semi合集-English.pdf - 第5797页
SEMI P23-0200 © SEMI 1993 , 2000 20 50 u m 50 u m De t a i l 1 u m 1 u m 1. 5 14.0 2. 5 11. 5 7. 0 0. 5 2. 0 1.5 2. 5 4. 5 C D A B ; Film Pattern ; Defect Position Figure 15 Sub Cell Wiring (Type A)
SEMI P23-0200 © SEMI 1993, 200019
2 um Square
10 um
14 um
Figure 14
Letter
(Non False Defects Pattern)
SEMI P23-0200 © SEMI 1993, 2000 20
50 um
50 um
Detail
1 um
1 um
1.5
14.0
2.5
11.5
7.0
0.5
2.0
1.5
2.5
4.5
C
D
A
B
; Film Pattern
; Defect Position
Figure 15
Sub Cell
Wiring (Type A)
SEMI P23-0200 © SEMI 1993, 200021
50 um
50 um
Detail
1 um
1 um
14.0
2.5
11.5
7.0
0.5
2.0
1.5
1.5
2.5
45.0 deg.
4.5
; Film Pattern
Figure 16
Sub Cell
Wiring (Type B)