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SEMI T8-0698 E © SEMI 1998, 2004 5 Figure 3 Border Rows and Columns Figure 4| Data Matrix Code Field in Edge E xclusion Area

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SEMI T8-0698
E
© SEMI 1998, 2004 4
Figure 1
Data Matrix Field
Figure 2
Data Matrix Cell Dimensions
SEMI T8-0698
E
© SEMI 1998, 2004 5
Figure 3
Border Rows and Columns
Figure 4|
Data Matrix Code Field in Edge Exclusion Area
SEMI T8-0698
E
© SEMI 1998, 2004 6
Figure 5
Data Matrix Code Field
Figure 6
Data Matrix Code Field