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SEMI F64-0701 © SEMI 2001 10 Figure 7 Method A-2 Flo w chart Figure 8 Method B Flo wchart

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SEMI F64-0701 © SEMI 20019
Figure 6
Method A-1 Flowchart
SEMI F64-0701 © SEMI 2001 10
Figure 7
Method A-2 Flowchart
Figure 8
Method B Flowchart
SEMI F64-0701 © SEMI 200111
Figure 9
Method C Flowchart
DUT
x units Gas
P
P
MFM
Flow Standard
P
MFC
10x DUT Gas
P1
P2
P3
Figure 10
Test Schematic for Method D