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SEMI E87-0705 © SEMI 1999, 2005 44 Variable Name Desc ription Type Acc ess Comment PartitionType The type of a logical partition within an internal buffer . Text RO Only applicable to internal buffer production equipment…

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SEMI E87-0705 © SEMI 1999, 2005 43
Variable Name Description Type Acc
ess
Comment
CarrierAccessingStatus The state of the carrier accessing
status.
Enumerated:
NOT ACCESSED,
IN ACCESS,
CARRIER COMPLETE,
CARRIER STOPPED
RO
CarrierID The ID of the carrier. Text RO
CarrierID
i
The CarrierID at the i
th
locationID. Text RO
CarrierIDStatus State of the carrier ID status. Enumerated:
ID NOT READ,
[ID]WAITING FOR HOST,
ID VERIFICATION OK,
ID VERIFICATION
FAILED
RO
CarrierLocationMatrix A list all the carriers at/in the
equipment. Both internal to the
equipment, and on equipment load
ports.
List of n pairs of items
1. LocationID
1
CarrierID
1
.
.
n. LocationID
n
CarrierID
n
RO The CarrierID
i
shall be null if
there is no carrier at the
locationID
i
. If a carrier is at
LocationID
i
, but the
CarrierID
i
is not known, the
value of CarrierID
i
shall be
“UNKNOWN”.
LocationID The ID of a carrier location. Text RO Carrier locations are any
location at/in the production
equipment where a carrier
may rest.
LocationID
i
The LocationID
of the i
th
carrier
location.
Text RO Carrier locations are any
location at/in the production
equipment where a carrier
may rest.
LoadPortReservation-
State
The reservation state of a Load
Port.
Enumerated:
NOT RESERVED,
RESERVED
RO
LoadPortReservation-
State
I
The reservation state of the i
th
Load Port.
Enumerated:
NOT RESERVED,
RESERVED
RO
LoadPortReservation-
StateList
The current reservation state of all
the load ports.
A list of n items
1. LoadPortReservationState
1
.
.
n.LoadPortReservationState
n
RO This can be used to
resynchronize the host.
PartitionCapacity The total PartitionCapacity for a
logical internal buffer partition.
Non-negative integer RO Only applicable to internal
buffer production equipment.
PartitionCapacity
i
The PartitionCapacity for the i
th
PartitionID of the internal buffer.
Non-negative integer RO Only applicable to internal
buffer production equipment.
PartitionID The ID of a logical internal buffer
partition.
Text RO Used to identify separate
material types in an internal
buffer.
PartitionID
i
The ID of the i
th
logical partition
of the internal buffer.
Text RO Used to identify separate
material types in an internal
buffer.
SEMI E87-0705 © SEMI 1999, 2005 44
Variable Name Description Type Acc
ess
Comment
PartitionType The type of a logical partition
within an internal buffer.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PartitionType
i
The PartitionType corresponding
with the i
th
PartitionID.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PortAssociationState The association state of a load
port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
PortAssociationState
i
The association state of the i
th
load
port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
PortAssociationState-
List
The current association state for
all load ports.
A list of n items
1. PortAssociationState
1
.
.
n. PortAssociationState
n
RO This can be used to re-
synchronize the host.
PortID ID of a load port. Positive integer RO
PortID
i
ID of the load port where the
carrier transfer is taking place.
One PortID exists for each load
port.
Positive integer RO
PortStateInfo The PortAssociationState
combined with the
PortTransferState.
List of 2 items
PortAssociationState
PortTransferState
RO A combination of both port
states.
PortStateInfo
i
The PortAssociationState
combined with the
PortTransferState for the i
th
load
port.
List of 2 items
PortAssociationState
i
PortTransferState
i
RO A combination of both port
states.
PortStateInfoList List of PortStateInfo for all load
ports.
List of n items
1. PortStateInfo
1
.
.
n PortStateInfo
n
RO A list of all the port states for
all the ports.
PortTransferState The current transfer state of a load
port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD,
READY TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferState
i
The current transfer state of the i
th
load port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD,
READY TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferStateList The current Load Port Transfer
State for all load ports.
A list of n items
1. PortTransferState
1
.
.
n. PortTransferState
n
RO This can be used to re-
synchronize the host.
SEMI E87-0705 © SEMI 1999, 2005 45
Variable Name Description Type Acc
ess
Comment
Reason The reason for transition 14,
SLOT MAP NOT READ to
WAITING FOR HOST.
Enumerated:
VERIFICATION NEEDED,
VERIFICATION BY
EQUIPMENT
UNSUCCESSFUL,
READ FAIL,
IMPROPER SUBSTRATE
POSITION
RO Information to aid host in
deciding appropriate action.
SlotMapStatus State of the carrier slot map status. Enumerated:
SLOT MAP NOT READ,
[SLOT]WAITING FOR
HOST,
SLOT MAP
VERIFICATION OK,
SLOT MAP
VERIFICATION FAILED
RO
UnAllocatedPartition-
Capacity
The current unallocated capacity
for a logical partition inside
internal buffer equipment,
(PartitionCapacity - # of carriers
in partition - # of carriers allocated
for the partition (via reception of a
Bind, CarrierIn,
CarrierNotification,
ReserveAtPort, or
ProceedWithCarrier service). Any
carriers allocated for a partition
will be de-allocated if the
corresponding Cancel service is
received (for example Bind-
CancelBind, CarrierNotification –
CancelCarrierNotification,
ReserveAtPort –
CancelReservationAtPort,
ProceedWithCarrier –
CancelCarrier).
Non-negative integer RO Only applicable to internal
buffer equipment.
UnAllocatedPartition-
Capacity
i
The UnallocatedPartitionCapacity
for the i
th
Partition ID within the
internal buffer
Non-negative integer RO Only applicable to internal
buffer equipment.
20 Alarms
20.1 This section includes specific alarms that are required to be implemented by CMS compliant equipment.
20.2 Alarm List Table
20.2.1 Table 38 is a listing of required alarms for both fixed buffer and internal buffer equipment. This list is only a
subset of the carrier transfer alarms. There may be more carrier transfer related alarms that are not listed here.
Table 38 Alarm List
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Fixed & Internal
Buffer Equipment
PIO Failure X X X X
Access Mode Violation X X X X