storage

systems (stockers).

5.2.5 automated transport system — the component of

AMHS used to transport carriers between stockers

and/or production equipment.

5.2.6 carrier — a container with one or more fixed

positions at which material may be held.

NOTE 2: Positions within a carrier may be considered as

material locations owned by the carrier.

5.2.7 clock — a device that is used to provide real-time

date and time information.

5.2.8 container — a durable that is used to hold other

material, including other containers, for transport,

storage, or shipping. Types of containers include

carriers and boxes.

5.2.9 dry run (mechanical dry run) — a complete

equipment cycle that allows the material handling and

software capabilities of the equipment to be exercised

without requiring full facilities hookups and without

changing the physical state of the wafer. Environ-

mental control subsystem (e.g., vacuum, nitrogen

purge, particle detection) should not be affected by a

dry run, and process consumables are not used.

5.2.10 durable — a type of material used to facilitate

manufacturing but not normally consumed in the

process that is removable, reusable, and trackable.

Examples include containers, reticles, and pellicles.

5.2.11 environmental subsystem — a subsystem of

equipment with the purpose of monitoring or

maintaining one or more specific environmental

conditions or used to handle product or durables.

Environmental subsystems include vacuum systems,

particle detection systems, and nitrogen purge systems.

5.2.12 equipment — equipment (manufacturing equip-

ment) performs one or more of the following manufac-

turing functions in the factory: material process,

material transport, or material storage. Equipment is

made up of various parts: modules, subsystems and

sensors/actuators. Equipment has at least one carrier

port. Equipment communicates with the factory.

5.2.13 equipment element — a component of the

equipment that behaves as a unit, performs work, and

may or may not contain lower-level components.

5.2.14 equipment module (module) — a major

component of equipment that contains at least one

material location and performs some task on material.

Equipment modules may be aggregates of equipment

subsystems, i/o devices, and other modules.

5.2.15 fault detection — analysis of data for early

detection of process faults before yield loss becomes

significant.

5.2.16 Front-Opening Unified Pod (FOUP) — a front-

opening pod with an integrated (non-removable)

cassette.

5.2.17 implementation — the internal view of a type,

class, or instance, including any non-public properties

and behavior. The specific code and functionality that

implements an interface. (See SEMI E81.)

5.2.18 interface — the external view of an object type,

class, or object that defines its public properties and

services without regard to the internal structure and

internal behavior. (See also SEMI E81.)

5.2.19 interface inheritance — the construction of an

interface by incremental modification of other interfa-

ces (see implementation inheritance). (See SEMI E81.)

OBEM specifies interface inheritance but not

implementation inheritance.

5.2.20 I/O device — a general term for any type of

sensor or actuator or aggregation of sensor and/or

actuator.

5.2.21 linked equipment — two or more equipment that

are physically and logically connected and function as a

single installation of equipment. In this case, the

individual component equipment are modeled as high-

level modules of the linked equipment.

5.2.22 load port — The physical interface provided for

the exchange of carriers with an agent of the factory

(operator or automated material handling system).

(Reference SEMI E15.)

5.2.23 Manufacturing Execution System (MES) — the

factory system responsible for managing the manufac-

turing process, including logistics and process flow.

SEMI E98-1102 © SEMI 2000, 2002 4

5.2.24 material — (1) any material used in, or required

by, the manufacturing process. Material is classified as

consumable, durable, or product. (2) an abstraction of

the various types of things used during manufacturing,

such as wafers, carriers, and chemicals, which require

some management.

5.2.25 material location — a reference to a place

within the equipment or an equipment component that

can hold material, such as the top surface of an indexer

or substrate chuck or the end effector of a substrate

handler.

5.2.26 measured value — a value representing a

measurement, with a numerical value, measurement

units, and a valid range.

5.2.27 measurement equipment — equipment whose

intended function is to measure or inspect the product

and to report results. Measurement of the product is the

factory’s means of gaining feedback on the

manufacturing process.

5.2.28 Object-Based Equipment Model — a model of

equipment, its components, behaviors, attributes, and

services, as defined by this document.

5.2.29 object type — a declaration (specification) that

describes the common properties and behavior for a

collection of objects. Types classify objects according

to a common interface; classes classify objects

according to a common implementation. (See also

SEMI E39 and E81.)

5.2.30 object specifier — designates a logical path

pointing to a specific instance of an object through a

hierarchy of owners. See SEMI E39.

5.2.31 Personal Guided Vehicle (PGV) — a manually

guided and operated vehicle capable of placing and

removing carriers to and from a carrier port.

5.2.32 pod — as used in this document, a container

providing environmental control, such as a SMIF or

FIMS pod

5.2.33 production equipment — process equipment and

measurement equipment.

5.2.34 process durable — a specialized durable used

by process equipment and specified by the user as part

of the process, such as a reticle or burin-in board.

5.2.35 process equipment — equipment whose

intended function is to process product, adding value to

the product.

5.2.36 product — (1) from the equipment’s perspec-

tive, product is a synonym for substrate, and includes

1 The term “pod” was originally defined as a bottom-opening pod

with a SMIF interface.

non-product substrates such as test substrates and send-

ahead substrates; (2) from the factory perspective,

product is the material being processed and produced

by the factory.

5.2.37 run-to-run control — techniques for varying

settings in one run based on analysis of either incoming

product (feed-forward) or product from an earlier run.

5.2.38 sensor — a component that responds to changes

in the physical environment and provides an analog or

digital input value.

5.2.39 sensor/actuator device — a device consisting of

one or more sensors and/or actuators on the physical

tool. See SEMI E54 for a precise definition of “sensor

or actuator” and for a description of the internal

structure of an sensor/actuator network Common

Device Model definition.

5.2.40 setup — 1. (verb) the performance of one or

more steps that puts the equipment into a known state in

which it is ready to perform a specific process; 2.

(noun) the state of the equipment once it has been

setup.

5.2.41 standardized object — an object that is formally

defined and compliant to SEMI E39, Object Services

Standard (reference SEMI E42).

5.2.42 storage equipment (stocker) — equipment

whose intended function is primarily to provide storage,

either short-term or long-term, for carriers.

5.2.43 subassembly — a component of equipment that

provides some limited functionality.

5.2.44 substrate — basic unit of material on which

work is performed to create a product. Examples

include wafers, die, plates used for masks, flat panels,

circuit boards, and leadframes.

5.2.45 subsystem — a subsystem is an intelligent

aggregate that behaves as a unit. A subsystem is made

up of sensors and/or actuators and may contain

mechanical assemblies. Subsystems may be shared by

multiple modules.

5.2.46 subtype — an object type that is based on

(derived from) another type and adds some specializa-

tion or overrides some properties or services. The type

from which the subtype is derived is the supertype. For

additional detail, see SEMI E39, Object Services

Standard.

5.2.47 supertype — an object type which is used as a

basis from which specializations are derived. The

derived types are called subtypes. For additional detail,

see SEMI E39.

5.2.48 transport equipment — equipment whose

intended function is primarily to move material from