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SEMI E82-0705 © SEMI 1999, 2005 50 R1-3 Hardware Architec ture Factory Host TSC 1 Transport Unit 1 Transport Unit M ... TSSEM GEM HSMS -SS LAN ... TSC N Transport Unit 1 Tran spor t Unit M ... Key Characterist ics • TSC …

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SEMI E82-0705 © SEMI 1999, 2005 49
R1-2 Parallel Interface for Carrier Transfer - SEMI E23 Required Transfer
POD
Ceiling
Raised Floor
Overhead Vehicle (OHV)
Stocker
(Side View)
SEMI E23 devices
(Location for OHV)
SEMI E23 device
(Location for AGV/RGV)
Floor
running
AGV/RGV
A
utomated or Rail
Guided Vehicle (AGV/RGV)
POD
E23 Plug
Figure R1-1
SEMI E23 Example Diagram for OHV/AGV/RGV
Figure R1-2
SEMI E23 Example Diagram for DWC
SEMI E82-0705 © SEMI 1999, 2005 50
R1-3 Hardware Architecture
Factory Host
TSC
1
Transport
Unit 1
Transport
Unit M
...
TSSEM
GEM
HSMS-SS
LAN
...
TSC
N
Transport
Unit 1
Transport
Unit M
...
Key Characteristics
• TSC interfaces to an transport
units(one or more vehicles or nodes)
• One-to-many(one or more) mapping of
TSC’s to transport units
• Transport system controls decoupled from
AMHS stocker controls
TSC
Transport Units
Figure R1-3
Configurable Centralized TSC Architecture (Logical View)
R1-4 Traffic Management Characteristics
R1-4.1 At a minimum, the TSC must offer Priority-based First-In-First-Out (FIFO) queuing of TRANSFER
commands. In other words, all TRANSFER commands which have yet to be processed by the transport system
must be serviced in the order in which they are received by the TSC based on the priority given in the host
command. The minimum
priority levels required to be available on IBSEM equipment are “Normal” and “High.”
“Normal” and “High” priorities will be denoted by U2 compatible numbers as per the definition of the priority in the
Variable Data and Remote Command sections of this document. Other options may be implemented, but to be an
IBSEM equipment it must at a minimum have the ability to be configured to perform Priority-based FIFO queuing
of TRANSFER commands. Additionally, the command priorities are to be utilized during execution of the
commands to the following level: any “High” priority command will cause all other commands that are not “High”
priority to be usurped. That is to say that all other commands will modify the execution steps to allow the “High”
priority commands to be completed in the minimal elapsed time possible. Multiple “High” priority commands will
act upon each other according to the same rules as “Normal” commands act on each other.
SEMI E82-0705 © SEMI 1999, 2005 51
The following TRANSFER commands are
received by the TSC in top to bottom order:
TRANSFER Command
Priority
1 Normal
2 Normal
3 High
4 Normal
5 High
4 2 1 5 3
head
tail
Corresponding TSC processing queue
for outstanding TRANSFER commands :
Normal
High
Figure R1-4
TSC Priority-based FIFO TRANSFER Command Processing Example
R1-4.2 The TSC must manage the vehicles so that TRANSFER requests are queued for later service if all vehicles
are currently utilized.
R1-5 Transport System Handling and Delivery of the Transfer Unit
R1-5.1 A transfer unit must always be delivered by the same vehicle simultaneously. A transfer unit cannot be split
between multiple vehicles.