semi合集-English.pdf - 第1368页

SEMI E30-1103 © SEMI 1992, 2003 42 4.6.5.3 Process Program Upload Host-Initiated Process Program Upload — Formatted: COMMENTS HOST EQUIPMENT COMMENTS Formatted Process Program S7,F25--> Request <-- S7,F26 Formatted…

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SEMI E30-1103 © SEMI 1992, 2003
41
Process Program Deletion by the Host:
COMMENTS HOST EQUIPMENT COMMENTS
Delete Process Program Send S7,F17-->
<-- S7,F18 Delete Process Program
Acknowledge.
The process program is removed
from non-volatile storage.
4.6.5.2 Process Program Directory Request
COMMENTS HOST EQUIPMENT COMMENTS
Current EPPD Request S7,F19-->
<-- S7,F20 Current EPPD Data
SEMI E30-1103 © SEMI 1992, 2003
42
4.6.5.3 Process Program Upload
Host-Initiated Process Program Upload — Formatted:
COMMENTS HOST EQUIPMENT COMMENTS
Formatted Process Program S7,F25-->
Request <-- S7,F26 Formatted Process Program
Data
Large Formatted Process S7,F43-->
Program Request
<-- S7,44 Large Formatted Process Program
Acknowledge
Acknowledge may be “accepted
and will be performed later
with completion signaled”. When
the equipment is ready to send:
<-- S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set request
S13,F3-->
<-- S13,F4 Open Data Set Data
[START]
Repeat until ACKC13 indicates
error:
Read Data Set Request S13,F5-->
[END] <-- S13,F6 Read Data set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
Event Report Acknowledge <-- S6,F12 Send Event Report "successful
S6,F12--> upload"
[ELSE]
Event Report Acknowledge <-- S6,F11 Send Event Report "bad upload"
S6,F12-->
[END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<-- S13,F8 Close Data Set Acknowledge
SEMI E30-1103 © SEMI 1992, 2003
43
Host-Initiated Process Program Upload — Unformatted:
COMMENTS HOST EQUIPMENT COMMENTS
Process Program Request S7,F5-->
<-- S7,F6
21
Process Program Data
Large Process Program Request S7,F41-->
<-- S7,F42 Large Process Program
Acknowledge
Acknowledge may be “accepted
and will be performed later
with completion signaled”.
When the equipment is ready
to send:
<-- S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set request S13,F3-->
<-- S13,F4 Open Data Set Data
[START]
Repeat until ACKC13 indicates
error:
Read Data Set Request S13,F5-->
[END] <-- S13,F6 Read Data set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF
DATA"
[Then]
<-- S6,F11 Send Event Report
Event Report Acknowledge S6,F12--> “successful upload”
[ELSE]
<-- S6,F11 Send Event Report "bad
Event Report Acknowledge S6,F12--> upload"
[END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<-- S13,F8 Close Data Set Acknowledge
21 If the process program does not exist, a zero-length list will be sent.