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SEMI E6-0303 © SEMI 1982, 2003 29 RELATED INFORMATION 3 MOVE-IN, PLACEMENT AND AS SEMBLY INSTRUCTIONS NOTICE : This related information is being balloted , but is not an official part of SEMI E6 and is not intended to mo…

SEMI E6-0303 © SEMI 1982, 2003 28

RELATED INFORMATION 2

SHIPPING AND RECIEVING INFORMATION

NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to

modify or supersede the official standard. It has been derived from the work of the originating task force.

Determination of the suitability of the material is solely the responsibility of the user.

R2-1 Container Inventory

R2-1.1 Table R2-1 shows an example of the shipping

and receiving information – container inventory sheet

to be included with equipment installation

documentation as recommended in SEMI E6 Section

7.1.2.

R2-1.2 Include detailed lists of all supplied components

and parts.

R2-2 Container Storage

R2-2.1 In addition to a container inventory, any special

receiving and handling instructions should be provided

along with the onsite storage requirements for crates.

R2-2.2 The following storage information should be

included for containers or crates:

• storage location (such as outside, storeroom, out of

weather, dry location, or cleanroom),

• storage temperature range, and

• storage relative humidity range.

R2-3 Unpacking Instructions

R2-3.1 In addition to container inventory and storage

information, include any special staging, inspection and

unpacking instructions to complete the shipping and

receiving information.

R2-3.2 If containers cannot be unloaded by hand, list

the necessary equipment.

Table R2-1 Example of Shipping and Receiving Information – Container Inventory

Crate

Number

ID number

on Crate

Crate Size

Length

Crate Size

Width

Crate Size

Height

Crate

Weight

Crate Contents Crate Storage

Requirements

SEMI E6-0303 © SEMI 1982, 2003 29

RELATED INFORMATION 3

MOVE-IN, PLACEMENT AND ASSEMBLY INSTRUCTIONS

NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to

modify or supersede the official standard. It has been derived from the work of the originating task force.

Determination of the suitability of the material is solely the responsibility of the user.

R3-1 Instructions

R3-1.1 Consider every step from receiving until hookup

is complete when writing installation instructions. The

installation process usually includes the need for tools,

transportation equipment, and personnel (quantity,

duration, and skills). All requirements should be

indicated so availability can be assured. The following

is a sample outline for the instructions recommended in

SEMI E6 Section 7.1.3.

R3-1.1.1 Move in — Provide instructions for transport

and location of the equipment in the cleanroom. List

any special equipment required to move the equipment.

R3-1.1.2 Placement — Include procedures for items

such as but not limited to the following:

• Use of templates and jigs if provided,

• Through-the-wall mounting,

• 3-dimension alignment,

• Leveling the equipment,

• Floor loading,

• Floor mounting,

• Pedestal mounting, and

• Seismic restraint.

R3-1.1.3 Assembly — Provide instructions for all

necessary steps required to make the equipment

functional. List necessary parts, and special equipment

to be provided by the equipment purchaser. List

necessary contractors, and include estimated schedule

and duration information. Include procedures for:

• Component assembly and attachment,

• Electrical power hookup,

• Water hookup,

• Bulk chemical hookup,

• Drain hookup,

• Gas hookup,

• Vacuum hookup,

• Exhaust hookup,

• Inspection, and

• Energizing equipment.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E7-91 © SEMI 1984, 2004 1

SEMI E7-91 (Reapproved 1104)

SPECIFICATION FOR ELECTRICAL INTERFACES FOR THE U.S. ONLY

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on July 11, 2004. Initially available at

www.semi.org September 2004; to be published November 2004. Originally published in 1984; last

published June 1999.

For Japan electrical interface requirements, see SEMI E31.

1 Purpose

1.1 The purpose of this standard is to simplify the

design and implementation of future semiconductor

facilities where both equipment suppliers and users can

be assured of the exact electrical interfaces required.

2 Scope

2.1 This standard presents recommendations for the

selection of specific electrical power interfaces:

 Service categories by voltage, current and phase

for systems, motors, and other electrical loads

 Electrical connectors

 Cordage

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 Other Standards

NEMA — National Electrical Manufacturer’s

Association

NFPA 70-1981 — National Electrical Code, (NEC)

National Fire Protection Association

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

None.

1 National Electrical Manufacturer’s Association, 1300 N. 17th

Street, Suite 1847, Rosslyn, VA, 22209, (703) 841-3200, fax (703)

841-5900, http://www.nema.org/

2 National Fire Protection Association, 1 Batterymarch Park

Quincy, Massachusetts, 02169-7471, +1 617 770-3000, fax +1 617

770-0700, http://www.nfpa.org

5 Service Categories

5.1 Voltage, current, and phase for motors and other

electrical/electronic loads:

5.2 Motors — (From Article 430-148, 150 of National

Electrical Code)

Power Recommended

Phase & Voltage

Recommended

Current Range

Motors 1/6 to 3/4 HP 120V 1Ø

208V 1Ø

230V 1Ø

4.4 to 13.8 AMPs

2.4 to 7.6 AMPs

2.2 to 6.9 AMPs

Motors 3/4 to 5 HP 208V 3Ø

230V 3Ø

3.1 to 16.7 AMPs

2.8 to 15.2 AMPs

Motors 5 HP and

Larger

480V 3Ø 7.6 AMPs and up

5.3 Other Loads — (By Calculation)

Ampere Range for Recommended Volts &

Phases

Power 120V 1Ø 208V 1Ø 208V 3Ø 480V 3Ø

0-3000 Watts 0 to 25

0 to 14 A. 0 to 8 A.

3000-5000 Watts 14 to

24 A.

8 to 14 A.

5000-

30,000 Watts

13 to

83 A.

30,000 and

Above

36 A. and

6 Electrical Connectors

6.1 The NEMA types listed below are available in

many forms from many manufacturers. For example,

the “receptacle” configurations shown also apply to

connectors and flanged outlets.

6.1.1 125 Volt, 1Ø, 20 AMPs max., straight blade