semi合集-English.pdf - 第3660页
SEMI E142-0705 © SEMI 2005 22 </ReferenceDevice> </ReferenceDevices> <BinCodeMap BinType="Ascii" NullBin="." > <BinDefinitions> <BinDefinition BinCode="1" BinCount…
SEMI E142-0705 © SEMI 2005 21
RELATED INFORMATION 1
MAP EXAMPLES
NOTICE: This related information is not an official part of SEMI E142 and was derived from the North American
Information & Control Committee. This related information was approved for publication by full letter ballot
procedures on December 10, 2004.
R1-1 Wafer Map Example
R1-1.1 The example MapData below is for three wafers that all share the same layout. The layout includes an FDI
target, used for alignment, and an array of devices.
Wafer1 includes ReferenceDevices and BinDefinitions. Wafer2 and Wafer3 do not.
Wafer1 uses the Row/Column map representation type including null bin devices.
Wafer2 uses the Row/Column map representation type excluding null bin devices.
Wafer3 uses the Array map representation type.
Wafer4 uses the Coordinate map representation type.
<?xml version="1.0" encoding="utf-8" ?>
<MapData xmlns="urn:semi-org:xsd.4032.V0804.SubstrateMap" >
<Layouts>
<Layout LayoutId="WaferLayout" DefaultUnits="mm" TopLevel="true" >
<DeviceSize X="300" Y="300" />
<Dimension X="1" Y="1" />
<ChildLayouts>
<ChildLayout LayoutId="FDI Target" />
<ChildLayout LayoutId="Devices" />
</ChildLayouts>
</Layout>
<Layout LayoutId="FDI Target" DefaultUnits="microns" >
<Dimension X="1" Y="1" />
<LowerLeft X="0" Y="0" />
<DeviceSize X="0" Y="0" />
</Layout>
<Layout LayoutId="Devices" DefaultUnits="microns" >
<Dimension X="4" Y="3" />
<LowerLeft X="0" Y="0" />
<DeviceSize X="0" Y="0" />
<ProductId>Product1</ProductId>
</Layout>
</Layouts>
<Substrates>
<Substrate SubstrateType="Wafer" SubstrateId="Wafer1" >
<LotId>Lot1</LotId>
<AliasIds>
<AliasId Type="FrameId" Value="Frame1" />
</AliasIds>
</Substrate>
<Substrate SubstrateType="Wafer" SubstrateId="Wafer2" />
<Substrate SubstrateType="Wafer" SubstrateId="Wafer3" />
<Substrate SubstrateType="Wafer" SubstrateId="Wafer4" />
</Substrates>
<SubstrateMaps>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer1"
LayoutSpecifier="WaferLayout/FDI Target" >
<Overlay>
<ReferenceDevices>
<ReferenceDevice Name="FDI Target" >
<Coordinates X="0" Y="0" />
</ReferenceDevice>
</ReferenceDevices>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer1"
LayoutSpecifier="WaferLayout/Devices" >
<Overlay MapName="SortGrade" MapVersion="1" >
<ReferenceDevices>
<ReferenceDevice Name="FirstDevice" >
<Coordinates X="1" Y="2" />
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</ReferenceDevice>
</ReferenceDevices>
<BinCodeMap BinType="Ascii" NullBin="." >
<BinDefinitions>
<BinDefinition BinCode="1" BinCount="5" BinQuality="Pass"
BinDescription="Tested Ok" Pick="true" />
<BinDefinition BinCode="2" BinCount="3" BinQuality="Fail"
BinDescription="Test Failed" Pick="false" />
</BinDefinitions>
<BinCode>.12.</BinCode>
<BinCode>1112</BinCode>
<BinCode>.21.</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer2"
LayoutSpecifier="WaferLayout/Devices" >
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinCode X="1" Y="2">12</BinCode>
<BinCode X="0" Y="1">1112</BinCode>
<BinCode X="1" Y="0">21</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer3"
LayoutSpecifier="WaferLayout/Devices" >
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinCode>.12.1112.21.</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
<SubstrateMap SubstrateType="Wafer" SubstrateId="Wafer4"
LayoutSpecifier="WaferLayout/Devices"
Orientation="180" >
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinCode X="1" Y="2">1</BinCode>
<BinCode X="2" Y="2">2</BinCode>
<BinCode X="0" Y="1">1</BinCode>
<BinCode X="1" Y="1">1</BinCode>
<BinCode X="2" Y="1">1</BinCode>
<BinCode X="3" Y="1">2</BinCode>
<BinCode X="1" Y="0">2</BinCode>
<BinCode X="2" Y="0">1</BinCode>
</BinCodeMap>
</Overlay>
</SubstrateMap>
</SubstrateMaps>
</MapData>
R1-2 Strip Map Example
R1-2.1 The example strip map below contains a more complex nested layout, one strip substrate, and three data
maps.
