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SEMI F97-0305 © SEMI 2005 22 RELATED INFORMATION 2 CHECKLIST FOR SUPPLI ERS AND PURCHASERS NOTICE : This rel ated information is not an o fficial part of SEMI F97 a nd was derive d from work of the origi nating task forc…
SEMI F97-0305 © SEMI 2005 21
R1-2 Complex FPU – Makeup Air Unit (MAU)
Table R1-3 Status Response of a MAU in Run, Locked and Automatic Mode
Status Field Name Meaning Bit-value
Watchdog-Toggle Toggle value 0/1
OP-Mode Automatic 1
Control-Mode Remote 1
Run-Mode Run 3
Alarm-Mode Alarm 0
Warning-Mode No_Warning 0
Error-Mode No_Error 0
Maintenance-Mode No_Maintenance 0
Simulation-Mode No_Simulation 0
Lock Locked 1
Makeup Air Unit
MAU007
L
A
Table R1-4 Status Response of a MAU in Maintenance Mode
Status Field Name Meaning Bit-value
Watchdog-Toggle Toggle value 0/1
OP-Mode Automatic 1
Control-Mode Local 0
Run-Mode Stand-by 2
Alarm-Mode Alarm 0
Warning-Mode No_Warning 0
Error-Mode No_Error 0
Maintenance-Mode Maintenance 1
Simulation-Mode No_Simulation 0
Lock Not_Locked 0
Makeup Air Unit
MAU007
M
L
SEMI F97-0305 © SEMI 2005 22
RELATED INFORMATION 2
CHECKLIST FOR SUPPLIERS AND PURCHASERS
NOTICE: This related information is not an official part of SEMI F97 and was derived from work of the originating
task force. This related information was approved for publication by full letter ballot on November 10, 2004.
R2-1 Checklist of Information Exchanged
R2-1.1 Table R2-1 lists the information that needs to be agreed upon by purchasers, system integrators and
suppliers for a particular application within the focus of this standard.
Table R2-1 Template for the Information Exchanged Between FMCS and FPU
Project:
FPU:
Supplier FPU:
FPU Model:
Supplier FMCS:
FMCS Model:
Protocol FPU/FMCS:
NOTE 1: Table R2-1 is comprised of three sections – General Information, Status Information, and Data Information
General Information
Status Information
Tag:
Field Bit Meaning Issue Comment/Value
Watchdog-toggle 0 0/1 Supported? Yes / No
Frequency?
OP-Mode 1 0: Manual
1: Automatic
Variable supported? Yes / No
Initial state when started?
Manual
Automatic
State-Transitions supported? Yes / No
Restrictions to switch between states?
Control-Mode 2 0: Local
1: Remote
Variable supported? Yes / No
Initial state when started?
Local
Remote
State-Transitions supported? Yes / No
Run-Mode 3-4 0: Down (unscheduled)
1: Down (scheduled)
2: Stand-by
3: Run
Variable supported? Yes / No
Initial state when started?
Down (unscheduled)
Down (scheduled)
Stand-by
Run
State-Transitions supported? Yes / No
Restrictions to switch between states?
SEMI F97-0305 © SEMI 2005 23
Tag:
Field Bit Meaning Issue Comment/Value
Alarm-Mode 5 0: No_Alarm
1: Alarm
Variable supported? Yes / No
State-Transitions supported? Yes / No
Type of acknowledgement?
Warning-Mode 6 0: No_Warning
1: Warning
Variable supported? Yes / No
State-Transitions supported? Yes / No
Error-Mode 7 0: No_Error
1: Error
Variable supported? Yes / No
State-Transitions supported? Yes / No
Maintenance-Mode 8 0: No_Maintenance
1: Maintenance
Variable supported? Yes / No
State-Transitions supported? Yes / No
Simulation-Mode 9 0 : No_Simulation
1 : Simulation
Variable supported? Yes / No
State-Transitions supported? Yes / No
Initial state when started?
No_Simulation
Simulation
Means provided to switch between states?
Lock-Mode 10 0: Not_Locked
1: Locked
Variable supported? Yes / No
List critical failures which cause FPU to
leave locked state:
Others
(Describe)