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SEMI E54.16-0705 © SEMI 2005 46 Table 96 A ssembly-EPD#4 Objec t Instance Network Var iables Assembly-EPD#4 Profile ID = 180.97, Instance ID = 01 Sequence Number Name Storage Class SDM Tag Standard NV or CP Data Type 1 D…
SEMI E54.16-0705 © SEMI 2005 45
Table 91 Assembly-EPD#1 Object Instance Network Services
Assembly-EPD#1
Profile ID = 180.94, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.4.7 Assembly-EPD#2 — The presentation of the Assembly #2 Endpoint (Assembly-EPD#2) object instance
attributes is as indicated in Table 92. The presentation of Assembly-EPD#2 object services are indicated in Table 93.
Table 92 Assembly-EPD#2 Object Instance Network Variables
Assembly-EPD#2
Profile ID = 180.95, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 93 Assembly-EPD#2 Object Instance Network Services
Assembly-EPD#2
Profile ID = 180.95, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.4.8 Assembly-EPD#3 — The presentation of the Assembly #3 Endpoint (Assembly-EPD#3) object instance
attributes is as indicated in Table 94. The presentation of Assembly-EPD#3 object services are indicated in Table 95.
Table 94 Assembly-EPD#3 Object Instance Network Variables
Assembly-EPD#3
Profile ID = 180.96, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 95 Assembly-EPD#3 Object Instance Network Services
Assembly-EPD#3
Profile ID = 180.96, Instance ID = 01
Service Code Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.4.9 Assembly-EPD#4 — The presentation of the Assembly #4 Endpoint (Assembly-EPD#4) object instance
attributes is as indicated in Table 96. The presentation of Assembly-EPD#4 object services are indicated in Table 97.
SEMI E54.16-0705 © SEMI 2005 46
Table 96 Assembly-EPD#4 Object Instance Network Variables
Assembly-EPD#4
Profile ID = 180.97, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 97 Assembly-EPD#4 Object Instance Network Services
Assembly-EPD#4
Profile ID = 180.97, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
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SEMI E54.##-0705 © SEMI 2005 1
SEMI E54.17-0705
SPECIFICATION OF SENSOR/ACTUATOR NETWORK FOR A-LINK
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005.
1 Purpose
1.1 This document defines a communication specification based on the A-LINK protocol to enable communications
between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models
on semiconductor manufacturing equipment.
1.2 This document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator
devices.
2 Scope
2.1 This document specifies how Sensor / Actuator / Controller devices interoperate on the network specific for the
A-LINK Public specification referenced in the §4, as a part of equipment’s control system.
2.2 This document defines relation with main part of SEMI E54 including Common Device Model (CDM) and
existing Specific Device Models (SDMs). This document is to be used with the CDM and one or more SDMs, as
well as the A-LINK Public Specification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based only A-LINK and is a companion document to
the A-LINK specification; therefore a complete specification of this standard includes the A-LINK specifications.
There are other semiconductor SAN communication options. The specifications for these options are not included
here.
3.2 This standard specifies enhancements that provide additional capability over and above those currently required
by A-LINK. In order to avoid document inconsistency problem, information in the A-LINK specification that relates
to this standard is not repeated in this document. This document is limited to describing enhancements or limitations
to the A-LINK specification that are imposed by this standard.
3.3 A complete specification of the conformance testing procedure shall include the A-LINK protocol conformance
testing specification. Conformance testing shall also include enhancements and limitations to the A-LINK
specification required by this standard.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-situ Particle Monitor
Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
4.2 OSI Standard
ISO 7498 OSI — Basic Reference Model for Open Systems Interconnection