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SEMI E102-0600 © SEMI 2000 8 Resource (Inherited from E97) Activity Stored InTran sit ManualControl Proce ssing OutOfService InService 12 34 5 6 7 8 9 10 11 13 12 14 15 16 Figure 5 MaterialContainer Dynamic Model Table 1…

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SEMI E102-0600 © SEMI 20007
6.2.3.2 MaterialContainer Interface (subset)
Module: DurablesManagement
Interface: MaterialContainer
Inherited Interface: Durable
interface MaterialContainer : Durable {
Description: A MaterialContainer interface represents any receptacle for holding Material for
transport, processing or storage. Examples of MaterialContainers are shipping boxes,
tubes, standard mechanical interface (SMIF) pods, etc.
Exceptions: None.
Published Events:
/* Notifies subscribers of a state change in the MaterialContainer. */
MaterialContainerStateChangeEvent
Provided Services:
/* The following operations are provided to trigger MaterialContainer state transitions. */
void makeManualControl ()
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeStored ()
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeInTransit ()
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
void makeProcessing ()
raises (Global::FrameworkErrorSignal,
Global::InvalidStateTransitionSignal);
}; // MaterialContainer
typedef sequence <MaterialContainer> MaterialContainerSequence;
Dynamic Model:
SEMI E102-0600 © SEMI 2000 8
Resource (Inherited from E97) Activity
Stored
InTransit ManualControl
Processing
OutOfService
InService
12
34 5
6
7
89
10
11
13
12
14
15
16
Figure 5
MaterialContainer Dynamic Model
Table 1 MaterialContainer State Definitions
State State Definition Example
InService Inherited from Resource State Model
OutOfService Inherited from Resource State Model
InTransit Container is en route as the subject of a Transport Job. Container is on an OHT transport vehicle.
Stored Container is stored in a Storage Machine and not
subject to a Transport Job.
Container is on a stocker shelf.
ManualControl Container is outside of the control of the Material
Transport and Storage Component.
Container is on a PGV.
Processing Container is at process equipment. Container is on a lithography tool.
Table 2 MaterialContainer State Transitions
# Current State Trigger Next State Action Comment
1–5 NOTE: Transitions 1–5 are defined in the dynamic model inherited from Resource.
6 N/A makeManual
Control()
ManualControl MaterialContainer
instance is created.
Initial state
7 ManualControl makeStored() Stored DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container is placed on
input port of a Storage
Machine without a
TransportJob assigned to
it.
8 Stored makeInTransit() InTransit DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has started to
move. TransportJob state
transitions to Executing.
9 InTransit makeStored() Stored DurableLocation
ChangedEvent Published
Container stored.
TransportJob state
SEMI E102-0600 © SEMI 20009
# Current State Trigger Next State Action Comment
by the instance of
MaterialContainer
transitions to Completed.
10 InTransit makeProcessing() Processing DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has reached
destination at process
equipment. TransportJob
state transitions to
Completed.
11 Processing makeInTransit() InTransit DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has left process
equipment. TransportJob
state transitions to
Executing.
12 Processing makeManual
Control()
ManualControl DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has left control
of process equipment (not
via TransportJob).
13 ManualControl makeProcessing() Processing DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has entered
control of process
equipment (not via
TransportJob).
14 InTransit makeManual
Control()
ManualControl DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has left the
control of the
TransportJob via a
manual output port.
TransportJob state
transitions to Aborted.
15 ManualControl makeInTransit() InTransit DurableLocation
ChangedEvent Published
by the instance of
MaterialContainer
Container has entered the
AMHS via a manual
input port. TransportJob
state transitions to
Executing.
16 ManualControl none N/A none MaterialContainer
instance has been
removed.
6.2.4 Machine Abstract Interface Group (subset)
This section includes only those interfaces and specific operations from the Machine Abstract Interface Group that
are referenced within this component specification. These interfaces are provided here for referential integrity of this
specification and are not intended to remain as part of this component. Further, this is not intended to be a
comprehensive treatment of the required interfaces, but only the subset needed for reference until the full
specification is adopted through a subsequent ballot. When that occurs, this specification can be updated to reference
the interfaces directly rather than replicate them here.