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SEMI E54.4-0704 © SEMI 1997, 2004 3 4 Referenced Standards 4.1 SEMI Standards SEMI E30 — Generi c Model for Com munications and Control of SEMI Equipment (GEM) SEMI E39 — Object Se rvices Standard: Concepts, Behavior, an…

SEMI E54.4-0704 © SEMI 1997, 2004 2

Figure 1

Sensor/Actuator Network Related Documents

2.5 Document Structure — The DeviceNet network

communication standard complies with the SEMI SAN

NCS template document structure; this structure is

shown in Figure 2. The standard document is composed

of two main parts. The first part (Sections 1 through 8)

specifies the SAN enabling protocol as well as the

presentation (i.e., mapping) of CDM object structure

and behavior onto the network (referred to as the

“CDM mapping”). The second part (Section 9)

specifies the presentation (i.e., mapping) of SDM object

structure and behavior onto the network for each SEMI-

specified SDM (referred to as the “SDM mapping”).

CDM

Mapping

(DeviceNet NCS)

SDM

Mappings

(M F C , P article C ounter,

Resig. Gas Anal., etc.)

{

This

Document

•

(Other NCS

Standards)

Figure 2

DeviceNet NCS Document Structure

2.6 Adding SDM Mappings — SDM mappings added

to part two of this document are considered document

additions and are balloted as such. An SDM mapping

may only be balloted for addition to this document if

the corresponding SEMI SDM has been standardized or

is in the process of being balloted for standardization.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on DeviceNet and is a

companion document to the DeviceNet specification;

thus, a complete specification of this standard

necessarily includes the DeviceNet specifications.

There are other semiconductor equipment SAN

communications options. The specifications for these

options are not included here.

3.2 This standard specifies enhancements that provide

additional capabilities over and above those currently

required by DeviceNet. In order to avoid document

consistency problems, information in the DeviceNet

specification that relates to this standard is not repeated

in this document. This document is limited to

describing enhancements or limitations to the

DeviceNet specification that are imposed by this

standard.

3.3 A complete specification of the conformance

testing procedure shall include the DeviceNet protocol

conformance testing specification. Conformance testing

shall also include enhancements and limitations to the

DeviceNet specification required by this standard.

SEMI E54.4-0704 © SEMI 1997, 2004 3

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

4.2 ISO Standards

ISO 7498 — Basic Reference Model for Open Systems

Interconnection

ISO 11898 — Road Vehicles — Interchange of Digital

Information — Controller Area Network (CAN) for

High-Speed Communications

4.3 Other Documents

DeviceNet Specification — ODVA

Controller Area Network Specification — Version 2, R.

Bosch GmbH, + Postfach 50 D-7000, Stuttgart 1,

Germany, 1991

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

Terminology that is common to all of the documents in

this SAN standard may also be defined in the Sensor

Actuator Network Standard. Terminology may be

reproduced here which is defined in other SEMI

documents.

5.1 Abbreviations & Acronyms

5.1.1 CAN — Controller area network

5.1.2 CDM — Common device model

5.1.3 DM — Device manager (object)

5.1.4 DN — DeviceNet

5.1.5 NCS — Network communication standard

5.1.6 OSI — Open systems interconnect

5.1.7 OSS — Object services standard

5.1.8 SAC — Sensor, actuator, controller (object)

5.1.9 SAN — Sensor/actuator network

1 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,

Website: www.iso.ch

2 Open DeviceNet Vendor Association, www.odva.org

5.1.10 SDM — Specific device model

5.2 Device Component Definitions — As this standard

defines the presentation or mapping of CDM data

structure and behavior over a network, it makes use of

many of the terms in the CDM document. Table 1

provides a mapping of fundamental terminology of the

CDM document into this document and the DeviceNet

specification. Note that Column 2 contains an equal

sign “=” if the definition is used exactly as specified in

the CDM specification.

Table 1 Mapping of CDM to NCS Terminology

CDM Term

NCS Equivalent

DeviceNet

Equivalent

Device = =

Device Model = =

Object =, Class =, Class

Instance = =

Attribute = =

Behavior = =

Service = =

State Diagram = =

Byte = =

Nibble = =

Character String = =

5.3 DeviceNet Specific Definitions

5.3.1 class — a set of objects that all represent the

same kind of system component. A class is a

generalization of an object. All objects in a class are

identical in form and behavior, but may contain

different attribute values.

