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11 Pressure Transducers 11.1 Pressure transducers should conform to the interface de sign recomm endations appearing in Fig ure 5 and Table 5. 11.2 To improve modularity of gas distribution systems the following recommen…
Table 4 MFC and MFM Interface Recommendations
Option 1
MFC and MFM
Option 2
MFC and MFM
End-to-End Lengths:
1/4-inch Integral/fixed male face seal
1/4-inch Swivel face seal (male or female)
1/4-inch Tube weld
124 mm (4.88 in.)
-
-
106 mm (4.17 in.)
-
-
NOTE 1: The tolerance on length is ± 0.50 mm (0.020 in.) from the component centerline to each end.
Overall Component Envelope:
Maximum height
Maximum width
180 mm (7.1 in.)
38 mm (1.5 in.)
Base to Centerline of Flow Path:
12.7 mm (0.50 in.)
± 0.3 mm (0.012 in.)
Mounting provisions:
Threaded holes
Pattern
M4 0.7 6H; 3 mm (0.12 in.) minimum perfect thread depth
42 mm (1.65 in.) bolt circle centered on bottom of base with two
threaded holes 180° apart and 45° off of the vertical or horizontal
axis.
One hole in each of the upper left and lower right quadrants when
looking at the bottom of the component.
Fittings:
Process
1/4-inch
Electrical
9-pin sub-D connector
Analog signal pin out as follows:
Pin 1. Valve Closed (Ground Pin to Close Valve)
Pin 2.
05 V
DC
Flow Signal Output
Pin 3. +15 V
DC
Power Supply
Pin 4. Power Common
Pin 5. -15 V
DC
Power Supply
Pin 6.
05 V
DC
Setpoint Input
Pin 7. Output Common
Pin 8. Setpoint Common
Control:
Pin 9. Valve Test Point
SEMI F36-0299 © SEMI 1999, 2004 9
11 Pressure Transducers
11.1 Pressure transducers should conform to the interface design recommendations appearing in Figure 5 and Table
5.
11.2 To improve modularity of gas distribution systems the following recommendation should be considered for
future pressure transducer design. This recommendation would match the pressure transducer interface design to the
dimensions of both the shut-off valve Option 1 found in Table 2 and pressure regulator Option 1 found in Table 3.
Figure 5
Pressure Transducer Interface Design
SEMI F36-0299 © SEMI 1999, 2004 10
Table 5 Pressure Transducer Interface Recommendations
Option 1
Pressure Transducers
with Four-pin Connector
Option 2
Pressure Transducers
with Six-pin Connector
End-to-End Lengths:
1/4-inch Integral/fixed male face seal
1/4-inch Swivel face seal (male or female)
1/4-inch Tube weld
57 mm (2.24 in.)
77.5 mm (3.05 in.)
47 mm (1.85 in.)
54 mm (2.13 in.)
77.5 mm (3.05 in.)
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NOTE 1: The minimum length for each tube weld stub should be 6.5 mm (0.26 in.). The tolerance on length for machined
components is ± 0.15 mm (0.006 in.) from the component centerline to each end. The tolerance on length for welded components
is ± 0.50 mm (0.020 in.) from the component centerline to each end.
Overall Component Envelope:
Maximum height
Maximum width
180 mm (7.1 in.)
38 mm (1.5 in.)
Base to Centerline of Flow Path:
11 mm (0.44 in.)
± 0.3 mm (0.012 in.)
or
12.7 mm (0.50 in.)
± 0.3 mm (0.012 in.)
Mounting Provisions:
Threaded holes
Pattern
M5 0.8 6H; 6 mm (0.24
in.) perfect thread depth
25.4 mm (1.00 in.) bolt
circle centered on bottom of
base with two threaded holes
180° apart and 45° off of the
vertical or horizontal axis.
One hole in each of the
upper left and lower right
quadrants when looking at
the bottom of the
component.
None required
-
NOTE 2: The M5 0.8 threaded mounting holes will accept 1032 screws, but 1032 threaded holes will not accept M5 0.8
screws.
Fittings:
Process
1/4-inch
Control:
Option 1
Electrical
Four-pin round connector
Signal pin out as follows:
Option 2
Electrical
Six-pin round connector
Signal pin out as follows:
Amperage Configuration Voltage Configuration Amperage Configuration Voltage Configuration
Pin A
+420 mA excitation
+ power input Pin A
+420 mA excitation
+ power input
Pin B optional (open if not used) pressure output/signal output Pin B optional (open if not used) optional (open if not used)
Pin C optional (open if not used) optional (open if not used) Pin C
-420 mA negative
power and signal ground
Pin D
-420 mA negative
power and signal ground Pin D optional (open if not used) optional (open if not used)
Pin E optional (open if not used) pressure output/signal output
Pin F optional (open if not used) optional (open if not used)
SEMI F36-0299 © SEMI 1999, 2004 11