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SEMI E79-0304 © SEMI 1999, 2004 10 A1-2 Example Calculations for a Flexible-Sequence Clu s ter Tool A1-2.1 Sample Data — The calculations in this section are based on the followin g sample data. The sample data is over a…

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SEMI E79-0304 © SEMI 1999, 2004 9
APPENDIX 1
CALCULATING PRODUCTIVITY METRICS
NOTICE: The material in this appendix is an official part of SEMI E79 and was approved by full letter ballot
procedures on December 15, 1999 by the North American Regional Standards Committee.
A1-1 Example Calculations for an Individual
Processing Module or a Fixed-Sequence
Cluster Tool
A1-1.1 Sample Data — The calculations in this section
are based on the following sample data. The sample
data is for a seven-day period.
Non-Scheduled Time 0.00 hours
Unscheduled Downtime 4.00 hours
Scheduled Downtime 8.00 hours
Engineering Time 3.00 hours
Standby Time 6.00 hours
Production Time
147.00 hours
Total Time 168.00 hours
Recipe
Theoretical
Production
Time
Per Unit
Theoretical
Units
Per Hour
Actual
Units
of
Recipe
Effective
Units
of
Recipe
A 0.03333
hr/unit
30.00
units/hr
1420 1400
B 0.04000
hr/unit
25.00
units/hr
600 600
C 0.05000
hr/unit
20.00
units/hr
800 800
D 0.06667
hr/unit
15.00
units/hr
500 480
A1-1.2 Fundamental Quantities
Equipment Uptime
= (Production Time) + (Standby Time) + (Engineering Time)
= (147.00 hours) + (6.00 hours) + (3.00 hours)
= 156.00 hours
Production Time (given)
Theoretical Production Time for Actual Units
= ∑
i
(Actual Units of Recipe i × THT
i
)
= [(1420 units × 0.03333 hr/unit)
+ (600 units × 0.04000 hr/unit)
+ (800 units × 0.05000 hr/unit)
+ (500 units × 0 .06667 hr/unit)]
= 144.66 hours
Theoretical Production Time for Effective Units
= ∑
i
(Effective Units of Recipe i × THT
i
)
= [(1400 units × 0.03333 hr/unit)
+ (600 units × 0.04000 hr/unit)
+ (800 units × 0.05000 hr/unit)
+ (480 units × 0.06667 hr/unit)]
= 142.67 hours
A1-1.3 Productivity Metrics
Availability Efficiency
= (Equipment Uptime)/(Total Time)
= (156.00 hours)/(168.00 hours)
= 0.9286
Operational Efficiency
= (Production Time)/(Equipment Uptime)
= (147.00 hours)/(156.00 hours)
= 0.9423
Rate Efficiency
= (Theoretical Production Time for Actual Units)
/(Production Time)
= (144.66 hours)/(147.00 hours)
= 0.9840
Performance Efficiency
= (Operational Efficiency) × (Rate Efficiency)
= (0.9423) × (0.9840)
= 0.9272
Quality Efficiency
= (Theoretical Production Time for Effective Units)
/(Theoretical Production Time for Actual Units)
= (142.67 hours)/(144.66 hours)
= 0.9862
Overall Equipment Efficiency (OEE)
= (Theoretical Production Time for Effective Units)
/(Total Time)
= (142.67 hours)/(168.00 hours)
= 0.8492
SEMI E79-0304 © SEMI 1999, 2004 10
A1-2 Example Calculations for a Flexible-Sequence Cluster Tool
A1-2.1 Sample Data — The calculations in this section are based on the following sample data. The sample data is
over a seven-day period for a flexible-sequence cluster tool encompassing three virtual machines. This example will
calculate the theoretical OEE for the cluster tool without consideration of OEE degrading module interactions.