5.3.2 controller area network (CAN) — a protocol

developed by the Bosch corporation for automotive in-

vehicle networking. The CAN specification specifies

OSI reference model layers 1 and 2, specifically the

physical signaling and media access/data link protocols.

5.3.3 device profile — a DeviceNet specification for a

device that contains an object model for the device

type, the I/O data format for the device type, and the

configuration data and the public interface(s) to that

data.

5.3.4 explicit message connections — connections over

a DeviceNet network that provide generic, multi-

purpose communication paths between two devices.

These connections often are referred to as just

messaging connections. Explicit messages provide the

typical request/response - oriented network communi-

cations.

SEMI E54.4-0704 © SEMI 1997, 2004 4

5.3.5 input/output connections — connections over a

DeviceNet network that provide dedicated, special-

purpose communication paths between a producing

application and one or more consuming applications.

Application-specific I/O data moves through these

ports.

6 Communication Protocol High Level

Structure

6.1 The DeviceNet protocol is loosely based on a

three-layer architecture. These layers constitute a

collapsed form of the OSI seven-layer architecture,

mapping into the physical, data link, and application

layers of the Reference Model; however, DeviceNet

provides additional functionality (such as connection

support) commonly attributed to other OSI layers. The

high level protocol architecture is shown in Figure 3.

DN Application Layer

CAN Data Link

DN Physical Layer

Layered View of DeviceNet

Application Layer

Presentation Layer

Session Layer

Transport Layer

Network Layer

Data Link Layer

Physical Layer

OSI Reference Model

Figure 3

Layered View of DeviceNet

6.1.1 Note that Figure 3 represents a conceptual view

of the device architecture. Conforming implementations

must implement the services defined in this

specification at each layer and must appear (from the

network) to have implemented this architecture;

however, an internal modular partitioning is not

required. Implementations may sacrifice modularity in

order to achieve high performance.

6.2 The DeviceNet physical layer is fully specified in

Volume 1 of the DN Specification. Features of this

layer include Trunkline - dropline configuration,

simultaneous support for both network-powered and

self-powered devices, and selectable data rates

including at least 125k, 250k, and 500k baud. At the

data link layer, the CAN specification defines a carrier

sense multiple access mechanism for media access

control that avoids collisions and sends frames reliably.

The application layer is specified in Volumes 1 and 2 of

the DN Specification and provides for the definition of

DeviceNet applications as a collection of addressable

objects. Two basic categories of objects exist:

Communication Objects and Application Objects.

Communication Objects manage and provide for the

runtime exchange of messages across DeviceNet.

Application Objects implement product-specific

features and/or provide a logical interface to product-

specific information of devices on a DeviceNet

network.

6.3 In the remainder of this section, the protocol

structure is described in more detail in terms of the OSI

seven layer reference model, the object model

environment, and network management specifications.

6.4 Physical Layer — The device shall comply with the

DeviceNet physical layer specification as well as the

" Interface Guidelines for DeviceNet Devices on

Semiconductor Manufacturing Tools" which is

published as part of the DeviceNet specification. This

includes physical signaling (levels and baud rates -

detailed in the CAN specification), transceivers, node

isolation, media topology, cable specifications, network

connectors and taps, and power considerations (load

limits, system tolerances, and power supply options).

6.4.1 Physical Layer Enhancements — This standard

supports the following physical layer enhancement to

the DeviceNet specifications:

• The transmission media, including both trunk cable

and drop cable, shall be DeviceNet Thin Cable.

Specifications on this cable and its utilization in

DeviceNet systems (e.g., maximum trunk and drop

lengths) are included in the DeviceNet

specification.

6.5 Data Link Layer — The device shall comply with

the DeviceNet Data Link Layer Specifications (i.e.,

Controller Area Network Specification: Version 2).

This includes the media access control mechanism and

the logical link control mechanism. Addressing is

currently limited to 11 bits.

6.6 Network Layer — There is no distinct network

layer.

6.7 Transport Layer — There is no distinct transport

layer. Some of the functionality of this layer is

implemented in the Application Layer. Specific

functions include: segmentation/reassembly for full

message delivery and the establishment of node-to-node

connections.

6.8 Session Layer — There is no distinct session layer.