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SEMI E58-0703 © SEMI 1997, 2003 41 RELATED INFORMATION 2 NOTE: This related information is not an o fficial part of SEMI E58 and is not inte nded to modify or supersede the official standard. Rather, these notes are auxi…
SEMI E58-0703 © SEMI 1997, 2003
40
R1-5 Host-Initiated Transition
R1-5.1 This scenario illustrates the events and activities that occur as the result of a host-initiated transition from its
current substate of STANDBY to a different substate of STANDBY.
Table 20 Table R1-4 Host-Initiated Transition
Comment Host Equipment Comment
ARAMSState = “2800”
(“SBY/No host”)
Initial conditions.
Host sends new ARAMS
substate code.
ARAMSStateChange.req →
(ARAMSCode = “2400”)
Elapsed time:= Clock Ð
ARAMSTimestamp
PrevARAMSState:=
ARAMSState (“2800”)
ARAMSState:= “2400”
(“SBY”)
NOTE – ARAMSTimestamp is
unchanged.
← ARAMSStateChange.rsp
Equipment acknowledges the
new state change.
← ARAMS State Change
Event
(Report “A”)
← ARAMS Transition Event
(Report “C”)
Equipment notifies host of
ARAMS state change.
SEMI E58-0703 © SEMI 1997, 2003 41
RELATED INFORMATION 2
NOTE: This related information is not an official part of SEMI E58 and is not intended to modify or supersede the official
standard. Rather, these notes are auxiliary information provided as background or examples of possible application and are
included as reference material. The standard should be referred to in all cases. SEMI makes no warranties or representations as to
the suitability of the material set forth herein for any particular application. The determination of the suitability of the material is
solely the responsibility of the user.
This section discusses issues that may arise through
implementations of ARAMS.
R2-1 User-Initiated Transitions to
UNSCHEDULED DOWNTIME
R2-1.1 Although substates of UNSCHEDULED
DOWNTIME include (unplanned) change of
consumables, out-of-spec input material, and facilities-
related downtime, transitions to UNSCHEDULED
DOWNTIME are generally regarded as resulting from
an equipment fault. Operators have sometimes been
known to log the equipment into UNSCHEDULED
DOWNTIME as a way of freeing time, even though the
equipment is operating completely within
specifications.
R2-1.2 The equipment may use the status (read-only)
ARAMSInfo to record information, such as Operator
ID, that could be used in its defense.
R2-1.3 Additionally, equipment is encouraged to
maintain an internal log of events. While the host may
or may not request ARAMSInfo in an event report, the
equipment’s log could be used to record the information
and would be accessible to field service personnel for
analysis. Recording information such as the date, day of
week, time of day, identifier of the operator (where
known) could be an effective protection against abuse.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E58.1-0697 © SEMI 1997, 2003 1
SEMI E58.1-0697 (Reapproved 0703)
SECS-II PROTOCOL FOR AUTOMATED RELIABILITY, AVAILABILITY,
AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS,
BEHAVIOR, AND SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on April 11, 2003. Initially available at www.semi.org May
2003; to be published July 2003. Originally published June 1997.
1 Purpose
1.1 This document maps the services and data of the
Automated Reliability, Availability, and
Maintainability Standard (ARAMS) to SECS-II streams
and functions and data definitions.
2 Scope
2.1 This document applies to all implementations of
ARAMS that use the SECS-II message protocol (SEMI
E5).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E10 — Specification for Definition and
Measurement of Equipment Reliability, Availability,
and Maintainability (RAM)
SEMI E58 — Automated Reliability, Availability and
Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Services Mapping
4.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the services defined in ARAMS.
4.2 The ARAMSStateChange service may be mapped
either to S2,F41/F42 or to S2,F49/F50 or both. The
equipment supplier is required to document the
mapping used.
Table 1 Services Mapping Table
Message Name Stream, Function SECS-II Message Name
ARAMSStateChange S2,F41/F42
S2,F49/F50
Host Command Send/Acknowledge
Enhanced Remote Command/Acknowledge
ResetAccumulators S2,F41/F42
S2,F49/F50
Host Command Send/Acknowledge
Enhanced Remote Command/Acknowledge
TableSend S13,F13/F14 Table Data Send/Acknowledge
TableRequest S13,F15/F16 Table Data Request/Table Data