<?xml version="1.0" encoding="utf-8" ?>
<MapData xmlns="urn:semi-org:xsd.4032.V0804.SubstrateMap">
<Layouts>
<Layout LayoutId="StripLayout" DefaultUnits="100Microns" >
<Dimension X="1" Y="1" />
<DeviceSize X="2510.00" Y="414.02" />
<ChildLayouts>
<ChildLayout LayoutId="SRAM" />
</ChildLayouts>
</Layout>
<Layout LayoutId="SRAM" DefaultUnits="100Microns">
<Dimension X="10" Y="3" />
<LowerLeft X="7.00" Y="8.33" />
<DeviceSize X="75.00" Y="46.67" />
<StepSize X="78.00" Y="49.67" />
<Z Order="0" Height="500" Units="microns" />
<ChildLayouts>
<ChildLayout LayoutId="FLASH" />
</ChildLayouts>
</Layout>
<Layout LayoutId="FLASH" DefaultUnits="100Microns">
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<Dimension X="2" Y="1" />
<LowerLeft X="10.00" Y="6.67" />
<DeviceSize X="25.00" Y="33.00" />
<StepSize X="30.00" Y="0.00" />
<Z Order="1" Height="300" Units="microns" />
</Layout>
</Layouts>
<Substrates>
<Substrate SubstrateType="Strip" SubstrateId="Strip1" />
</Substrates>
<SubstrateMaps>
<SubstrateMap SubstrateType="Strip" SubstrateId="Strip1"
LayoutSpecifier="StripLayout/SRAM"
Orientation="180">
<Overlay MapName="SortGrade" MapVersion="1" >
<BinCodeMap BinType="Ascii" NullBin="." >
<BinDefinitions>
<BinDefinition BinCode="1" BinCount="24" BinQuality="Pass"
BinDescription="Bond Ok" Pick="true" />
<BinDefinition BinCode="2" BinCount="3" BinQuality="Fail"
BinDescription="Bond Failed" Pick="false" />
</BinDefinitions>
<BinCode>.111121111</BinCode>
<BinCode>.111111121</BinCode>
<BinCode>.112111111</BinCode>
</BinCodeMap>
</Overlay>
<Overlay MapName="2D Matrix Mark" MapVersion="1" >
<DeviceIdMap>
<Id X="0" Y="7">Device1</Id>
<Id X="0" Y="5">Device2</Id>
</DeviceIdMap>
</Overlay>
<Overlay MapName="WaferToStrip" MapVersion="1" >
<TransferMap FromSubstrateType="Wafer" FromSubstrateId="Wafer1" >
<T FX="1" FY="2" TX="1" TY="0"/>
<T FX="0" FY="1" TX="1" TY="1"/>
</TransferMap>
</Overlay>
</SubstrateMap>
</SubstrateMaps>
</MapData>
R1-2.2 Figure R1-1 shows a portion of the layout for the strip in the example above. The strip contains “SRAM”
devices with “Flash” devices stacked on top of them.
R1-2.3 Figure R1-2 illustrates one DeviceId element of the map.
R1-2.4 Figure R1-3 illustrates one Transfer element of the map.