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SEMI E10-0304 E © SEMI 1986, 2004 8 6.4 EQUIPMENT MAINTAINABILITY — The probability that the equipment will be retained in, or restored to, a condition where it can perform its intended function within a specified period…

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SEMI E10-0304
E
© SEMI 1986, 2004 7
• Unworked shifts, days
•
Installation, modification
rebuild or upgrade
•
Off-line training
• Shutdown/Start-up
Non-Scheduled
Time
Total Time
Operations
Time
Uptime
•
Process experiments
• Equipment experiments
•
Software qualification
Engineering
Time
Manufacturing
Time
Productive
Time
• Regular production
• Work for 3rd party
•
Rework
• Engineering runs
Standby
Time
•
No operator
• No product
• No support tool
Downtime
•
Maintenance delay
•
Repair
•
Change of
consumables/chemicals
•
Out-of-spec input
•
Facilities related
Unscheduled
Downtime
Scheduled
Downtime
•
Maintenance delay
• Production test
• Preventive maintenance
•
Change of
consumables/chemicals
•
Setup
•
Facilities related
Figure 2
SEMI E10 Summary of Time
6.3 EQUIPMENT AVAILABILITY — The probability that the equipment will be in a condition to perform its
intended function when required.
6.3.1 Equipment Dependent Uptime — The percent of time the equipment is in a condition to perform its intended
function during the period of operations time minus the sum of all maintenance delay downtime, out-of-spec input
downtime, and facilities-related downtime. This calculation is intended to reflect equipment reliability and
maintainability based solely on equipment merit.
equipment dependent uptime (%) =
equipment uptime × 100
(oper-time – (all maint-delay DT + out-of-spec input DT + fac-rel DT))
6.3.2 Supplier Dependent Uptime — The percent of time the equipment is in a condition to perform its intended
function during the period of operations time minus the sum of user maintenance delay downtime, out-of-spec input
downtime, and facilities-related downtime. This calculation subtracts only user maintenance delay downtime from
the period, thereby taking into account supplier delays for parts and service. The intention is to provide an effective
performance measurement for use in supplier service contracts.
supplier dependent uptime (%) =
equipment uptime × 100
(oper-time – (user maint-delay DT + out-of-spec input DT + fac-rel DT))
6.3.3 Operational Uptime — The percent of time the equipment is in a condition to perform its intended function
during the period of operations time. This calculation is intended to reflect overall operational performance for a
piece of equipment.
operational uptime
(%)
=
equipment uptime
×
100
operations time
SEMI E10-0304
E
© SEMI 1986, 2004 8
6.4 EQUIPMENT MAINTAINABILITY — The probability that the equipment will be retained in, or restored to, a
condition where it can perform its intended function within a specified period of time.
6.4.1 MTTR — Mean time to repair; the average time to correct a failure and return the equipment to a condition
where it can perform its intended function; the sum of all repair time (elapsed time not necessarily total man hours)
incurred during a specified time period (including equipment and process test time, but not including maintenance
delay downtime), divided by the number of failures during that period.
failuresof
timerepairtotal
MTTR
#
=
6.4.2 E-MTTR — Mean time to repair equipment-related failures; the average time to correct an equipment-related
failure and return the equipment to a condition where it can perform its intended function; the sum of all equipment-
related failure repair time (elapsed time, not necessarily total man hours) incurred during a specified time period
(including equipment and process test time, but not including maintenance delay downtime), divided by the number
of equipment-related failures during that period.
total repair time for equipment-related failures
# of equipment-related failures
E
–MTTR =
6.4.3 MTOL — Mean time off-line; the average time to maintain the equipment in or return the equipment to a
condition where it can perform its intended function when downtime is incurred; the sum of all downtime
(scheduled and unscheduled) during a specified time period, divided by the number of downtime events during that
period.
M
TOL
=
tota
l
equ
i
pmen
t
d
ownt
i
m
e
#
of
DT
events
6.4.4 Equipment Dependent Scheduled Downtime — The percent of time the equipment is not available to perform its
intended function due to scheduled downtime events such as preventive maintenance. This time period does not
include any maintenance delay downtime caused either by supplier or user. This calculation is intended to reflect
the need for preventive maintenance based solely on equipment design.
equipment dependent scheduled downtime (%) =
equipment scheduled downtime × 100
(oper-time – (all maint-delay DT + out-of-spec input DT + fac-rel DT))
6.4.5 Supplier Dependent Scheduled Downtime — The percent of time the equipment is not available to perform its
intended function due to scheduled downtime events, such as preventive maintenance. This time period does not
include any maintenance delay downtime caused by the user. This calculation is intended to reflect the need for
preventive maintenance based solely on equipment design and supplier response to service.
supplier dependent scheduled downtime (%) =
equipment scheduled downtime × 100
(oper-time – (user maint-delay DT + out-of-spec input DT + fac-rel DT))
6.5 EQUIPMENT UTILIZATION — The percent of time the equipment is performing its intended function during a
specified time period.
6.5.1 Operational Utilization — The percent of productive time during operations time. This calculation is intended
to be used for equipment utilization comparisons between operations with different work shift configurations, since
it does not include non-scheduled time.
operational utilization
(%)
=
p
roductive time
×
10
0
operations time
6.5.2 Total Utilization — The percent of productive time during total time. This calculation is intended to reflect
bottom-line equipment utilization.
total utilization
(%)
=
p
roductive time
×
10
0
total time
SEMI E10-0304
E
© SEMI 1986, 2004 9
Table 1 RAM Measurement Metric Summary
EQUIPMENT RELIABILITY
Metric How It Is Measured Ref #
MTBF
p
: Mean (productive) time between failures
productive time/
# of failures that occur during productive time
6.2.1
E-MTBF
p
: Mean (productive) time between
equipment-related failures
productive time/
# of equipment-related failures
that occur during productive time
6.2.2
MCBF: Mean cycles between failures total equipment cycles/
# of failures
6.2.3
E-MCBF: Mean cycles between equipment-related
failures
total equipment cycles/
# of equipment-related failures
6.2.4
EQUIPMENT AVAILABILITY
Metric How It Is Measured Ref #
equipment dependent uptime (%) equipment uptime × 100/(oper-time –
(all maint-delay DT + out-of-spec input DT + fac-rel DT))
6.3.1
supplier dependent uptime (%) equipment uptime × 100/(oper-time –
(users maint-delay DT + out-of-spec input DT + fac-rel DT))
6.3.2
operational uptime (%) equipment uptime × 100/
operations time
6.3.3
EQUIPMENT MAINTAINABILITY
Metric How It Is Measured Ref #
MTTR: Mean time to repair total repair time/
# of failures
6.4.1
E-MTTR: Mean time to repair for equipment-related
failures
total repair time for equipment-related failures/
# of equipment-related failures
6.4.2
MTOL: Mean time off-line total equipment downtime/
# of DT events
6.4.3
equipment dependent scheduled downtime (%) equipment scheduled downtime × 100/(oper-time –
(all maint-delay DT + out-of-spec input DT + fac-rel DT))
6.4.4
supplier dependent scheduled downtime (%) equipment scheduled downtime × 100/(oper-time –
(user maint-delay DT + out-of-spec input DT + fac-rel DT))
6.4.5
EQUIPMENT UTILIZATION
Metric How It Is Measured Ref #
operational utilization (%) productive time × 100/
operations time
6.5.1
total utilization (%) productive time × 100/
total time
6.5.2
NOTE: oper-time = operational time, DT = Downtime, fac-rel = facilities related, maint-delay = maintenance delay