Virtual Machine
A
Virtual Machine
B
Virtual Machine
C
Non-Scheduled Time 0.00 hours 0.00 hours 0.00 hours
Unscheduled Downtime 5.00 hours 5.00 hours 0.00 hours
Scheduled Downtime 0.00 hours 5.00 hours 0.00 hours
Engineering Time 3.00 hours 5.00 hours 0.00 hours
Standby Time 10.00 hours 5.00 hours 88.00 hours
Production Time 150.00 hours 148.00 hours 80.00 hours
Total Time 168.00 hours 168.00 hours 168.00 hours
Process Sequence for
Flexible-Sequence
Cluster Tool
Virtual
Machine A
Recipe
Virtual
Machine B
Recipe
Virtual
Machine C
Recipe
Actual
Units of
Sequence
Effective
Units of
Sequence
S1 R1 R2 300 275
S2 R2 R4 100 100
S3 R2 R3 250 240
S4 R3 R4 400 400
Virtual
Machine
Recipe
Theoretical Production
Time Per Unit (THT
i
)
including Load/Unload Time
R1 0.3000 hr/wafer
R2 0.2000 hr/wafer
R3 0.1000 hr/wafer
R4 0.1500 hr/wafer
A1-2.2 Fundamental Quantities
Virtual Machine Theoretical Production Time for Actual Units
= ∑
i
(Actual Units of Recipe i × THT
i
)
Sequence
Actual
Units
Virtual Machine A
Virtual Machine B
Virtual Machine C
S1 300 300 units × 0.3000
hr/unit
300 units × 0.2000
hr/unit
S2 100 100 units × 0.2000 hr/unit 100 units × 0.1500 hr/unit
S3 250 250 units × 0.2000 hr/unit 250 units × 0.1000 hr/unit
S4 400 _____________________ 400 units
× 0.1000 hr/unit 400 units × 0.1500 hr/unit
Virtual Machine
Theoretical Production
Time for Actual Units =
Σ
=
140.00 hours
Σ
=
145.00 hours
Σ
=
75.00 hours
Flexible-Sequence Cluster Tool Theoretical Production Time for Actual Units
= ∑
j
(Theoretical Production Time for Actual Units for Virtual Machine j)
= (140.00 hours) + (145.00 hours) + (75.00 hours)
= 360.00 hours
SEMI E79-0304 © SEMI 1999, 2004 11
Virtual Machine Theoretical Production Time for Effective Units
= ∑
i
(Effective Units of Recipe i × THT
i
)
Sequence
Effective
Units
Virtual Machine A
VirtualMachine B
Virtual Machine C
S1 275 275 units × 0.3000 hr/unit 275 units × 0.2000 hr/unit
S2 100 100 units × 0.2000 hr/unit 100 units × 0.1500 hr/unit
S3 240 240 units × 0.2000 hr/unit 240 units × 0.1000 hr/unit
S4 400 _____________________ 400 units
× 0.1000 hr/unit 400 units × 0.1500 hr/unit
Virtual Machine
Theoretical Production
Time for Actual Units =
Σ
=
130.50 hours
Σ
=
139.00 hours
Σ
=
75.00 hours
Flexible-Sequence Cluster Tool Theoretical Production Time for Effective Units
= ∑
j
(Theoretical Production Time for Effective Units for Virtual Machine j)
= (130.50 hours) + (139.00 hours) + (75.00 hours) = 344.50 hours
Virtual Machine Production Time (given)
Flexible-Sequence Cluster Tool Production Time
= ∑
j
(Production Time for Virtual Machine i)
= (150.00 hours) + (148.00 hours) + (80.00 hours) = 378.00 hours
Virtual Machine Equipment Uptime
= (Virtual Machine Production Time) + (Virtual Machine Standby Time)
+ (Virtual Machine Engineering Time)
Virtual Machine A
Virtual Machine B Virtual Machine C
Engineering Time 3.00 hours 5.00 hours 0.00 hours
Standby Time 10.00 hours 5.00 hours 88.00 hours
Production Time
+150.00 hours +148.00 hours +80.00 hours
Equipment Uptime 163.00 hours 158.00 hours 168.00 hours
Flexible-Sequence Cluster Tool Equipment Uptime = ∑
j
(Equipment Uptime for Virtual Machine j)
= (163.00 hours) + (158.00 hours) + (168.00 hours) = 489.00 hours
Virtual Machine Total Time (given)
Flexible-Sequence Cluster Tool Total Time = (Number of Virtual Machines) × (Total Time Observed)
= (3 Virtual Machines) × (168 hours) = 504 hours
A1-2.3 Productivity Metrics
Virtual Machine Availability Efficiency = (Virtual Machine Equipment Uptime)/(Total Time)
Virtual Machine A
Virtual Machine B Virtual Machine C
= (163.00 hours)/(168.00 hours)
= 0.9702
= (158.00 hours)/(168.00 hours)
= 0.9405
= (168.00 hours)/(168.00 hours)
= 1.000
Flexible-Sequence Cluster Tool Availability Efficiency
= (Flexible-Sequence Cluster Tool Equipment Uptime)/(Flexible-Sequence Cluster Tool Total Time)
= (489.00 hours)/(504.00 hours)
= 0.9702
Virtual Machine Operational Efficiency
= (Virtual Machine Production Time)
÷
(Virtual Machine Equipment Uptime)
Virtual Machine A Virtual Machine B Virtual Machine C
= (150.00 hours)/(163.00 hours)
= 0.9202
= (148.00 hours)/(158.00 hours)
= 0.9367
= (80.00 hours)/(168.00 hours)
= 0.4762